KR-20260064133-A - Differential Pressure Generating Element, Mass Flow Control Device Including the Same, and Method for Manufacturing the Differential Pressure Generating Element

KR20260064133AKR 20260064133 AKR20260064133 AKR 20260064133AKR-20260064133-A

Abstract

A differential pressure generating element capable of forming a relatively fine Euro, a mass flow control device including the same, and a method for manufacturing the differential pressure generating element are disclosed. A differential pressure generating element is a differential pressure generating element housed within a mass flow control device to generate a pressure difference of a fluid, comprising a plurality of structures and a plurality of flow paths formed by contact between the plurality of structures and extending parallel to the direction of fluid flow. This invention is a technology developed with support from the Gyeonggi Hwaseong Industrial Promotion Agency (IP Product Innovation Support Project - Development of a Mass Flow Controller Capable of Detecting Changes in Discharge Flow Rate).

Inventors

박재현
이주형
박현수
전석환

Assignees

엠케이피 주식회사

Dates

Publication Date: 20260507
Application Date: 20241031

Claims (13)

In a differential pressure generating element that is housed within a mass flow control device and generates a pressure difference of a fluid, Multiple structures; and A differential pressure generating element comprising a plurality of fluid paths formed by contact between the plurality of structures and extending parallel to the direction of fluid flow.
In paragraph 1, The above structure is a differential pressure generating element that is a circular pipe.
In paragraph 1, A differential pressure generating element in which the length of the above structure is at least 10 times the diameter.
In paragraph 1, A differential pressure generating element further comprising a guide supporting the plurality of structures above.
In paragraph 4, A differential pressure generating element further comprising a holder that accommodates the above guide.
Inlet and outlet; A differential pressure generating element disposed between the inlet and outlet and comprising a plurality of flow paths formed by contact of a plurality of structures; A pressure sensor for measuring the pressure difference between the front and rear of the above differential pressure generating element; and A mass flow rate control device comprising: a control unit that controls the flow rate based on the above-mentioned pressure difference.
In paragraph 6, The above plurality of structures are slender structures, and The above-mentioned slender structure is a mass flow control device in the form of a pipe having a circular cross-section.
In paragraph 6, The above differential pressure generating element is, A guide for accommodating and aligning the above plurality of structures; and A mass flow control device further comprising a holder that accommodates the above guide.
In paragraph 6, The above plurality of channels extend parallel to the direction of fluid flow, and A mass flow control device in which the cross-sectional area of the above-mentioned Euro is relatively smaller than the cross-sectional area of the above-mentioned structure.
In paragraph 6, The above structure is a mass flow control device formed of either metal or ceramic.
In paragraph 8, The above guide is a mass flow control device having a receiving hole for accommodating the plurality of structures.
In Paragraph 11, A mass flow control device in which the cross-sectional shape of the above-mentioned receiving hole is one of a circular, elliptical, or polygonal shape.
In a method for manufacturing a differential pressure generating element, Step of preparing multiple structures; A step of arranging the plurality of structures to be in contact with one another to form a flow path between the plurality of structures; and A method for manufacturing a differential pressure generating element comprising the step of fixing the plurality of structures above.

Description

Differential Pressure Generating Element, Mass Flow Control Device Including the Same, and Method for Manufacturing the Differential Pressure Generating Element The present invention relates to a differential pressure generating element, a mass flow control device including the same, and a method for manufacturing a differential pressure generating element. More specifically, the invention relates to a differential pressure generating element having a microchannel formed therein, a mass flow control device including the same, and a method for manufacturing a differential pressure generating element. Differential pressure mass flow controllers are widely used in various industrial fields requiring precise fluid control, such as semiconductor manufacturing, chemical processes, and medical devices. These controllers measure the flow rate by utilizing the pressure difference between the upstream and downstream ends of a fluid path and control the flow rate using the measured data. In differential pressure mass flow controllers, the magnitude of the pressure difference between the upstream and downstream ends of the path determines the product's resolution. Conventionally, in order to increase the resolution of a differential pressure mass flow control device, the size of the fluid channel was formed to be small. To form a small fluid channel, conventionally, a plurality of plate materials with patterned grooves were stacked to form the fluid channel, or a fine cylindrical tube was used to form the fluid channel. However, conventional differential pressure mass flow control devices have a problem in that when multiple plates are stacked to form a fluid path, the fluid's movement path changes unnecessarily frequently, causing pressure loss and resulting in a non-linear relationship between differential pressure and flow rate. In addition, when conventional differential pressure mass flow control devices use fine cylindrical tubes to form a fluid path, the length of the fluid path cannot be formed as long as desired due to technical processing limitations, so the differential pressure generated in the case of fine flow is too small, which makes accurate measurement difficult. FIG. 1 is a diagram illustrating the structure of a mass flow rate control device according to an embodiment of the present invention. FIG. 2 is an exploded perspective view of a differential pressure generating element according to an embodiment of the present invention. FIG. 3 is a cross-sectional view of a differential pressure generating element according to an embodiment of the present invention. Figures 4a and 4b are drawings illustrating a structure inserted into a guide according to an example. Figure 5 is a drawing showing the cross-sectional area of a flow path formed in a guide according to an example. Figures 6a and 6b are drawings illustrating a structure inserted into a guide according to a modified example. Figure 7 is a diagram showing the cross-sectional area of a flow path formed in a guide according to a modified example. FIG. 8 is a flowchart of a method for manufacturing a differential pressure generating element according to an embodiment of the present invention. The embodiments described in this specification may be modified in various ways. Specific embodiments may be depicted in the drawings and described in detail in the detailed description. However, specific embodiments disclosed in the accompanying drawings are intended only to facilitate understanding of various embodiments. Accordingly, the technical concept is not limited by specific embodiments disclosed in the accompanying drawings, and it should be understood that it includes all equivalents or substitutions that fall within the spirit and scope of the invention. Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but these components are not limited by the aforementioned terms. The aforementioned terms are used solely for the purpose of distinguishing one component from another. In this specification, terms such as “comprising” or “having” are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. When a component is described as being “connected” or “connected” to another component, it should be understood that it may be directly connected to or connected to that other component, or that there may be other components in between. On the other hand, when a component is described as being “directly connected” or “directly connected” to another component, it should be understood that there are no other components in between. Meanwhile, a "module" or "part" for a component as used in this specification performs at least one function or operation.