KR-20260064139-A - ELECTRONIC DEVICE AND METHOD FOR DETECTING DEFECT THEREOF

KR20260064139AKR 20260064139 AKR20260064139 AKR 20260064139AKR-20260064139-A

Abstract

An electronic device for performing the defect detection method of the present disclosure may include a sensing device comprising a plurality of operating elements and a control element; and a processing device. For each of a plurality of set excitation patterns, the control element controls at least one operating element using at least one control signal so that at least one acoustic wave having at least one frequency based on at least one operating element corresponding to the excitation pattern among the plurality of operating elements propagates to a target object, and can acquire a plurality of response signals corresponding to a plurality of reflected waves sensed as the at least one acoustic wave is reflected from the target object. The processing device can determine whether the target object is defective by using an artificial intelligence model that takes a plurality of response signals corresponding to each of the plurality of excitation patterns as input.

Inventors

알칸타라, 카를로스 씨.제이

Assignees

삼성전자주식회사

Dates

Publication Date: 20260507
Application Date: 20241031

Claims (17)

As an electronic device for performing a defect detection method, A sensing device comprising a plurality of operating elements and control elements; and It includes a processing device, The above control element is, For each of the set plurality of excitation patterns, at least one operating element is controlled using at least one control signal so that at least one acoustic wave having at least one frequency based on at least one operating element corresponding to the excitation pattern among the plurality of operating elements is propagated to a target object. A plurality of response signals corresponding to a plurality of reflected waves sensed as the above at least one acoustic wave is reflected from the target object are obtained, and The above processing device is, Determining whether the target object is defective by using an artificial intelligence model that takes as input the plurality of response signals corresponding to each of the plurality of excitation patterns above. Electronic device.
In Article 1, The film included in each of the above plurality of operating elements is, Having different thicknesses by a re-shaping process of the film included in each of the plurality of operating elements, Electronic device.
In Article 2, The first frequency corresponding to the first operating element among the above at least one frequency is, A resonant frequency based on the thickness of the film included in the first operating element, Electronic device.
In Paragraph 3, The acoustic wave corresponding to the first operating element above is, An acoustic wave having at least one of a modulated frequency and a modulated amplitude based on the above resonant frequency, Electronic device.
In Article 1, The above electronic device is, A plurality of operating elements including the control element and the plurality of operating elements connected via a TSV (through-silicon-via) interposer Electronic device.
In Article 1, The above control element is, It includes a plurality of control elements, and The above electronic device is, A plurality of operating elements and a plurality of control elements connected through a plurality of TSV interposers, Electronic device.
In Article 1, Each of the above at least one control signal is, A voltage signal applied to each of the above-mentioned at least one operating element, Electronic device.
In Article 2, The above plurality of response signals are, A plurality of voltage signals indicating the degree of bending of the film included in each of the plurality of operating elements by the plurality of reflected waves, Electronic device.
In Article 1, Among the above plurality of excitation patterns, the first excitation pattern is, A pattern in which at least one operating element is activated, and the remaining operating elements among the plurality of operating elements, excluding at least one operating element, are deactivated. Electronic device.
In Paragraph 9, Among the plurality of operating elements above, the first operating element is, Activated in at least one of the above plurality of excitation patterns, Electronic device.
In Article 1, When the at least one acoustic wave propagates from the first surface of the sensing device and the plurality of reflected waves are reflected from the second surface of the target object, the first surface has a larger area than the second surface. Electronic device.
In Article 1, The above artificial intelligence model is, An artificial intelligence model trained to distinguish between first objects and second objects based on first training data consisting of response signals corresponding to each of first objects in which no defects were detected, and second training data consisting of response signals corresponding to each of second objects in which defects were detected. Electronic device.
In Article 12, The above first training data is, It includes learning data composed of a response signal corresponding to a pair consisting of any one of the plurality of excitation patterns and any one of the first objects, and The above second training data is, Learning data comprising a response signal corresponding to a pair composed of any one of the plurality of excitation patterns and any one of the second objects, Electronic device.
In Article 1, Each of the above plurality of operating elements is, MEMS (Micro-Electro-Mechanical Systems), The above-mentioned object is, Wafer-in, Electronic device.
A method for detecting defects in an electronic device including a sensing device comprising a plurality of operating elements and a control element, and a processing device, wherein A step of controlling at least one operating element using at least one control signal such that, for each of the set plurality of excitation patterns, at least one acoustic wave having at least one frequency based on at least one operating element corresponding to the excitation pattern among the plurality of operating elements is propagated to a target object; A step of acquiring a plurality of response signals corresponding to a plurality of reflected waves sensed as the above at least one acoustic wave is reflected from the target object; and A step comprising determining whether the target object is defective using an artificial intelligence model that takes as input the plurality of response signals corresponding to each of the plurality of excitation patterns. Method for detecting defects in electronic devices.
In Article 15, The above defect detection method is, The defect detection method is performed after each of the plurality of detailed processes included in the manufacturing process of the above-mentioned object is completed, and if the defect of the above-mentioned object after the first detailed process among the plurality of detailed processes is confirmed to be greater than or equal to a set ratio, the method further includes the step of providing information about the first detailed process. Method for detecting defects in electronic devices.
A computer-readable non-transient recording medium having a program for executing the defect detection method of claim 15 on a computer.

Description

Electronic device and method for detecting defects thereof The present disclosure relates to an electronic device and a method for detecting defects therein. Non-destructive defect detection methods can be used to detect defective products resulting from defects occurring during the product manufacturing process. In particular, non-destructive defect detection methods utilizing acoustic resonance are widely used. FIG. 1 is a drawing for explaining an electronic device according to one embodiment. FIG. 2 is a drawing for explaining a method of manufacturing an operating element according to one embodiment. FIG. 3 is a diagram illustrating a plurality of operating elements and control elements connected through a through-silicon-via (TSV) interposer according to one embodiment. FIG. 4 is a diagram illustrating the excitation mode of an operating element according to one embodiment. FIG. 5 is a diagram illustrating the sensing mode of an operating element according to one embodiment. FIG. 6 is a diagram illustrating a method for determining whether a target object is defective using an artificial intelligence model according to one embodiment. FIG. 7 is a flowchart illustrating a method for detecting defects in an electronic device according to one embodiment. The terms used in the embodiments have been selected to be as widely used as possible, taking into account their functions in the present disclosure; however, these may vary depending on the intent of those skilled in the art, case law, the emergence of new technologies, etc. Additionally, in specific cases, terms have been arbitrarily selected by the applicant, and in such cases, their meanings will be described in detail in the relevant explanatory section. Therefore, terms used in the present disclosure should be defined not merely by their names, but based on their meanings and the overall content of the present disclosure. When a part of a specification is described as "comprising" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components. Furthermore, terms such as "...part" or "...module" as used in the specification refer to a unit that processes at least one function or operation, and this may be implemented in hardware or software, or as a combination of hardware and software. Embodiments of the present disclosure are described below with reference to the attached drawings so that those skilled in the art can easily implement them. However, the present disclosure may be embodied in various different forms and is not limited to the embodiments described herein. Embodiments of the present disclosure will be described in detail below with reference to the drawings. FIG. 1 is a drawing for explaining an electronic device according to one embodiment. Referring to FIG. 1, the electronic device (100) may include a sensing device (110) and a processing device (120). Additionally, the sensing device (110) may include a plurality of operating elements (111) and control elements (112). Only the components related to the present embodiment are shown in the electronic device (100) illustrated in FIG. 1. Therefore, it can be understood by those skilled in the art related to the present embodiment that other general-purpose components may be included in addition to the components illustrated in FIG. 1. According to one embodiment, the target object may be a wafer. That is, the electronic device (100) may be a device for detecting wafer defects in a semiconductor manufacturing line, but is not limited thereto. However, the target object is not limited to a wafer, and the electronic device (100) may be used in a non-destructive defect detection method for various objects. For example, the defect detection method according to one embodiment may be used in various technical fields such as medical imaging and materials science. According to one embodiment, the sensing device (110) may be a device that operates in one of two operating modes: an excitation mode that propagates acoustic waves to a target object, and a sensing mode that receives reflected waves from the target object and obtains a response signal corresponding to the reflected waves. In this regard, by utilizing the inherent characteristics of acoustic waves that do not cause damage to the target object, the sensing device (110) may operate in one of the excitation mode and the sensing mode without contacting the target object or causing damage to the target object. That is, the sensing device (110) can rapidly scan the surface of the target object in a non-destructive manner. According to one embodiment, the operating element may be a device that is activated or deactivated according to an excitation pattern. Such an operating element may be a device that propagates acoustic waves to a target object and receives reflected waves reflected from the target object. The operating element may be a Micro Electro Mec