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KR-20260064355-A - X-ray tube

KR20260064355AKR 20260064355 AKR20260064355 AKR 20260064355AKR-20260064355-A

Abstract

The present invention relates to an X-ray tube and is characterized by comprising: an electron gun module for generating an electron beam; an anode for focusing the electron beam to strike a target and generate X-rays; a spacer for providing a vacuum and electrical insulation necessary for X-ray generation; and a blocking portion formed inside the spacer for preventing backscattered electron beams (BSEB) reflected from the target of the anode from reaching the inner wall of the spacer.

Inventors

  • 오근영

Assignees

  • (주)피코팩

Dates

Publication Date
20260507
Application Date
20241031

Claims (20)

  1. Electron gun module that generates an electron beam; An anode section in which the above electron beam is focused to strike a target and generate X-rays; A spacer section providing the vacuum and electrical insulation necessary for the generation of the above X-rays; and An X-ray tube characterized by including a blocking portion formed on the inner side of the spacer portion to prevent a backscattered electron beam (BSEB) bounced back from the target of the anode portion from reaching the inner wall of the spacer portion.
  2. In paragraph 1, The X-ray tube is characterized by the above electron gun module including a cathode electrode, an emitter, a gate electrode, and a first focusing electrode to generate and extract electrons and generate an electron beam focused toward the anode.
  3. In paragraph 2, The above-described emitter is an X-ray tube characterized by using a metal filament or a carbon nanotube.
  4. In paragraph 1, The above spacer part is, A first spacer interposed at a predetermined height on the upper surface of the fixing plate of the blocking part, and An X-ray tube characterized by including a second spacer interposed on the upper surface of the first spacer.
  5. In paragraph 4, An X-ray tube characterized in that the first spacer and the second spacer are each formed of a low-resistivity insulator and a high-resistivity insulator, respectively.
  6. In paragraph 5, An X-ray tube characterized by sintering the above low-resistivity insulator and high-resistivity insulator by adding 2 to 50 wt% and 0.01 to 2 wt% of titania ( TiO2 ) , respectively, based on the total amount of alumina ( Al2O3 ) insulator.
  7. In paragraph 1, X-ray tube characterized by the above-mentioned blocking portion being formed of metal or alloy.
  8. In paragraph 1, An X-ray tube characterized by the above-mentioned blocking member being formed from any one of aluminum, stainless steel, copper, molybdenum, or Kovar.
  9. In paragraph 1, The above blocking unit is, A fixing plate combined with the spacer, and An X-ray tube characterized by including a shield on one side of the upper surface of the fixed plate, facing in the direction of the anode, to prevent the backscattered electron beam (BSEB) from reaching a part of the space section.
  10. In Paragraph 9, The above-mentioned fixed plate is an X-ray tube characterized by being interposed between the electron gun module and the first space.
  11. In Paragraph 9, The X-ray tube is characterized by the above-mentioned barrier being formed at a predetermined distance from the inner side of the spacer to prevent backscattered electron beams (BSEB) from entering the inner wall of the spacer.
  12. In Paragraph 9, The above-described shield is an X-ray tube characterized by blocking backscattered electron beams (BSEB) reaching maximum horizontal and vertical directions.
  13. In Paragraph 9, An X-ray tube characterized by the height of the above-mentioned shielding layer in the direction of the anode being formed such that the voltage applied to the anode can be insulated by a height such that the backscattered electron beam does not reach the second spacer from the junction of the first space and the second space.
  14. In Paragraph 9, An X-ray tube characterized in that the height of the above-mentioned shielding layer in the anode direction acts as a second focusing electrode so that an electron beam generated from the electron gun module can be focused onto an anode target.
  15. An electron gun module comprising a cathode electrode, an emitter, a gate electrode, and a first focusing electrode, for generating and extracting electrons and generating an electron beam focused toward the anode; An anode portion in which the electron beam is focused to strike a target and generate X-rays; and A spacer portion that provides the vacuum and electrical insulation necessary for the generation of the above X-rays; comprising, An X-ray tube characterized in that a first focusing electrode formed vertically on one side of the upper surface of the gate electrode acts as a blocking mechanism to prevent backscattered electron beams (BSEB) bouncing back from the target of the anode portion from impacting the inner wall of the spacer portion.
  16. In paragraph 15, An X-ray tube characterized in that the gate electrode and the first focusing electrode are integrally formed of metal or alloy.
  17. In paragraph 15, An X-ray tube characterized in that the gate electrode and the first focusing electrode are formed from any one of aluminum, copper, molybdenum, stainless steel, or Kovar.
  18. In paragraph 15, The X-ray tube is characterized by the first focusing electrode being formed at predetermined intervals on the inner side of the spacer so that the backscattered electron beam (BSEB) cannot enter the inner wall of the spacer.
  19. In Paragraph 18, The above space section is, A first space interposed on the upper surface of the gate electrode, and An X-ray tube characterized by including a second space interposed on the upper surface of the first space portion.
  20. In paragraph 15, An X-ray tube characterized by the first focusing electrode blocking backscattered electron beams reaching maximum horizontal and vertical directions.

Description

X-ray tube The present invention relates to an X-ray tube, and more specifically, to an X-ray tube capable of operating stably at high voltage. Generally, an X-ray tube generates X-rays by generating electrons from the cathode inside a vacuum vessel, accelerating them toward the anode to which a high voltage is applied, and causing them to collide with a metal target in the anode. At this time, the voltage difference between the anode and the cathode is defined as the acceleration voltage that accelerates the electrons. Depending on the application of the X-ray tube, electrons are accelerated with an acceleration voltage ranging from several to several hundred kV. A gate and a focusing electrode, etc., are provided between the anode electrode and the cathode electrode. However, these X-ray tubes had a problem in that when the electron beam (E-beam) generated in the cathode section struck the anode target, the electron beam (Back-Scattered Electron Beam; BSEB) that bounced back could strike the inner wall of the tube, and due to this collision, the back-scattered electron beam would get embedded in the inner wall of the tube or secondary electrons would be generated near the surface of the tube, causing charging and consequently generating an electrical arc inside the tube, which damaged the tube. FIG. 1 is a cross-sectional view showing an X-ray tube according to an embodiment of the present invention. FIG. 2 is a cross-sectional view showing an X-ray tube according to another embodiment of the present invention. To fully understand the structure and effects of the present invention, preferred embodiments of the present invention are described with reference to the attached drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms and various modifications can be made. The description of these embodiments is provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention. In the attached drawings, the components are depicted enlarged from their actual size for convenience of explanation, and the proportions of each component may be exaggerated or reduced. Unless otherwise defined, the terms used in the embodiments of the present invention may be interpreted in the sense commonly known to those skilled in the art. Hereinafter, the present invention will be described in detail by explaining exemplary embodiments of the present invention with reference to the attached drawings. FIG. 1 is a cross-sectional view showing an X-ray tube according to an embodiment of the present invention. Referring to FIG. 1, an X-ray tube according to one embodiment of the present invention may be configured to include an electron gun module (100), an anode (200), a spacer (300), and a blocking part (400). The electron gun module (100) above can generate and extract electrons by heating a filament or applying an electric field to a nanostructure material, and generate an electron beam (E-beam) focused in a predetermined direction (anode direction). The electron gun module (100) may include a cathode electrode (110), an emitter (120), a gate electrode (130), and a first focusing electrode (140). Since the electron gun module (100) is a widely known technology in this field, a detailed description will be omitted. The emitter (120) above may use a metal filament or a carbon nanotube. The anode portion (200) above can generate X-rays by focusing an electron beam (E-beam) and striking a target (210) on the lower portion. Here, the X-rays can be irradiated to the outside through a window (321). The target (210) may be made of molybdenum (Mo), tantalum (Ta), tungsten (W), copper (Cu), gold (Au), etc., and the window (321) may be made of beryllium (Be), beryllium alloy, copper (Cu), etc., which are materials that do not absorb X-rays. The above spacer part (300) can provide the vacuum and electrical insulation required for X-ray generation in the form of a cylindrical tube. The above spacer portion (300) may include a first spacer (310) interposed at a predetermined height on the upper surface of a fixing plate (420) that fixes the blocking membrane (410) of the blocking portion (400), and a second spacer (320) interposed between the upper surface of the first spacer (310) and the vacuum cap (500). Here, the fixed plate (420) may be interposed on the upper surface of the electron gun module (100), and the second spacer (320) may have a window (321) formed therein to allow X-rays to be emitted to the outside. The first spacer (310) and the second spacer (320) can each be formed of a low-resistivity insulator and a high-resistivity insulator. Here, the low-resistivity insulator and the high-resistivity insulator may include a conductive dopant dispersed within the ceramic. The ceramic may be alumina ( Al₂O₃ ), zirconia ( ZrO₂ ), yttria ( Y₂O₃ ), chromium oxide ( Cr₂O₃ ), etc