KR-20260064526-A - ELECTRICAL CONNECTION DEVICE

KR20260064526AKR 20260064526 AKR20260064526 AKR 20260064526AKR-20260064526-A

Abstract

The electrical connection device comprises a first substrate having a first surface and a second surface facing in the opposite direction to the first surface, a fixing nut disposed inside the first substrate, a second substrate laminated on the second surface, and a fixing bolt disposed on the second substrate. The threaded portion of the fixing bolt passes through at least a part of the second substrate and is inserted into the first substrate from the second surface, and the threaded portion engages with the fixing nut to fix the first substrate to the second substrate.

Inventors

사노 가오리
니노미야 가즈노리
기노시타 시게루
기다 나오후미
곤 미즈호

Assignees

가부시키가이샤 니혼 마이크로닉스

Dates

Publication Date: 20260507
Application Date: 20251014
Priority Date: 20241030

Claims (10)

As an electrical connection device used for inspecting objects, A first substrate having a first surface facing the object to be inspected and a second surface facing in the opposite direction of the first surface, and A fixing nut disposed inside the first substrate, and A second substrate laminated on the second surface, and A fixing bolt that passes through at least a portion of the second substrate, has a screw portion inserted into the first substrate from the second surface, and the screw portion engages with the fixing nut to fix the first substrate to the second substrate. An electrical connection device equipped with
In paragraph 1, The above fixing nut is, A groove forming part having a groove corresponding to the groove formed in the threaded part of the above-mentioned fixing bolt, and A flange portion connected to the above-mentioned groove forming portion and extending in a direction intersecting the extension direction of the above-mentioned fixing bolt Includes, An electrical connection device in which the flange portion is fitted onto the first substrate and the fixing nut is fixed to the first substrate.
In paragraph 2, The above flange portion is, An insertion portion inserted into the first substrate by extending parallel to the first surface, and A convex portion disposed on the surface of the insertion portion and protruding in a direction intersecting the elongation direction of the insertion portion Equipped with, An electrical connection device in which the concave portion into which the convex portion is fitted is formed on the first substrate.
In paragraph 3, The first substrate above is, A first layer having the above-mentioned first surface, and A second layer having the above-mentioned second surface Includes, The above flange portion is inserted into the space formed between the first layer and the second layer, and An electrical connection device in which the above-mentioned concave portion is formed in at least one of the first layer and the second layer.
In paragraph 1, An electrical connection device in which the above-mentioned fixing nut and the above-mentioned fixing bolt do not protrude toward the object to be inspected beyond the first surface.
In paragraph 1, An electrical connection device in which the material of the first substrate is ceramic.
In any one of paragraphs 1 through 6, Further equipped with a probe that contacts the above-mentioned object to be inspected, An electrical connection device wherein the first substrate is a probe head that maintains the probe to extend from the first surface toward the object to be inspected.
In Paragraph 7, The electrical connection device wherein the second substrate is a wiring board having internal wiring that is electrically connected to the probe.
In paragraph 8, Further comprising a printed circuit board laminated on the second substrate, The above fixing bolt continuously penetrates the second substrate and the printed circuit board, and The outer diameter of the second portion of the fixing bolt penetrating the printed circuit board is larger than the outer diameter of the first portion of the fixing bolt penetrating the second substrate, and An electrical connection device in which the end surface of the second part, which protrudes outwardly beyond the outer edge of the first part at the boundary between the first part and the second part, is in contact with the second substrate.
In Paragraph 9, Further comprising a rigid stiffener laminated on the above printed circuit board, An electrical connection device in which the portion of the second part of the above-mentioned fixing bolt exposed from the above-mentioned printed circuit board is housed in a hole formed in the above-mentioned stiffener.

Description

Electrical connection device The present invention relates to an electrical connection device used for inspecting the electrical characteristics of an object to be inspected. An electrical connection device is used to electrically connect an object to be inspected and an inspection device in order to measure the electrical characteristics of an object to be inspected, such as an integrated circuit. The electrical connection device includes components such as a probe that contacts the object to be inspected, a probe head that supports the probe, and a wiring board on which internal wiring is arranged to electrically connect the probe and the inspection device. The wiring board includes internal wiring such as signal wiring that propagates electrical signals between the signal terminal of the object to be inspected and the inspection device, grounding wiring that supplies ground voltage to the object to be inspected, and power supply wiring that supplies power voltage to the object to be inspected. Probe pads that connect to the internal wiring are disposed on the surface of the wiring board. By laminating the probe head with the wiring board, the probe contacts the probe pads, and the probe is electrically connected to the internal wiring of the wiring board. The probe head is secured to the wiring board, for example, by a fixing screw inserted from the lower surface facing the object to be inspected. In this case, there is a risk that the fixing screw may loosen due to the influence of vibrations or other factors during the inspection of the object. There is a concern that the object to be inspected may be damaged if the loosened fixing screw protrudes from the lower surface of the probe head and comes into contact with the object to be inspected, or if the fixing screw falls from the probe head onto the object to be inspected. Taking the above-mentioned problem into account, the present invention aims to provide an electrical connection device that prevents damage to an object to be inspected by a screw that fixes the components of the electrical connection device. An electrical connection device according to one embodiment of the present invention comprises a first substrate having a first surface and a second surface facing in a direction opposite to the first surface, a fixing nut disposed inside the first substrate, a second substrate laminated on the second surface, and a fixing bolt disposed on the second substrate. A threaded portion of the fixing bolt passes through at least a part of the second substrate and is inserted into the first substrate from the second surface, and the threaded portion of the fixing bolt engages with the fixing nut to fix the first substrate to the second substrate. According to the present invention, an electrical connection device can be provided that prevents damage to an object to be inspected by a screw that fixes a component of the electrical connection device. FIG. 1 is a schematic diagram showing the configuration of an electrical connection device according to an embodiment. FIG. 2 is a schematic enlarged view showing the structure of a fixing nut and a fixing bolt of an electrical connection device according to an embodiment. FIG. 3 is a schematic enlarged view showing different structures of a fixing nut and a fixing bolt of an electrical connection device according to an embodiment. FIG. 4 is a schematic top view showing the structure of a fixing nut of an electrical connection device according to an embodiment. Figure 5 is a schematic diagram showing the configuration of an electrical connection device of a comparative example. FIG. 6 is a schematic diagram showing the configuration of an electrical connection device according to a modified example of an embodiment. Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, identical or similar parts are denoted by identical or similar reference numerals. However, it should be noted that the drawings are schematic and that the ratios of the thicknesses of each part may differ from reality. Furthermore, it is understood that there are parts with different dimensional relationships or ratios between the drawings. The embodiments described below are intended to illustrate devices or methods for embodying the technical concept of the present invention, and the embodiments of the present invention are not limited to the materials, shapes, structures, arrangements, etc., of the constituent parts. The electrical connection device (1) according to the embodiment illustrated in FIG. 1 is used to measure the electrical characteristics of an object to be inspected (2). The electrical connection device (1) comprises a first substrate (20) having a first surface (201) facing the object to be inspected (2) and a second surface (202) facing in the opposite direction of the first surface (201), and a second substrate (30) laminated on the second s