KR-20260064571-A - WELDMENTS, CHAMBER ARRANGEMENTS AND SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING WELDMENTS, AND METHODS OF MAKING WELDMENTS FOR CHAMBER ARRANGEMENTS AND SEMICONDUCTOR PROCESSING SYSTEMS

KR20260064571AKR 20260064571 AKR20260064571 AKR 20260064571AKR-20260064571-A

Abstract

A weldment is formed of a ceramic material and comprises a channel body having a plate portion, a first sidewall portion, and a second sidewall portion. The plate portion of the channel body has a first surface and a second surface. The first sidewall portion extends from the plate portion and is substantially orthogonal to the first surface of the plate portion of the channel body. The second sidewall portion is spaced apart from the first sidewall portion of the channel body and is substantially parallel to the first sidewall portion of the channel body. The channel body has a single, integral structure in which no weld is formed using a cutting technique to limit optical effects associated with dimensional changes introduced into the channel body by welding. A chamber arrangement and a semiconductor processing system including a weldment, a method for manufacturing a weldment, and related methods for depositing a material layer and/or removing material from a substrate supported within the weldment are also described.

Inventors

라비노비치 펠릭스
아지미 아민
반나 사메르
요람 버거

Assignees

에이에스엠 아이피 홀딩 비.브이.

Dates

Publication Date: 20260507
Application Date: 20251027
Priority Date: 20241030

Claims (20)

As a welded body, It includes a channel body formed of a ceramic material, and the channel body, A plate portion having a first surface and a second surface; A first sidewall portion extending from the plate portion and substantially orthogonal to the first surface of the plate portion; and It has a second side wall portion spaced apart from the first side wall portion and substantially parallel to the first side wall portion of the channel body, The above channel body is a welded body having a single integral configuration that does not have a weld formed using a subtractive manufacturing technique to limit optical effects associated with dimensional variations introduced into the channel body by welding.
In claim 1, the channel body has a plurality of channel body rib portions extending from a second surface of the plate portion, and the plurality of channel body rib portions are formed using the subtraction manufacturing technique, forming a welded body.
In paragraph 2, the plurality of channel body rib portions are substantially orthogonal to the first side wall portion of the channel body, forming a welded body.
A welded body according to paragraph 2, wherein one or more of the plurality of channel body rib portions cross the plate portion of the channel body, the first sidewall portion has a plurality of first sidewall rib portions extending from each of the rib portions of the plurality of channel body rib portions defined using wire saw technology, and the second sidewall portion has a plurality of second sidewall rib portions extending from each of the rib portions of the plurality of channel body rib portions defined using wire saw technology.
In paragraph 1, A plate body formed of the above ceramic material and separated from the plate portion of the channel body by the first sidewall portion and the second sidewall portion of the channel body; A first sidewall weld portion for joining the above plate body to the first sidewall portion; and A welded body further comprising a second sidewall weld that joins the plate body to a second sidewall portion of the channel body, wherein the second sidewall weld is substantially parallel to the first sidewall weld.
In paragraph 5, the plate body defines a passage, and the welded body is, A tubular body separated from the channel body by the plate body; and A welded body further comprising a tubular body that joins the tubular body to the plate body.
In claim 5, the plate body has a ribbed surface having an inner surface and a plurality of rib portions extending therefrom, the inner surface facing the channel body, and the plate body has a single integral configuration having no welds formed using subtractive manufacturing techniques to limit optical effects associated with dimensional variations introduced into the channel body by welding.
In claim 7, the channel body has a plurality of rib portions extending from a first side wall portion of the channel body, and the plurality of rib portions extending from the plate body are joined to the plurality of rib portions extending from the first side wall portion by an intermediate weld.
In paragraph 1, An injection flange body in contact with the above channel body; and A welded body further comprising an injection end weld that joins the injection flange body to the plate portion of the channel body, the first sidewall portion of the channel body, and the second sidewall portion of the channel body.
In paragraph 1, A shelf body formed of ceramic material, A shelf portion separating the first sidewall portion of the channel body from the second sidewall portion of the channel body; A shelf body having an end rib portion extending from the shelf portion and substantially orthogonal to the shelf portion of the shelf body; A weld between the first shelf body and the first side wall that connects the shelf body to the first side wall portion of the channel body; and It further includes a weld between the second shelf body and the second side wall that connects the shelf body to the second side wall portion of the channel body, The above shelf body is a welded body having a single integral configuration that does not have a weld formed using a subtractive manufacturing technique to limit fluid flow effects associated with dimensional variations introduced into the shelf portion of the shelf body by welding the shelf portion of the shelf body to the end rib portion of the shelf body.
In Paragraph 10, An exhaust flange body in contact with the above channel body; and A welded body further comprising an exhaust end weld that connects the exhaust flange body to the shelf portion of the shelf body, the first sidewall portion of the channel body, and the second sidewall portion of the channel body.
In paragraph 1, the above-mentioned subtractive manufacturing technology includes at least a wire saw operation, a welded body.
A welded body according to claim 1, further comprising a slab removed from a single integral workpiece while forming the channel body using the above-described subtraction manufacturing technique.
As a semiconductor processing system, A process fluid source comprising a silicon-containing material layer precursor; A chamber array coupled to the above-mentioned process fluid supply source, The welded body cited in paragraph 1; and A chamber arrangement comprising a substrate support arranged within the welded body and internally supported to rotate about a rotation axis, the substrate support configured to be seated on the substrate while performing at least one of depositing a material layer onto the substrate and removing material from the substrate; and A semiconductor processing system comprising an exhaust source coupled to a process fluid supply source by the above-mentioned welded body.
As a method for manufacturing a welded body, A step of forming a channel body from a workpiece formed of a single integral channel body made of a ceramic material, wherein the channel body has a plate portion having a first surface and a second surface, a first sidewall portion extending from the plate portion and substantially orthogonal to the first surface of the plate portion, and a second sidewall portion spaced apart from the first sidewall portion and substantially parallel to the first sidewall portion. Step of forming a plate body; The method includes the step of coupling the above plate body to the above channel body, A method in which the channel body has a single integral configuration having no welds formed using subtractive manufacturing techniques to limit optical effects associated with dimensional variations introduced into the channel body by welding.
In paragraph 15, a method wherein one or more of the channel body and the plate body are formed using wire saw technology.
In paragraph 15, A step of forming one or more lateral slots within the workpiece of the channel body using wire saw technology; A step of forming one or more first sidewall rib slots within the channel body workpiece using the wire saw technique described above; and A method further comprising the step of forming one or more second sidewall rib slots within the channel body workpiece using the wire saw technique described above.
In item 15, the step of coupling the plate body to the channel body is A step of forming a first sidewall weld between the plate body and the first sidewall portion of the channel body; and A method comprising the step of forming a second sidewall weld between the plate body and the second sidewall portion of the channel body.
In paragraph 15, Step of forming a lathe body using wire saw technology; and A method further comprising the step of joining the shelf body to one or more of the channel body and the plate body.
In paragraph 15, A step of joining the injection flange body to the channel body using an injection end weld; and A method further comprising the step of joining an exhaust flange body to a channel body using an exhaust end weld.

Description

Weldments, chamber arrangements including weldments and semiconductor processing systems, and methods of making weldments for chamber arrangements and semiconductor processing systems The present disclosure generally relates to welded bodies, and more specifically to a method for manufacturing welded bodies using a subtractive manufacturing technique. Structures such as ceramic structures can be formed by manufacturing individual parts and then welding the pieces together to form a weldment. Welding generally requires heating the individual parts to be joined to relatively high temperatures so that molten material can be introduced between the parts and subsequently solidify between them, and the solidified material then joins the individual parts together. One challenge in forming such weldments is that the heat used during the welding process tends to locally alter the mechanical properties of the materials forming the individual parts joined by the weldment, for example, making the materials relatively brittle and prone to fracture. Furthermore, while changes in the mechanical properties of the materials can be reversed (at least partially) using post-weld heat treatment, heat-treated weldments generally add time and complexity to the weldment manufacturing process due to the time required to heat and then cool the weldment, depending on the number of separate parts and weldments required to manufacture the weldment. These systems and methods have generally been used appropriately for their intended purposes. However, there remains a need in the art for improved welds, chamber arrangements containing welds, semiconductor processing systems, and methods for manufacturing welds. The present disclosure provides a solution to this need. A welded body is provided. The welded body comprises a channel body formed of a ceramic material and having a plate portion, a first sidewall portion, and a second sidewall portion. The plate portion of the channel body has a first surface and a second surface. The first sidewall portion extends from the plate portion and is substantially orthogonal to the first surface of the plate portion of the channel body. The second sidewall portion is spaced apart from the first sidewall portion of the channel body and is substantially parallel to the first sidewall portion of the channel body. The channel body has a single, integral configuration that does not have welds formed using a subtractive manufacturing technique to limit optical effects associated with dimensional variations introduced into the channel body by welding. In addition to one or more of the features described above, or as an alternative, additional examples may include the channel body having two or more channel body rib portions extending from a second surface of the plate portion. The two or more channel body rib portions may be formed using a subtractive manufacturing technique. In addition to one or more of the features described above, or as an alternative, additional examples may include two or more channel body rib portions being substantially orthogonal to a first sidewall portion of the channel body. In addition to one or more of the features described above, or as an alternative, additional examples may include a plate body formed of a ceramic material and separated from a plate portion of a channel body by a first sidewall portion and a second sidewall portion of a channel body, a first sidewall weld connecting the plate body to the first sidewall, and a second sidewall weld connecting the plate body to the second sidewall of the channel body. The second sidewall weld may be substantially parallel to the first sidewall weld. In addition to one or more of the features described above, or as an alternative, additional examples may include one or more of the channel body rib portions crossing the plate portion of the channel body. The first sidewall portion may have two or more first sidewall rib portions extending from each of the two or more channel body rib portions defined using wire saw technology. The second sidewall portion may have two or more second sidewall rib portions extending from each of the two or more chamber body rib portions defined using wire saw technology. In addition to one or more of the features described above, or as an alternative, additional examples may include the plate body defining a passage. The weld may further include a tubular body separated from the channel body by the plate body. The tubular body weld may join the tubular body to the plate body. In addition to one or more of the features described above, or as an alternative, additional examples may include the plate body having an inner surface and an outer surface, with two or more plate body rib portions extending therefrom. The inner surface of the plate body may face the channel body. The plate body may have a single, integral configuration without welds formed using subtractive manufacturing techniques to limit o