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KR-20260064580-A - FLUID DEVICE

KR20260064580AKR 20260064580 AKR20260064580 AKR 20260064580AKR-20260064580-A

Abstract

The objective is to properly detect the temperature of the fluid flowing through the center of the flow path without bringing the temperature detection unit into direct contact with the fluid. To this end, the device comprises a valve section, a valve chamber (114), an inlet-side flow path (113), and an outlet-side flow path, a main body section (110) integrally formed by a resin material, and a temperature detection section (170) for detecting the temperature of a fluid flowing through the main body section (110). The inlet-side flow path (113) has a first flow path section (113A) extending along a first axis line (AX1) and a second flow path section (113B) extending along a second axis line (AX2) intersecting the first axis line (AX1). The first flow path section (113A) and the second flow path section (113B) are connected in a connection area (113C). A protrusion (116) is formed on the main body section (110) that protrudes along the first axis line (AX1) from the inner surface of the connection area (113C), and inside the protrusion (116) the temperature A shut-off valve (100) is provided having a receiving hole (116a) formed to accommodate a detection unit (170).

Inventors

  • 이노우에, 아츠시
  • 이가라시, 히로키

Assignees

  • 사파스고교 가부시키가이샤

Dates

Publication Date
20260507
Application Date
20251027
Priority Date
20241030

Claims (7)

  1. A valve part formed in an axial shape to extend along a moving axis and simultaneously movable along the moving axis, and A main body integrally formed by a resin material, comprising a valve chamber accommodating the above valve section, an inlet-side flow path guiding fluid flowing in from the inlet-side pipe to the valve chamber, and an outlet-side flow path guiding fluid from the valve chamber to the outlet-side pipe; The above main body is equipped with a temperature detection unit for detecting the temperature of the fluid flowing through it, Either of the inlet side flow path and the outlet side flow path has a first flow path section that extends along a first axis and has one end communicating with the valve chamber, and a second flow path section that extends along a second axis intersecting the first axis and has one end communicating with either the inlet side pipe or the outlet side pipe. The first Euro section and the second Euro section are connected in a connection area, The above main body part has a protrusion formed therein that protrudes along the first axis or the second axis from the inner circumferential surface of the connection area, and A fluid device having a receiving hole formed inside the above-mentioned protrusion to accommodate the temperature detection unit.
  2. In Article 1, The above-mentioned protrusion is formed in a cylindrical shape that protrudes along the first axis line from the inner circumferential surface of the connection area, and A fluid device in which the outer diameter of the above-mentioned protrusion is set to be at least 0.1 times and no more than 0.8 times the first inner diameter of the above-mentioned first fluid section.
  3. In Article 2, A fluid device in which the length along the first axis of the above-mentioned protrusion is set to be at least 0.1 times and no more than 0.5 times the second inner diameter of the above-mentioned second fluid section.
  4. In Article 1, The above protrusion is formed in a cylindrical shape that protrudes along the second axis line from the inner circumferential surface of the connection area, and A fluid device in which the outer diameter of the above-mentioned protrusion is set to be at least 0.1 times and no more than 0.8 times the second inner diameter of the above-mentioned second fluid section.
  5. In Article 4, A fluid device in which the length along the second axis of the above-mentioned protrusion is set to be at least 0.1 times and no more than 0.5 times the inner diameter of the first fluid section.
  6. In any one of paragraphs 1 to 5, A fluid device in which the angle at which the first axis and the second axis intersect is set to 90 degrees.
  7. In any one of paragraphs 1 to 5, The above temperature detection unit is a thermocouple, and A fluid device in which the contacts of the above thermocouple are received in the above receiving hole.

Description

Fluid Device The present invention relates to a fluid device. Conventionally, a shut-off valve installed in a pipe that carries a fluid (such as a chemical solution or pure water) used in semiconductor manufacturing equipment is known (see, for example, Patent Document 1). The shut-off valve disclosed in Patent Document 1 is formed by integrally forming a valve chamber, an inlet side flow path, and an outlet side flow path using a fluoropolymer material. FIG. 1 is a cross-sectional view illustrating a shut-off valve according to a first embodiment of the present invention. Figure 2 is a partial enlarged view of part A of the shut-off valve shown in Figure 1. Figure 3 is a cross-sectional view along the B-B arrow of the shut-off valve shown in Figure 2. FIG. 4 is a cross-sectional view illustrating a shut-off valve according to a second embodiment of the present invention. Figure 5 is a partial enlarged view of part C of the shut-off valve shown in Figure 4. FIG. 6 is a cross-sectional view illustrating a shut-off valve according to a third embodiment of the present invention. Figure 7 is a cross-sectional view along the D-D arrow of the shut-off valve shown in Figure 6. Figure 8 is a plan view of the shut-off valve shown in Figure 6. FIG. 9 is a cross-sectional view illustrating a shut-off valve according to a fourth embodiment of the present invention. FIG. 10 is a cross-sectional view illustrating a shut-off valve according to a fifth embodiment of the present invention. [First Embodiment] Hereinafter, a shut-off valve (fluid device) (100) according to the first embodiment of the present invention will be described with reference to the drawings. The shut-off valve (100) of the present embodiment is a fluid device installed in a pipe that circulates a fluid (a liquid such as a chemical solution or pure water) used in a semiconductor manufacturing device, etc. FIG. 1 is a longitudinal cross-sectional view illustrating a shut-off valve (100) according to the first embodiment of the present invention. FIG. 2 is a partial enlarged view of part A of the shut-off valve (100) illustrated in FIG. 1. FIG. 3 is a cross-sectional view along the B-B arrow of the shut-off valve (100) illustrated in FIG. 2. As illustrated in FIGS. 1 and 2, the shut-off valve (100) comprises a main body (110), an upper housing (120), a lower housing (130), a valve part (140), a diaphragm part (150), a moving mechanism (160), and a temperature detection part (170). The main body (110) is a member having a fluid passage (inlet side passage (113), valve chamber (114), and outlet side passage (115), which will be described later) formed inside to guide fluid from the inlet (111) to the outlet (112). The main body (110) is integrally formed by a fluoropolymer material. The fluid passage formed inside the main body (110) has an inlet side passage (113), a valve chamber (114), and an outlet side passage (115). The inlet side passage (113) is a passage that guides fluid flowing in from the inlet side pipe (111a) to the valve chamber (114). The valve chamber (114) is a space that accommodates the valve section (140) inside. The valve chamber (114) is a space formed between the main body (110) and the lower surface of the diaphragm section (150), in which the valve section (140) is positioned and which communicates with the inlet side passage (113) and the outlet side passage (115). The outflow side flow path (115) is a flow path that guides fluid from the valve chamber (114) to the outflow side pipe (112a). As shown in FIG. 2, a valve hole (113a) is formed at the end of the inflow side flow path (113) on the side of the valve chamber (114), so that the valve part (140) is close to or separated along the axis (Z). The upper housing (120) is a member positioned above the main body (110) and simultaneously accommodating a diaphragm part (150) and a moving mechanism (160) in the space formed between it and the main body (110). The lower housing (130) is a member positioned below the main body (110) and simultaneously installed on an installation surface (S). As shown in FIG. 1, the main body (110), the upper housing (120), and the lower housing (130) are integrated by fastening the upper housing (120) and the lower housing (130) with the main body (110) in between using fastening bolts (180). For example, the upper housing (120) and the lower housing (130) are integrated by four fastening bolts (180) positioned at equal distances from the axis (Z). As shown in FIGS. 1 and 2, the valve portion (140) is formed in an axial shape so as to extend along an axis (movement axis) (Z) and is a member that is close to or separated from a valve hole (113a) that guides fluid from an inlet side flow path (113) to a valve chamber (114). The shut-off valve (100) can switch by means of a movement mechanism (160) between a closed state (a state indicated by a dotted line in FIG. 1) in which the valve portion (140) is brought close until it contacts the main body port