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KR-20260064707-A - Substrate processing device

KR20260064707AKR 20260064707 AKR20260064707 AKR 20260064707AKR-20260064707-A

Abstract

A substrate transfer device comprises a frame, a first SCARA arm connected to the frame at a shoulder rotation axis fixed to the frame, a second SCARA arm coupled to the frame at the shoulder rotation axis such that the rotation of the first SCARA arm and the second SCARA arm around the shoulder rotation axis substantially coincides, and a five-motor drive unit having five independent motors configured to independently extend and rotate each of the first SCARA arm and the second SCARA arm. Among the five independent motors, the first motor is operably coupled to each of the first upper arms of both the first SCARA arm and the second SCARA arm, so that the first motor becomes a common motor for each of the first upper arms of both the first SCARA arm and the SCARA arm.

Inventors

  • 맥렐런 매튜 제이.
  • 캐버니 로버트 티.

Assignees

  • 브룩스 오토메이션 유에스, 엘엘씨

Dates

Publication Date
20260507
Application Date
20240903
Priority Date
20230901

Claims (20)

  1. As a substrate transfer device, the substrate transfer device is: Frame; A first SCARA arm coupled to the frame at a shoulder rotation axis fixed to the frame, wherein the first SCARA arm comprises a first upper arm, a first forearm, and at least one substrate holder coupled in series and rotatably to each other; A second SCARA arm coupled to the frame at the shoulder rotation axis such that the rotation of the first SCARA arm and the second SCARA arm around the shoulder rotation axis substantially coincides, wherein the second SCARA arm comprises a second upper arm, a second forearm, and at least one substrate holder coupled in series and rotatably with each other; and A driving unit connected to the frame and coupled to the first SCARA arm and the second SCARA arm, wherein the driving unit is a 5-motor driving unit having 5 independent motors configured to independently extend and rotate each of the first SCARA arm and the second SCARA arm such that each of the first SCARA arm and the second SCARA arm extends independently from the other first SCARA arm and the second SCARA arm, and each of at least one substrate holder of the first SCARA arm and the second SCARA arm rotates independently from the other at least one substrate holder of the first SCARA arm and the second SCARA arm, respectively. A substrate transfer device in which the first motor among the above five independent motors is operably coupled to each of the first upper arms of both the first SCARA arm and the second SCARA arm such that the first motor becomes a common motor for each of the first upper arms of both the first SCARA arm and the second SCARA arm.
  2. A substrate transfer device according to claim 1, wherein the second independent motor among the five independent motors is operably coupled to the at least one substrate holder of the first SCARA arm, thereby enabling the at least one substrate holder to be independently rotated around the first wrist axis of the first SCARA arm, which is independent of the other at least one substrate holder of each of the first SCARA arm and the second SCARA arm.
  3. A substrate transfer device according to paragraph 2, wherein the third independent motor among the five independent motors is operably coupled to the at least one substrate holder of the second SCARA arm, thereby enabling the at least one substrate holder to be independently rotated around the second wrist axis of the second SCARA arm, which is independent of the other at least one substrate holder of each of the first SCARA arm and the second SCARA arm.
  4. A substrate transfer device according to claim 3, wherein the second independent motor and the third independent motor each orient the first SCARA arm and the at least one substrate holder of the second SCARA arm in response to a predetermined direction of a wafer transferred by the first SCARA arm and the at least one substrate holder of the second SCARA arm, respectively.
  5. A substrate transfer device according to claim 3, wherein the second independent motor and the third independent motor each rotate the at least one substrate holder of the first SCARA arm and the second SCARA arm, respectively, to realize a predetermined direction of a wafer transferred by the at least one substrate holder of the first SCARA arm and the second SCARA arm, respectively.
  6. A substrate transfer device according to claim 3, wherein the fourth independent motor among the five independent motors is operably coupled to the first forearm of the first SCARA arm, thereby enabling the first forearm to rotate independently around the first elbow axis of the first SCARA arm, independent of each other arm link and the at least one substrate holder of the first SCARA arm and the second SCARA arm.
  7. A substrate transfer device according to claim 6, wherein the fifth independent motor among the five independent motors is operably coupled to the second forearm of the second SCARA arm, thereby enabling the second forearm to rotate independently around the second elbow axis of the second SCARA arm, which is independent of each other arm link and the at least one substrate holder of the first SCARA arm and the second SCARA arm.
  8. A substrate transfer device according to claim 3, wherein the second independent motor and the third independent motor each orient the first SCARA arm and the at least one substrate holder of the second SCARA arm in response to a predetermined direction of a wafer being transferred by another at least one substrate holder of another SCARA arm positioned to hand off the wafer to the first SCARA arm or the second SCARA arm.
  9. A substrate transfer device according to claim 1, wherein the driving unit includes a Z-axis driving unit.
  10. A substrate transfer device according to claim 1, wherein the five independent motors are coaxial.
  11. As one method, the above method is: Frame, A first SCARA arm coupled to the frame at a shoulder rotation axis fixed to the frame, wherein the first SCARA arm comprises a first upper arm, a first forearm, and at least one substrate holder coupled in series and rotatably to each other. A second SCARA arm coupled to the frame at the shoulder rotation axis such that the rotation of the first SCARA arm and the second SCARA arm around the shoulder rotation axis substantially coincides, wherein the second SCARA arm has a second upper arm, a second forearm, and at least one substrate holder coupled in series and rotatably with each other, and A step of providing a substrate transfer device comprising a driving unit connected to the frame and coupled to the first SCARA arm and the second SCARA arm, wherein the driving unit is a 5-motor driving unit having 5 independent motors; The method comprises the step of independently extending and rotating each of the first SCARA arm and the second SCARA arm by means of five independent motors of the driving unit, wherein each of the first SCARA arm and the second SCARA arm is extended independently from the other first SCARA arm and the second SCARA arm, and at least one substrate holder of each of the first SCARA arm and the second SCARA arm is rotated independently from the other at least one substrate holder of each of the first SCARA arm and the second SCARA arm. A method in which the first motor among the above five independent motors is operably coupled to each of the first upper arms of both the first SCARA arm and the second SCARA arm such that the first motor becomes a common motor for each of the first upper arms of both the first SCARA arm and the second SCARA arm.
  12. In paragraph 11, the above method is: A method further comprising the step of independently rotating the at least one substrate holder around a first wrist axis of the first SCARA arm, independent of each other at least one substrate holder of the first SCARA arm and the second SCARA arm, by means of a second independent motor among five independent motors operably coupled to the at least one substrate holder of the first SCARA arm.
  13. In Clause 12, the above method is: A method further comprising the step of independently rotating the at least one substrate holder around a second wrist axis of the second SCARA arm, which is independent of each other at least one substrate holder of the first SCARA arm and the second SCARA arm, by means of a third independent motor among five independent motors operably coupled to the at least one substrate holder of the second SCARA arm.
  14. A method according to claim 13, wherein the second independent motor and the third independent motor each orient the first SCARA arm and the at least one substrate holder of the second SCARA arm in response to a predetermined direction of a wafer conveyed by the first SCARA arm and the at least one substrate holder of the second SCARA arm, respectively.
  15. In claim 13, the second independent motor and the third independent motor each rotate the first SCARA arm and the at least one substrate holder of the second SCARA arm to achieve a predetermined direction of a wafer transported by the at least one substrate holder of the first SCARA arm and the second SCARA arm, respectively.
  16. In Clause 13, the above method is: A method further comprising the step of independently rotating the first forearm of the first SCARA arm around the first elbow axis of the first SCARA arm, independent of each other arm link and the at least one substrate holder of the first SCARA arm and the second SCARA arm, by means of a fourth independent motor among five independent motors operably coupled to the first forearm of the first SCARA arm.
  17. In paragraph 16, the above method is: A method further comprising the step of independently rotating the second forearm around a second elbow axis of the second SCARA arm, independent of each other arm link and the at least one substrate holder of the first SCARA arm and the second SCARA arm, by means of a fifth independent motor among five independent motors operably coupled to the second forearm of the second SCARA arm.
  18. A method according to claim 13, wherein the second independent motor and the third independent motor each orient the first SCARA arm and the at least one substrate holder of the second SCARA arm in response to a predetermined direction of a wafer being transported by another at least one substrate holder of another SCARA arm positioned to hand off the wafer to the first SCARA arm or the second SCARA arm.
  19. In claim 11, the driving unit comprises a Z-axis driving unit, a method.
  20. In claim 11, the above five independent motors have a coaxial structure.

Description

Substrate processing device This application is the formal application of U.S. Provisional Patent Application No. 63/580,157 filed on September 1, 2023, and claims priority to said patent application, the entire contents of said application incorporated herein by reference. Exemplary embodiments of the present invention generally relate to substrate processing tools, in particular to substrate transfer devices. Customers are continuously building systems configured with side-by-side process modules or holding stations, requiring individual processes/services for a single process side while enabling automation to load both sides for parallel processes at a side-by station. In most cases, these cluster tool chambers are configured in a square or pentagonal shape large enough to accommodate a pair of side-by-side process modules on each facet. These process modules are typically configured to share a process gas facility, but can operate simultaneously or be shut down independently for sequence matching or service. The above aspects and other features of the disclosed embodiments are described below with reference to the accompanying drawings. FIG. 1 is a robot assembly according to the present invention. FIG. 2 is a kinematic chain illustrating a robot assembly according to the present invention. FIG. 3 is a kinematic chain illustrating a robot assembly according to the present invention. FIG. 4 is a driving unit of a robot assembly according to the present invention. Figure 5 shows the arm configuration of a robot assembly according to the present invention. FIGS. 6 to 10 illustrate exemplary operations of the robot assembly of FIG. 5 according to the present invention. FIG. 11 is an exemplary substrate handoff having a radial arm extension. FIG. 12 is an exemplary substrate handoff according to the present invention. FIG. 13 is an arm configuration of a robot assembly according to the present invention. FIG. 14 is a driving unit of a robot assembly according to the present invention. FIGS. 15 and FIGS. 16 illustrate a robot assembly according to the present invention. FIGS. 17-19 illustrate exemplary operations of the robot assembly of FIGS. 15 and FIG. 16 according to the present invention. FIGS. 20-22 illustrates a robot assembly according to the present invention. FIG. 23 is a flowchart of an exemplary method according to the present invention. The following detailed description is intended to aid the understanding of a person skilled in the art and is not intended to unduly limit the claims connected to or related to the present invention. The following detailed description refers to multiple drawings, and the same reference numbers indicate the same components and features in the multiple drawings, regardless of whether specific drawings are referenced. As used herein, the word “each” means a single object (i.e., an object) in the case of a single object, and each object in the case of multiple objects. As used herein, the singular forms (“a,” “an,” and “the”) have the meaning of “at least one” and “one or more,” and are not limited to the object being referred to as a “single” form. FIG. 1 illustrates an exemplary dual-arm SCARA transfer device (also referred to as a robot assembly or substrate transfer device) (10) according to the present invention. Although the present invention is described with reference to the drawings, it should be understood that the present invention may be embodied in various forms. Additionally, any suitable size, shape, or type of element or material may be used. The present invention provides substrate processing automation for independently addressing process modules located on opposite sides of chambers or substrate holding/interface stations. The present invention provides for controlling the orientation (i.e., the notch position of the substrate) and position of a substrate (S) (hereinafter also referred to as a wafer). The notch of the substrate (S) indicates a predetermined alignment for processes performed on the substrate (S), and the substrate (S) must be oriented in substantially the same direction for each process. In the present invention, at least three control axes are provided for each substrate (S) supported and transported by a dual-arm robot assembly (10). The three control axes per substrate (S) can be used to maintain the substrate orientation (during process tool operation) when multiple robots within the same system hand off the substrate from one robot to another at various handoff angles (e.g., between an atmospheric robot and a vacuum robot, between two atmospheric robots, between two vacuum robots, etc.). The robot assembly (10) illustrated in FIG. 1 may include two SCARA arms (12, 14) sharing a common linear joint (20)/carriage (18) link (e.g., SCARA arm 12 may be referred to as the first SCARA arm (12) and SCARA arm 14 as the second SCARA arm (14)). The common carriage link (18) is located within the envelope of a column or frame (16). Each arm