KR-20260064917-A - DISPLAY DEVICE, ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING A DISPLAY DEVICE

KR20260064917AKR 20260064917 AKR20260064917 AKR 20260064917AKR-20260064917-A

Abstract

A display device comprises a substrate, a circuit layer, a first electrode, a pixel defining film, a first light-emitting layer, a protective layer, a capping layer, and a second electrode. The protective layer comprises a first protective layer disposed on the first light-emitting layer and a second protective layer disposed on the first protective layer and having greater etch resistance than the capping layer. The capping layer covers one side of the first light-emitting layer. At least a portion of the capping layer is disposed on the lower side of the protruding portion of the first protective layer, and a portion of the capping layer is in direct contact with the first light-emitting layer. The lower surface of the second electrode is in direct contact with the first protective layer, the second protective layer, and the capping layer. The first protective layer comprises an inorganic material, and the second protective layer comprises a metal oxide.

Inventors

문영민
최대원
김아롱
박종희
박희민
양수경
양희준
이사민
조원제
차광민

Assignees

삼성디스플레이 주식회사

Dates

Publication Date: 20260508
Application Date: 20241030

Claims (20)

Substrate; A circuit layer disposed on the above substrate; A first electrode disposed on the circuit layer above; A pixel defining film disposed on a portion of the circuit layer and the first electrode, having a defined opening; A first light-emitting layer disposed on a portion of the first electrode and the pixel defining film, wherein at least a portion of the first light-emitting layer overlaps with the opening in a planar manner; A protective layer disposed on the first light-emitting layer and superimposed on the pixel definition film; A capping layer covering one side of the first light-emitting layer; and It includes a second electrode disposed on the first light-emitting layer and the capping layer, and The above protective layer is, A first protective layer disposed on the first light-emitting layer; and A display device comprising a second protective layer disposed on the first protective layer and having greater etch resistance than the capping layer.
In Article 1, One side of the first protective layer relatively far from the opening and one side of the second protective layer relatively far from the opening are, A display device protruding in a direction further away from the opening than one side of the first light-emitting layer that is relatively far from the opening.
In Article 2, At least a portion of the capping layer is disposed on the lower part of the protruding side of the first protective layer, and A display device in which a portion of the capping layer is in direct contact with the first light-emitting layer.
In Article 1, The second protective layer is a display device having a relatively smaller width compared to the first protective layer.
In Article 1, The above capping layer is, A display device in contact with the upper surface of the pixel definition film and the upper surface of the second protective layer.
In Article 1, The lower surface of the second electrode above is, A display device in direct contact with the first protective layer, the second protective layer, and the capping layer.
In Article 1, It further includes a second light-emitting layer spaced apart from the first light-emitting layer and disposed on another part of the pixel defining film, and The side of the first light-emitting layer and the side of the second light-emitting layer overlap with the pixel defining film on a plane, and The capping layer is a display device that covers the side of the first light-emitting layer and the side of the second light-emitting layer.
In Article 1, It further includes a second light-emitting layer spaced apart from the first light-emitting layer and disposed on another part of the pixel defining film, and The above protective layer is, A third protective layer disposed on the second light-emitting layer; and It further includes a fourth protective layer disposed on the third protective layer and having greater etch resistance than the capping layer, The side of the first light-emitting layer, the side of the second light-emitting layer, the side of the first protective layer, the side of the second protective layer, the side of the third protective layer, and the side of the fourth protective layer overlap with the pixel defining film on a plane, and A display device in which the capping layer covers the side of the first light-emitting layer, the side of the second light-emitting layer, the side of the first protective layer, the side of the second protective layer, the side of the third protective layer, and the side of the fourth protective layer.
In Article 1, The first protective layer above is a display device comprising an inorganic material.
In Article 9, A display device comprising at least one of silicon nitride (SiNx), silicon oxynitride (SiOxNy), or silicon oxide (SiOx).
In Article 1, The above second protective layer is a display device comprising a metal oxide.
In Article 11, A display device comprising at least one of the metal oxides indium tin oxide (ITO), indium zinc oxide (IZO), indium gallium zinc oxide (IGZO), indium zinc gallium oxide (ITGO), or indium tin gallium zinc oxide (ITGZO).
In Article 1, The above first protective layer is, It comprises a plurality of silicon-rich (Si Rich) first silicon nitride layers and a plurality of nitrogen-rich (N Rich) second silicon nitride layers, A display device in which the first silicon nitride layers and the second silicon nitride layers are arranged alternately.
In Article 1, The above capping layer is, A display device provided with a single layer of inorganic layer.
In Article 1, The above capping layer and the above pixel defining film each comprise an inorganic material, and A display device in which the capping layer and the pixel defining film are in contact with each other.
In Article 1, A display device further comprising a transparent electrode layer disposed on the second electrode.
In Article 1, The light-emitting layer comprises a first light-emitting layer that emits light in a first wavelength band and a second light-emitting layer that emits light in a second wavelength band different from the first wavelength band. A display device in which the first light-emitting layer and the second light-emitting layer do not overlap each other on a plane.
Substrate; A circuit layer disposed on the above substrate; A plurality of first electrodes disposed on the circuit layer above; A pixel defining film disposed between the first electrodes; A first light-emitting layer disposed on at least some of the first electrodes; A second light-emitting layer disposed on another part adjacent to the part of the first electrodes; A capping layer disposed on the pixel definition film above; A first protective layer disposed on the first light-emitting layer; A second protective layer disposed on the first protective layer and having greater etch resistance than the capping layer; A third protective layer disposed on the second light-emitting layer; A fourth protective layer having greater etch resistance than the capping layer disposed on the third protective layer; and A display device comprising the first light-emitting layer, the first protective layer, the second protective layer, the capping layer, the third protective layer, the fourth protective layer, and a second electrode covering the second light-emitting layer.
In Article 18, The first protective layer and the third protective layer comprise at least one of silicon nitride (SiNx), silicon oxynitride (SiOxNy), or silicon oxide (SiOx). A display device comprising at least one of indium tin oxide (ITO), indium zinc oxide (IZO), indium gallium zinc oxide (IGZO), indium zinc gallium oxide (ITGO), or indium tin gallium zinc oxide (ITGZO).
A step of preparing a display panel comprising a substrate, a circuit layer disposed on the substrate, and a first electrode disposed on the circuit layer, and forming a pixel defining film on a portion of the circuit layer and the first electrode; A step of forming a first pre-emissive layer on the first electrode and the pixel defining film; A step of forming a first intermediate protective layer to cover a portion of the first pre-emissive layer overlapping the first light-emitting region, wherein the first light-emitting region emits light of a first wavelength band; A step of forming a second intermediate protective layer to overlap with the first intermediate protective layer on a plane, wherein the second intermediate protective layer has greater etch resistance than the first intermediate protective layer; and A method for manufacturing a display device comprising the step of forming a first light-emitting layer by patterning the first pre-light-emitting layer using the first intermediate protective layer and the second intermediate protective layer as masks.

Description

Display device, electronic device, and method for manufacturing a display device The present invention relates to a display device, an electronic device, and a method for manufacturing a display device. More specifically, it relates to a display device, an electronic device, and a method for manufacturing a display device that has a structure in which damage to the light-emitting layer and disconnection of the electrode are prevented, and uses a process advantageous for large-scale production to improve the reliability of the device and is suitable for large-scale production. Generally, display devices are manufactured through a multi-stage process, and a mask is used to form a thin film pattern in each stage. While a separate external mask can be used, display devices can also be manufactured by utilizing an internal configuration as a mask instead of an external one, and this method offers advantages for scaling up the size of display devices. Recently, a method of patterning some components of a display device, particularly the light-emitting layer, by using parts of the internal components of the display device as masks instead of using an external mask is being studied. FIG. 1 is a plan view of a display device according to one embodiment. Figure 2 is a cross-sectional view taken along line II' of Figure 1. Figure 3 is an enlarged view showing the AA region of Figure 2. FIG. 4 is an enlarged view showing the AA area of FIG. 2 in a display device of one embodiment. FIG. 5 is an enlarged view showing the AA area of FIG. 2 in a display device of one embodiment. Figure 6 is an enlarged view showing the BB area of Figure 2. FIG. 7 is a cross-sectional view showing a part of the first protective layer according to one embodiment. FIG. 8 is a cross-sectional view showing a part of a display device according to one embodiment. FIG. 9 is a flowchart illustrating a method for manufacturing a display device according to an embodiment of the present invention. FIG. 10 is a flowchart showing part of the method for manufacturing a display device according to an embodiment of the present invention. FIGS. 11a to 11z are cross-sectional views schematically illustrating the steps of a method for manufacturing a display device according to one embodiment. FIG. 12 is a drawing illustrating electronic devices to which a display device according to an embodiment of the present invention is applied. FIG. 13 is a drawing illustrating electronic devices to which a display device according to an embodiment of the present invention is applied. In this specification, where a component (or region, layer, part, etc.) is described as being “on,” “connected,” or “joined” another component, it means that it may be directly placed/connected/joined on the other component, or that a third component may be placed between them. Identical reference numerals denote identical components. Additionally, in the drawings, the thicknesses, proportions, and dimensions of components are exaggerated for the effective illustration of the technical content. “And/or” includes all one or more combinations that the associated components may define. Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. These terms are used solely for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component. A singular expression includes a plural expression unless the context clearly indicates otherwise. Additionally, terms such as “below,” “lower,” “above,” and “upper” are used to describe the relationships between the components depicted in the drawings. These terms are relative concepts and are described based on the directions indicated in the drawings. Terms such as "include" or "have" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Furthermore, terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an overly ideal or overly formal sense unless explicitly defined herein. Where any embodiment in this specification can be implemented differently, a specific process sequence may be performed differently from the order described. For example, two processes described consecu