KR-20260065013-A - TEACHING SYSTEM FOR OHT AND TRANSFERRING SYSTEM

KR20260065013AKR 20260065013 AKR20260065013 AKR 20260065013AKR-20260065013-A

Abstract

The conveyor teaching system of the present invention, which moves along a rail and conveys a conveyor to a storage module and teaches a conveyor including a gripping module, comprises: a detection target unit; a data acquisition unit that acquires image or location information of the detection target unit; and a controller that receives data from the data acquisition unit, wherein the detection target unit is provided on the conveyor not in the storage module, and the data acquisition unit is provided in a container that is not provided on the conveyor not but is placed in the storage module.

Inventors

윤기섭
강동필

Assignees

세메스 주식회사

Dates

Publication Date: 20260508
Application Date: 20241031

Claims (18)

In a conveyor teaching system that moves along a rail, conveys a material to a storage module, and teaches a conveyor cart including a gripping module, Detection target unit; A data acquisition unit for acquiring image or location information of the above-mentioned detection target unit; and It includes a controller that receives data from the above-mentioned data acquisition unit, and The above-mentioned detection target unit is, Not provided in the storage module above, but provided on the return cart side above, and The above data acquisition unit is, not provided on the above return cart and placed on the side of the above storage module, Return loan teaching system.
In paragraph 1, The above-mentioned detection target unit is, It is provided in a housing located at the bottom of a driving unit that travels along the rail in the above-mentioned return carriage, and The above data acquisition unit is, It is positioned on the storage module side, and is positioned on a portable body positioned on the storage module, and The above portable body is provided as a container, Return loan teaching system.
In paragraph 1, The above detection target unit includes a first mark module including an image, and The above data acquisition unit includes a vision camera that acquires image or position information of the first mark module. Return loan teaching system.
In paragraph 3, The first mark module includes a first mark provided on one side of the return cart and a second mark provided on the other side of the return cart. The above vision camera is positioned at a first position located in a container placed in the storage module, and The above controller receives data on the number of image pixels of each of the first mark and the second mark captured by the vision camera, Return loan teaching system.
In paragraph 4, The first mark and the second mark have the same number of pixels in an image captured by the vision camera at the same distance from the vision camera, and the number of pixels in an image captured by the vision camera increases or decreases depending on the distance from the vision camera. The controller compares the number of pixels of the first mark with the number of pixels of the second mark and sets a first correction coordinate that forms a teaching position for the return carriage to move, such that the number of pixels of the first mark and the second mark are the same. Return loan teaching system.
In paragraph 5, The first mark and the second mark are located at the same level, The above controller sets the first correction coordinate in formula 1, and Formula 1 is, X = K/2 + (a 2 - b 2 - k 2 )/2K It is provided as, Here, 'X' is a horizontal movement position that is a coordinate in the direction of the driving axis of the return carriage among the first correction coordinates above, and The number greater than or equal to the straight-line distance between the first position and the first mark or the straight-line distance of the second mark forms 'a', and the number smaller forms 'b'. 'K' is the straight-line distance between the first mark and the second mark, and The above controller is, Calculating the value of 'a' having the same value as 'a' and 'b' so that the first mark and the second mark are placed at the same distance or have the same number of pixels based on the first position, and setting the 'X'. Return loan teaching system.
In paragraph 6, The above controller is, In the first correction coordinate where the above 'a' and the above 'b' have the same value, Set the above first correction coordinates in formula 2, and Formula 2 is, It is provided as, Here, 'Z' is a hoist axis coordinate that is the vertical distance between the level of the first mark or the second mark and the first position, and is the vertical movement position of the gripping module, Return loan teaching system.
In Paragraph 7, The above controller sets the first correction coordinate in formula 3, and Formula 3 is, It is provided as, Here, 'Y' is the forward and backward movement position of the aforementioned return carriage, which is the coordinate in the direction of the sliding axis of the aforementioned return carriage, Return loan teaching system.
In paragraph 6, The above controller is, In the above calculation formula 1, the coordinates of the driving direction axis are set to the above first correction coordinates, and Obtaining the position or coordinates of the storage module from an auxiliary sensor unit that calculates the position or coordinates of the storage module, and setting the hoist axis coordinates of the first correction coordinates, Return loan teaching system.
In Paragraph 9, The above auxiliary sensor unit is, provided as a gyro sensor provided in the above storage module, Return loan teaching system.
In paragraph 6, The above detection target unit further includes a second mark module located at the center between the first mark and the second mark on the return carriage, and The vision camera above acquires image or position information of the second mark module, Return loan teaching system.
In Paragraph 11, The above first position is located at a reference value forming the return destination position of the above return cart, and If the coordinates in the direction of the driving axis of the return carriage in the image or position information of the second mark module acquired from the vision camera are not the same as the reference value, The vision camera acquires the image or position information of the first mark module again and transmits it to the controller, and The above controller resets the first correction coordinate in the calculation formula 1 to reset the first correction coordinate, Return loan teaching system.
In paragraph 1, The above-mentioned detection target unit includes a detection rod provided in the above-mentioned gripping module, and The data acquisition unit includes a pad module that detects contact of the sensing rod and acquires the coordinates of the sensing rod. Return loan teaching system.
In Paragraph 13, The above controller is, By comparing the contact coordinates, which are the coordinates of the sensing rod obtained while in contact with the pad module due to the downward movement of the above gripping module, with the reference value forming the return target position of the above return carriage, A second correction coordinate forming the position where the return carriage moves is set as the teaching target position of the return carriage so that the above contact coordinate and the above reference value form the same coordinate. Return loan teaching system.
In Paragraph 13, The above pad module is provided as a touch pad that detects whether the sensing rod is in contact and obtains the coordinates of the sensing rod. Return loan teaching system.
A return cart that returns a return item to a storage module and includes a waste module; A rail provided on the ceiling and forming a movement path of the above-mentioned return trolley; and including the return loan teaching system of claim 1 Return system.
In paragraph 15, The above storage module is provided as a port of a substrate processing device for processing substrates, and the port is located at the bottom of the rail, Return system.
A return cart that returns a return item to a storage module and includes a waste module; A rail provided on the ceiling and forming a movement path of the above-mentioned return trolley; and The above-mentioned return trolley includes a return trolley teaching system that teaches a return position for placing the return object, and The above return trolley teaching system is, A detection target unit comprising a first mark module including an image, a second mark module adjacent to the first mark module, and a sensing rod provided in the gripping module; A data acquisition unit comprising a vision camera for acquiring image or position information of each of the first mark module and the second mark module, and a touch pad for detecting contact of the sensing rod and acquiring the coordinates of the sensing rod; and It includes a controller that receives data from the above-mentioned data acquisition unit, and The above-mentioned detection target unit is, Provided on the above return cart, The above data acquisition unit is, It is provided in a container placed in the above storage module, and The above-mentioned first mark module is, It includes a first mark provided on one side of the above-mentioned return cart and a second mark provided on the other side of the above-mentioned return cart at the same level as the first mark, The above second mark module is, It is located at the center between the first mark and the second mark, The above vision camera is, It is located in the above container, and is positioned at a first position that forms a reference value forming the return destination position of the above return cart, and The above controller is, A first correction coordinate is set to form a teaching position for the return carriage to move, such that the first mark and the second mark are of the same distance from each other based on the first position, or the number of pixels of each of the first mark and the second mark captured on the vision camera is the same, wherein the first correction coordinate is set in Calculation Formula 1. Formula 1 is, X = K/2 + (a 2 - b 2 - k 2 )/2K It is provided as, Here, 'X' is the horizontal movement position of the return carriage, which is the coordinate in the direction of the driving axis of the return carriage among the first correction coordinates, and The number greater than or equal to the straight-line distance between the first position and the first mark or the straight-line distance of the second mark forms 'a', and the number smaller forms 'b'. 'K' is the straight-line distance between the first mark and the second mark, and The above controller is, Calculate the value of 'a' such that 'a' and 'b' have the same number, and set 'X' such that 'a' and 'b' have the same number. At the same value as the above 'a' and the above 'b', the above first correction coordinate is set in formula 2, and Formula 2 is, It is provided as, Here, 'Z' is a hoist axis coordinate that is the vertical distance between the level of the first mark or the second mark and the first position, and is the vertical movement position of the gripping module. The above controller sets the first correction coordinate in formula 3, and Formula 3 is, It is provided as, Here, 'Y' is the forward and backward movement position of the conveyor trolley, which is the coordinate in the direction of the sliding axis of the conveyor trolley, and The above controller is, If the coordinates in the direction of the driving axis of the return carriage in the image or position information of the second mark module acquired by the vision camera are not the same as the reference value, the vision camera acquires the image or position information of the first mark module again and transmits it to the controller, thereby resetting the first correction coordinates in the calculation formula 1 so that the first correction coordinates are reset. Comparing the contact coordinates, which are the coordinates of the sensing rod obtained while in contact with the pad module due to the downward movement of the gripping module, with a reference value forming the return target position of the return carriage, and setting a second correction coordinate forming the position where the return carriage moves as the teaching target position of the return carriage so that the contact coordinates and the reference value form the same coordinates. Return system.

Description

Return Lance Teaching System and Return System The present invention relates to a return trolley teaching system and a return system. In order to improve semiconductor manufacturing efficiency, not only are technologies for improving various processes (e.g., photolithography, deposition, etching, ion implantation, cleaning, etc.) performed by semiconductor manufacturing equipment introduced and used, but also equipment for more effectively transferring items (e.g., containers for storing wafers, Front Opening Unified Pods (FOUPs), Reticle Pods for storing reticles, etc.) between semiconductor manufacturing equipment is introduced and used. For example, a transfer system including an overhead hoist transport (OHT) configured to transfer items while moving along a transfer path provided on the ceiling side of a semiconductor manufacturing plant is used. The conveying system may include a conveying trolley and a travel rail that provides a conveying path. The conveying trolley may include a travel unit that travels along the rail and a hoist unit provided at the bottom of the travel unit. The hoist unit can support the item to be conveyed and can rotate the item, move it horizontally, or raise and lower it vertically to place it on a storage rack. At this time, in order to place items in the correct position on the item storage rack, the operator performs a teaching task in advance by verifying the items through trial runs or jog operation, locating the correct position of the return cart, placing the items, and storing the coordinates of the placed position, the distance traveled, and the speed in the control unit. The teaching operation utilizes images provided by a vision camera and QR tags to enhance the precision and stability of the return process. The vision camera is installed on the return cart to provide images from the top, while the images are provided as stickers on the item storage rack to be installed from the bottom. However, manufacturing plants do not have equipment supplied by a single vendor; for instance, the substrate processing unit, which includes rails, conveyor carts, and storage racks, is provided by different suppliers. Consequently, image (QR tag) stickers for conveyor cart teaching are not provided in advance, requiring the supplier of the conveyor cart to install them separately. Furthermore, the distribution of stickers is performed manually on hundreds of pieces of equipment, and the stickers must be removed after the teaching process is complete. As such, improvements are necessary because the teaching process requires manual work and entails the inconvenience of installation and removal. FIG. 1 is a drawing illustrating a manufacturing plant provided with a conveying system according to some embodiments of the present invention. Figure 2 is a block diagram for explaining the structure of the return carriage shown in Figure 1. FIG. 3 is a block diagram illustrating a return carriage teaching system according to some embodiments of the present invention. FIG. 4 is a drawing for explaining a return carriage teaching system according to a first embodiment of the present invention. FIGS. 5 to 7 are drawings illustrating the calculation of coordinates for the driving axis direction of a return carriage in a teaching system according to the first embodiment of the present invention. FIG. 8 is a diagram illustrating the calculation of coordinates for the hoist axis direction of a return carriage by a teaching system according to the first embodiment of the present invention. FIG. 9 is a diagram illustrating the calculation of coordinates for the sliding axis direction of a return carriage in a teaching system according to the first embodiment of the present invention. FIG. 10 is a drawing for explaining a return carriage teaching system according to a second embodiment of the present invention. FIG. 11 is a drawing for explaining a return carriage teaching system according to a third embodiment of the present invention. FIG. 12 is a diagram illustrating the calculation of coordinates of a return carriage teaching system according to a third embodiment of the present invention. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. The advantages and features of the present invention, and the methods for achieving them, will become clear by referring to the embodiments described below in detail together with the attached drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same components. The terms used here