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KR-20260065098-A - APPARATUS FOR TRANSPORTING SUBSTRATE

KR20260065098AKR 20260065098 AKR20260065098 AKR 20260065098AKR-20260065098-A

Abstract

A loading plate, a substrate loading section disposed on the loading plate, a rail disposed below the loading plate and extending in a first direction, a driving section disposed within a receiving space defined within the rail and connected to the loading plate through an opening defined on the upper part of the rail, and a plurality of wheels connected to opposite sides of the driving section in a second direction perpendicularly intersecting the first direction on a plane, each of the wheels comprising a first wheel core, a second wheel core surrounding a first outer surface of the first wheel core when viewed from the second direction, and a plurality of fan blades disposed between the first wheel core and the second wheel core, wherein when viewed from the first direction, the fan blades may be disposed at an angle to form a first angle with the second direction.

Inventors

  • 박광복
  • 나태균
  • 문상현
  • 배재익
  • 윤영복
  • 이흥원
  • 홍선택

Assignees

  • 삼성디스플레이 주식회사

Dates

Publication Date
20260508
Application Date
20241031

Claims (20)

  1. Loading plate; A substrate loading section disposed on the above loading plate; A rail positioned below the above loading plate and extending in a first direction; A driving unit disposed within a receiving space defined within the rail and connected to the loading plate through an opening defined on the upper part of the rail; and It includes a plurality of wheels connected to opposite sides of the driving unit in a second direction that intersects perpendicularly with the first direction on a plane, and Each of the above wheels is, 1st wheel core; A second wheel core surrounding the first outer surface of the first wheel core when viewed from the second direction; and It includes a plurality of fan blades disposed between the first wheel core and the second wheel core, and A substrate transfer device in which, when viewed from the first direction, the fan blades are arranged to be inclined to form a first angle with the second direction.
  2. In Article 1, The above fan blades are a substrate transfer device having a flat plate shape.
  3. In Article 1, Each of the above wheels includes an inner surface facing the drive unit and an outer surface opposite to the inner surface, and Each of the above fan blades includes one side adjacent to the inner surface of each of the wheels and the other side adjacent to the outer surface of each of the wheels, When viewed from the first direction, a reference line is defined that extends from the other side of each of the fan blades in the second direction and overlaps the first outer circumference of the first wheel core, and A substrate transfer device in which each of the above fan blades is positioned at an acute angle with respect to the reference line.
  4. In Paragraph 3, A substrate transfer device in which the one side of each of the above fan blades and the other side of each of the above fan blades are arranged at different heights.
  5. In Paragraph 3, The wheels above rotate in the same direction around a rotation axis parallel to the second direction, and A substrate transfer device in which, when viewed from the front defined by the driving direction of the loading plate, the one side of each of the fan blades is positioned lower than the other side of each of the fan blades.
  6. In Paragraph 3, A substrate transfer device in which, when the wheels rotate, airflow is generated from the inner space between the wheels toward the outer space of the wheels opposite to the inner space through a plurality of airflow holes defined between the fan blades.
  7. In Article 6, The above rail is, A side wall facing the outer surface of each of the above wheels; and It includes a bottom portion positioned below the above wheels, and A substrate transfer device in which the minimum speed of the airflow on the bottom portion disposed between the outer surface and the side wall portion of each of the above wheels is 1.4 m/s.
  8. In Article 1, A substrate transfer device in which, when viewed from the second direction, each of the fan blades is arranged to be inclined such that it forms a second angle with respect to the normal to the center point of the contact portion between each of the fan blades and the first outer surface.
  9. In Article 8, A substrate transfer device in which the second angle above is an acute angle.
  10. In Article 8, A substrate transfer device in which each of the above fan blades is positioned to be inclined in the direction of rotation of the wheels relative to the normal.
  11. In Article 1, A substrate transfer device in which each of the above wheels, when viewed from the second direction, surrounds the second outer surface of the second wheel core and further includes a protective layer having a predetermined elasticity.
  12. In Article 1, A substrate transfer device in which the above fan blades number 4n and n is a natural number.
  13. In Article 1, A substrate transfer device further comprising a blower unit disposed on the loading plate and providing airflow toward the rail.
  14. In Article 13, The above rail includes a bottom portion positioned below the drive unit, and A substrate transfer device having a plurality of holes defined in the bottom portion for discharging the airflow.
  15. In Article 1, The above fan blades are a substrate transfer device formed integrally with the above first and second cores.
  16. In Article 1, The above fan blades are a substrate transfer device having a wave shape.
  17. In Article 1, A substrate transfer device in which the above fan blades are manufactured separately from the above first and second cores and connected to the above first and second cores.
  18. In Article 1, A first substrate loading unit that receives a substrate loaded in the above substrate loading unit; A second substrate loading portion spaced apart from the first substrate loading portion in the second direction: and It further includes a substrate transfer unit disposed between the first and second substrate loading units, and The above substrate transfer unit is, entity; A robot arm disposed within the main body and extending toward the first and second substrate loading sections; and It includes a plurality of external wheels positioned below the main body, and The above-mentioned external wheels are a substrate transfer device having the same configuration as the above-mentioned wheels.
  19. Loading plate; A substrate loading section disposed on the above loading plate; A drive unit positioned below the above loading plate; and It includes a plurality of wheels connected to both sides of the above-mentioned drive unit, Each of the above wheels is, 1st wheel core; A second wheel core surrounding the outer surface of the first wheel core; and It includes a plurality of fan blades disposed between the first wheel core and the second wheel core, and Each of the above wheels includes an inner surface facing the drive unit and an outer surface opposite to the inner surface, and Each of the above fan blades includes one side adjacent to the inner surface of each of the wheels and the other side adjacent to the outer surface of each of the wheels, A substrate transfer device in which the one side of each of the above fan blades and the other side of each of the above fan blades are arranged at different heights.
  20. Loading plate; A substrate loading section disposed on the above loading plate; A drive unit positioned below the above loading plate; and It includes a plurality of wheels connected to both sides of the above-mentioned drive unit, Each of the above wheels is, 1st wheel core; A second wheel core surrounding the outer surface of the first wheel core; and It includes a plurality of fan blades disposed between the first wheel core and the second wheel core, and Each of the above wheels includes an inner surface facing the drive unit and an outer surface opposite to the inner surface, and each of the above fan blades includes one side adjacent to the inner surface of each of the wheels and the other side adjacent to the outer surface of each of the wheels. A substrate transfer device in which a reference line is defined extending from the other side of each of the above-mentioned fan blades in a direction perpendicular to the plane of the outer surface, and each of the above-mentioned fan blades is arranged to be inclined at an acute angle with respect to the reference line.

Description

Apparatus for Transporting Substrate The present invention relates to a substrate transfer device. Generally, a display device includes a display panel comprising a plurality of pixels for generating an image. The display panel is manufactured through a plurality of process chambers. Each pixel includes a transistor disposed on a substrate and a light-emitting element disposed on the transistor and connected to the transistor. The transistor and light-emitting element of each pixel are manufactured by the process chambers. During the manufacture of a display panel, a substrate is transferred to a process chamber, and after a specific component is formed on the substrate in the process chamber, the substrate is transferred to the next process chamber for a subsequent process. A vehicle is used to transport the substrate. The vehicle moves along rails to transfer the substrate to the process chambers. When a vehicle moves along a rail, particles are generated due to friction between the vehicle and the rail. Since these particles can contaminate the substrate, the development of technology to easily remove the particles is required. FIG. 1 is a block diagram of a panel manufacturing plant including a substrate transfer device according to an embodiment of the present invention. FIG. 2 is a drawing showing a plurality of vehicles and rails arranged inside the booth shown in FIG. 1. FIG. 3 is a diagram illustrating an exemplary planar configuration of a substrate that can be loaded onto the first to sixth vehicles shown in FIG. 2. FIG. 4 is a diagram illustrating, in an exemplary manner, the configuration of a display panel manufactured by forming pixels on each of the unit substrates shown in FIG. 3. FIG. 5 is a diagram exemplarily illustrating a cross-section of a pixel shown in FIG. 4. Figure 6 is a cross-section of the line I-I' shown in Figure 2. Figure 7 is a separate drawing showing the drive unit and wheels arranged within the rail in Figure 6. Figure 8 is a drawing showing a more detailed configuration of the substrate loading section illustrated in Figure 6. FIG. 9 is a top view of the mosquito boards placed in the loading spaces shown in FIG. 8. FIG. 10 is a forward view of the vehicle and rail shown in FIG. 6, defined by the direction of travel. FIG. 11 is a drawing illustrating the detailed configuration of a pair of wheels arranged in a second direction among the wheels shown in FIG. 7. FIG. 12 is a drawing in which the second wheel core is removed from the wheels shown in FIG. 11, and the first wheel core and fan blades are shown separately. FIG. 13 is a front view of one of the fan blades shown in FIG. 12. FIG. 14 is a view of the first wheel core and fan blades shown in FIG. 12 from a second direction so that the outer surface of the first wheel core is visible. FIG. 15 is a perspective view of comparison wheels according to a comparison embodiment. FIG. 16 is a cross-sectional view of two adjacent holes in any one of the comparison wheels shown in FIG. 15. FIG. 17 is an enlarged view of the vehicle and rail shown in FIG. 10. FIG. 18 is a drawing illustrating a comparison vehicle and a rail including comparison wheels according to a comparison embodiment. FIG. 19 is a diagram showing the simulation results for airflow generated in wheels according to various embodiments of the present invention and in the comparison wheel shown in FIG. 15. FIG. 20 is a drawing illustrating the configuration of fan blades according to another embodiment of the present invention. FIG. 21 is a drawing illustrating the configuration of wheels according to another embodiment of the present invention. FIG. 22 is a drawing illustrating the configuration of one of the outer substrate loading sections among the outer substrate loading sections illustrated in FIG. 1. FIG. 23 is a perspective view of the substrate transfer unit illustrated in FIG. 22. FIG. 24 is a cross-sectional view of the line II-II' shown in FIG. 23. FIGS. 25a to 25d are drawings for explaining the operation of any one robot arm placed within the main body shown in FIGS. 22 and 23. In this specification, where a component (or region, layer, part, etc.) is described as being "on," "connected," or "combined" with another component, it means that it may be directly placed/connected/combined with the other component, or that a third component may be placed between them. Identical reference numerals denote identical components. Additionally, in the drawings, the thicknesses, proportions, and dimensions of the components are exaggerated for the effective illustration of the technical content. "And/or" includes all one or more combinations that the associated configurations can define. Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. These terms are used solely for the purpose of distinguishing one component from another. For example, without departing from the scope o