KR-20260065163-A - CIRCULAR SUBSTRATE FIXING DEVICE

KR20260065163AKR 20260065163 AKR20260065163 AKR 20260065163AKR-20260065163-A

Abstract

The present invention provides a cylindrical substrate fixing device comprising a main body portion having a space for receiving a cylindrical substrate, a pair of fixing units provided facing each other in the receiving space of the main body portion, and a rotary driving unit that rotates the fixing unit from at least one side of the fixing unit, wherein the fixing unit comprises a connecting portion connected to the rotary driving unit, a lower support portion extending from the lower side of the connecting portion, an upper support portion disposed on the upper side of the lower support portion, and a substrate fixing portion that fixes the upper support portion to the lower support portion, and wherein the cylindrical substrate is fixed between the upper support portion and the lower support portion.

Inventors

임형준
박수아
안준형
최학종
권순근
이재종

Assignees

한국기계연구원

Dates

Publication Date: 20260508
Application Date: 20241101

Claims (14)

A main body portion having a space for accommodating a cylindrical substrate; A pair of fixed units provided facing each other in the receiving space of the main body; and A rotary drive unit that rotates the fixed unit at least on one side of the fixed unit; Includes, The above fixed unit is A connecting part connected to the above rotary drive part, A lower support member extending from the lower side of the above-mentioned connection part, An upper support member positioned on the upper part of the lower support member and A substrate fixing part that fixes the above upper support to the lower support Includes, A cylindrical substrate fixing device characterized in that the above-described cylindrical substrate is fixed between the upper support and the lower support.
In Article 1, The lower support portion is provided with a contact portion on which the cylindrical substrate is seated, and A cylindrical substrate fixing device characterized by the above contact portion supporting the cylindrical substrate at two points.
In Article 2, The above contact portion has a left-right asymmetrical structure, and A cylindrical substrate fixing device characterized in that, when one side of the contact portion is fixed through the upper support portion, the one end of the contact portion and the substrate fixing portion are spaced apart.
In Article 1, A cylindrical substrate fixing device characterized by having a position confirmation window formed in the upper support portion to confirm the position of the inserted cylindrical substrate.
In Article 1, A cylindrical substrate fixing device characterized by having a position fixing part protruding upwardly on the lower support part.
In Article 1, A cylindrical substrate fixing device characterized by a pair of the above-mentioned fixing units being arranged in the main body in plurality to fix a plurality of cylindrical substrates.
In Article 6, The above rotary drive unit is positioned on each side of the above fixed unit, and A cylindrical substrate fixing device characterized by having a pair of drive shafts for transmitting driving force generated on one side to the opposite side.
In Article 7, The above rotary drive unit A pulley connected to the outer side of the connecting portion of each of the plurality of the above-mentioned fixed units and A cylindrical substrate fixing device comprising a belt that transmits rotational force to the drive shaft and the pulley.
In Article 8, The above rotary drive unit A cylindrical substrate fixing device characterized by further including a roller that controls the tension of the belt by contacting the outer surface of the belt between a plurality of the above-mentioned pulleys.
In Article 9, A cylindrical substrate fixing device characterized by the above roller being configured to be movable up and down.
In Article 7, The above rotary drive unit It includes a coupler connected to one of the pair of drive shafts and protruding to the outside of the main body, A cylindrical substrate fixing device characterized by the above-mentioned coupler being connected to a drive motor.
In Article 11, The above rotary drive unit A cylindrical substrate fixing device further comprising a manual knob connected to the other one of the aforementioned drive shafts and protruding outward from the main body.
In Article 1, A substrate connecting part is connected to both ends of the above-mentioned cylindrical substrate, and A cylindrical substrate fixing device characterized in that the substrate connecting part is fixed between the upper support part and the lower support part.
In Article 13, A cylindrical substrate fixing device characterized by the above-mentioned substrate connecting part and the above-mentioned cylindrical substrate being joined through a groove and protrusion structure.

Description

cylindrical substrate fixing device The embodiment relates to a cylindrical substrate fixing device. More specifically, it relates to a cylindrical substrate fixing device that facilitates mounting for processing a cylindrical substrate. FIG. 1 relates to a structure providing process apparatus for a conventional planar substrate. Referring to FIG. 1, a structure manufacturing process apparatus for a planar substrate generally configured such that a planar substrate (2) is fixed using a planar chuck (4) on an XY-axis stage (3) and mounted so as to be movable in a planar direction. A patterning head (5) is mounted on a Z-axis stage (6) and connected so as to be movable in a vertical direction above the planar substrate. By utilizing this connection structure, a processing tool, a laser nozzle, a laser light source, etc. included in the patterning head (5) can be used to enable the manufacturing of a structure having various materials and shapes on the planar substrate. However, such processing targets may be cylindrical substrates rather than flat ones. FIG. 2 is a drawing showing a structural manufacturing process apparatus for a conventional cylindrical substrate. Referring to FIG. 2, when processing a cylindrical substrate (10), the process can be performed by fixing both sides of the cylindrical substrate (10) using a rotary chuck (8) that can fix the cylindrical substrate (10) and rotating it through a rotary motor (9). However, this method is very cumbersome in terms of the process of mounting the cylindrical substrate (10), and since only one cylindrical substrate (10) is mounted at a time, replacing multiple cylindrical substrates (10) requires a lot of time and cost. In addition, when processing multiple cylindrical substrates (10), sequential processes must be performed, which results in a problem where very cumbersome work is repeated. FIG. 1 is a drawing showing a structure manufacturing process apparatus for a conventional planar substrate, and FIG. 2 is a drawing showing a structural manufacturing process apparatus for a conventional cylindrical substrate, and FIG. 3 is a drawing showing a structure in which a cylindrical substrate fixing device according to an embodiment of the present invention is fixed to a substrate manufacturing process device, and FIG. 4 is a drawing showing the structure of a cylindrical substrate fixing device, which is an embodiment of the present invention, and FIG. 5 is a drawing showing the structure of a cylindrical substrate fixing unit, which is a component of FIG. 4, and FIG. 6 is a drawing showing the configuration of the holder part of FIG. 5, and FIG. 7 is a front view of the holder portion of FIG. 6, and FIG. 8 is a drawing showing a first embodiment of the holder portion of FIG. 7, and FIG. 9 is a drawing showing the sequence of mounting a cylindrical substrate to the holder portion of FIG. 6, and FIG. 10 is a drawing showing a second embodiment of the holder part of FIG. 7, and FIG. 11 is a drawing showing the configuration of a rotary drive unit, which is a component of FIG. 4, and FIG. 12 is a side view of FIG. 11, and FIGS. 13 and 14 are drawings showing a structure in which a cylindrical substrate fixing device, which is an embodiment of the present invention, is fixed to a substrate manufacturing process device, and Figures 15 and 16 are drawings showing the structure of a cylindrical substrate fixing device for fixing cylindrical substrates when the diameters of the cylindrical substrates are different. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. However, the technical concept of the present invention is not limited to some of the described embodiments but can be implemented in various different forms, and within the scope of the technical concept of the present invention, one or more of the components among the embodiments may be selectively combined or substituted. In addition, terms used in the embodiments of the present invention (including technical and scientific terms) may be interpreted in a sense that is generally understood by those skilled in the art to which the present invention belongs, unless explicitly and specifically defined otherwise. Terms that are commonly used, such as terms defined in advance, may be interpreted in consideration of their meaning in the context of the relevant technology. Furthermore, the terms used in the embodiments of the present invention are for the purpose of describing the embodiments and are not intended to limit the present invention. In this specification, the singular form may include the plural form unless specifically stated otherwise in the text, and when described as “at least one of A and B, C (or more than one of them),” it may include one or more of all combinations that can be formed from A, B, and C. In addition, terms such as first, second, A, B, (a), (b), etc. may be used when describing the components of t