KR-20260065275-A - Gas detection element and gas detection sensor using the same

KR20260065275AKR 20260065275 AKR20260065275 AKR 20260065275AKR-20260065275-A

Abstract

A gas detection element and a gas detection sensor using the same are disclosed. A gas detection element for detecting a target gas in air according to one embodiment of the present invention comprises a first detection element including a first substrate having a first cavity formed therein and a first thin film layer formed on one surface of the first substrate, and a second detection element including a second substrate having a second cavity formed therein and a second thin film layer formed on one surface of the second substrate. The second detection element is stacked on the first detection element so that the first thin film layer closes the open surface of the second cavity, thereby forming the second cavity as a measurement space. A measurement area is formed in the first thin film layer to measure a change caused by the target gas so as to detect the target gas introduced into the measurement space.

Inventors

김경훈
정경현
백선혁
노상수

Assignees

대양전기공업 주식회사

Dates

Publication Date: 20260508
Application Date: 20241101

Claims (12)

As a gas sensing element for detecting a target gas in the air, A first sensing element comprising a first substrate having a first cavity formed therein and a first thin film layer formed on one surface of the first substrate; and A second sensing element comprising a second substrate having a second cavity formed therein and a second thin film layer formed on one surface of the second substrate; The second sensing element is stacked on the first sensing element, and the first thin film layer closes the open surface of the second cavity, thereby forming the second cavity as a measurement space. A gas sensing element in which a measurement area is formed in the first thin film layer to measure a change caused by the target gas so as to detect the target gas introduced into the measurement space.
In paragraph 1, The gas sensing element in which the second sensing element has an opening formed therein to allow the air to enter and exit the measurement space.
In paragraph 2, The above opening is a gas sensing element formed in the second thin film layer.
In paragraph 3, A gas sensing element in which a second heater is provided around the opening of the second thin film layer to control the humidity of the measurement space.
In paragraph 2, The above opening is formed in a plurality of places in the second thin film layer and includes an inlet for air to enter and an outlet for air to be discharged. The above-mentioned outlet is formed spaced apart from the above-mentioned inlet, and A gas sensing element in which a second heater is provided in the second thin film layer around the outlet so that the air in the measurement space is naturally convected and discharged through the outlet.
In paragraph 1, A gas sensing element having a first heater provided in the above measurement area to detect the target gas by a heat conduction method.
In paragraph 1, The first sensing element includes a first electrode pad electrically connected to a circuit formed in the first thin film layer, and The second sensing element includes a second electrode pad that is electrically connected to a circuit formed in the second thin film layer and electrically connected to an external circuit board. A gas sensing element in which the first electrode pad is electrically connected to the circuit board by being electrically connected to the second electrode pad through a connection portion.
In Paragraph 7, The first electrode pad and the second electrode pad are arranged to overlap each other in a planar manner, and The above connection is a gas sensing element that vertically connects the first electrode pad and the second electrode pad.
As a gas detection sensor for detecting target gas in the air, A case having an air inlet formed therein to allow the above air to enter and exit; A circuit board provided inside the above case; and A sensing element installed on the circuit board to detect the target gas; comprising The above sensing element comprises a first sensing element including a first substrate having a first cavity formed therein and a first thin film layer formed on one surface of the first substrate, and a second sensing element including a second substrate having a second cavity formed therein and a second thin film layer formed on one surface of the second substrate. The second sensing element is stacked on the first sensing element, and the first thin film layer closes the open surface of the second cavity, thereby forming the second cavity as a measurement space. A gas detection sensor in which a measurement area is formed in the first thin film layer to measure changes caused by the target gas so as to detect the target gas introduced into the measurement space.
In Paragraph 9, A gas detection sensor in which an opening is formed in the second sensing element to allow air to enter and exit the measurement space.
In Paragraph 9, It further includes a sealing member; and The above case has an inner wall protruding to surround the air inlet, and The circuit board forms a sensing space that communicates with the air inlet together with the inner wall, and The above-described sealing member is a gas detection sensor that is seated in a sealing groove formed in the inner wall to form an airtight seal between the circuit board and the inner wall.
In Paragraph 9, The first sensing element includes a first electrode pad electrically connected to a circuit formed in the first thin film layer, and The second sensing element includes a second electrode pad that is electrically connected to a circuit formed in the second thin film layer and electrically connected to the circuit board through wire bonding. A gas detection sensor in which the first electrode pad is electrically connected to the circuit board by the second electrode pad being electrically connected to each other through a connection part.

Description

Gas detection element and gas detection sensor using the same The present invention relates to a gas sensing element and a gas sensing sensor using the same. More specifically, the invention relates to a gas sensing element in which a substrate of the sensing element is stacked to form a measurement space into which air is introduced inside the sensing element, and to a gas sensing sensor using the same that detects a target gas in the air introduced into the measurement space. Hydrogen gas is colorless and odorless, making it difficult to detect leaks. Therefore, the development of hydrogen gas detection sensors capable of rapidly and accurately detecting leaks is crucial. However, conventional hydrogen gas detection sensors used in hydrogen vehicles utilize industrial rather than automotive-grade sensors, leading to issues with responsiveness and false detection of hydrogen gas in harsh environments. For instance, excessive moisture ingress into the sensor can cause the detection element to malfunction or result in delayed detection times. FIG. 1 is a cross-sectional view of a gas sensing element according to one embodiment of the present invention. FIG. 2 is a cross-sectional view of a gas sensing element according to another embodiment of the present invention. FIG. 3 is a perspective view of a gas detection sensor according to one embodiment of the present invention. FIG. 4 is an exploded view of a gas detection sensor according to one embodiment of the present invention. FIG. 5 is a perspective view showing one side of a circuit board according to one embodiment of the present invention. Embodiments of the present invention are described below with reference to the attached drawings so that those skilled in the art can easily implement the invention. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. Furthermore, in order to clearly explain the embodiments of the present invention in the drawings, parts unrelated to the explanation have been omitted. The terms used in this specification are used merely to describe specific embodiments and are not intended to limit the invention. Singular expressions may include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as “comprising,” “having,” or “having” are intended to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not excluding in advance the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. Furthermore, the components shown in the embodiments of the present invention are illustrated independently to represent different characteristic functions and do not imply that each component consists of separate hardware or a single software unit. That is, for convenience of explanation, each component is described as a separate component, and at least two of the components may be combined to form a single component, or a single component may be divided into multiple components to perform a function. Such integrated and separated embodiments of each component are also included within the scope of the present invention as long as they do not deviate from the essence of the invention. In addition, the following embodiments are provided to explain more clearly to those with average knowledge in the industry, and the shapes and sizes of the elements in the drawings may be exaggerated for clearer explanation. Hereinafter, a preferred embodiment according to the present invention will be described with reference to the attached drawings. FIG. 1 is a cross-sectional view of a gas sensing element according to one embodiment of the present invention. Referring to FIG. 1, a gas detection element (100) according to one embodiment of the present invention may be for detecting a target gas contained in air. For example, the target gas may be hydrogen, and the gas detection element may be for detecting a leak of hydrogen stored in a high-pressure hydrogen tank in a hydrogen fuel cell vehicle. The gas detection element (100) may include a first detection element (110) and a second detection element (120), as a Micro-Electro-Mechanical Systems Device (MEMS) of the Thermal Conductivity Detector (TCD) type that measures a change in the heat loss rate according to the concentration of the target gas. A first sensing element (110) is provided with a first substrate (111), and a first thin film layer (113) may be formed on one side of the first substrate (111). The first substrate (111) may have a first substrate layer (111a) and a first insulating layer (111b). The first substrate layer (111a) may be formed of silicon (Si). The first insulating layer (111b) may be formed of silicon nitride (SiN x ) on both sides of the first substrate layer (111a). The first thin film