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KR-20260065511-A - Composite catalyst for Hydrogen-selective catalytic reduction, and Preparation method thereof, and Air purification device including composite catalyst

KR20260065511AKR 20260065511 AKR20260065511 AKR 20260065511AKR-20260065511-A

Abstract

A composite catalyst for H₂-SCR (hydrogen-selective catalytic reduction) is provided, comprising a support configured to remove a first compound from an unpurified air stream containing a first compound; and a first particle supported on the support, wherein the first particle comprises a metal, a metal oxide, or a combination thereof, wherein the metal comprises platinum and a platinum group element other than the platinum, and the platinum content is 3 parts by weight or more per 1 part by weight of the platinum group element. A method for manufacturing the same and an air purification device comprising the same are provided.

Inventors

  • 허현수
  • 손승희
  • 함동진
  • 구민석
  • 백경민
  • 정서은
  • 정재영
  • 하종현

Assignees

  • 삼성전자주식회사

Dates

Publication Date
20260508
Application Date
20251013
Priority Date
20241101

Claims (20)

  1. It is configured to remove the first compound from an unpurified air stream containing the first compound, and Support; and It includes a first particle supported on the above support, The first particle comprises a metal, a metal oxide, or a combination thereof, and The above metal comprises platinum and platinum group elements other than the platinum, and A composite catalyst for H₂ - SCR (hydrogen-selective catalytic reduction), wherein the platinum content is 3 parts by weight or more per 1 part by weight of platinum group element content.
  2. A composite catalyst for H₂ -SCR according to claim 1, wherein the platinum group element is palladium (Pd), ruthenium (Ru), rhodium (Rh), osmium (Os), iridium (Ir), or a combination thereof.
  3. A composite catalyst for H₂ -SCR according to claim 1, wherein the mixing weight ratio of platinum and platinum group elements is 3:1 to 1,000:1.
  4. A composite catalyst for H₂ -SCR according to claim 1, wherein the content of the first particle is 0.1 to 5 weight% based on the total weight of the composite catalyst.
  5. A composite catalyst for H₂-SCR according to claim 1, wherein the metal oxide is PtO x (0<x≤2), PdO x (0<x≤1), RuO x (0<x≤2), OsO x (0<x≤2), IrO x (0<x≤2), Ru a O x (0<a≤2, 0<x≤3), or a combination thereof .
  6. In claim 1, the support is a composite catalyst for H₂ -SCR that is SiO₂ , Al₂O₃ , zeolite, TiO₂ , or a combination thereof.
  7. In claim 1, the composite catalyst is a composite catalyst for H₂ -SCR comprising platinum (Pt) and palladium.
  8. In claim 7, the composite catalyst is a composite catalyst for H₂ -SCR that further comprises oxides of platinum (Pt) and palladium.
  9. In claim 1, the composite catalyst is a composite catalyst for H₂ -SCR represented by the following chemical formula 1: <Chemical Formula 1> Pt x Pd y In Chemical Formula 1, 0.8≤x≤0.99 and 0.01≤y≤0.2.
  10. In claim 1, the support further comprises mesopores, A composite catalyst for H₂ -SCR, wherein the average size of the mesopores is 2 to 50 nm.
  11. In claim 1, the support is aluminosilicate, and A composite catalyst for H₂ -SCR having a silicon/aluminum ratio (Si/Al ratio) of 50 or less and a mesopore volume of 20% to 80%.
  12. In claim 1, the composite catalyst is a composite catalyst for H₂ -SCR used under conditions where O₂ is 5 volume% to 20 volume% and the temperature is 70 to 125℃.
  13. A composite catalyst for H₂-SCR according to claim 1, wherein the composite catalyst has a NO conversion rate of 40% or more and an N₂ selectivity of greater than 60% under conditions where O₂ is 5 volume% to 20 volume% and the temperature is 70 to 125℃.
  14. In claim 1, the first compound comprises a volatile organic compound (VOC), The above volatile organic compounds include polar compounds, non-polar compounds, or combinations thereof, the non-polar compounds include aliphatic hydrocarbons, aromatic hydrocarbons, or combinations thereof, and the polar compounds include ammonia, urea, amine compounds, aldehyde compounds, ketone compounds, alcohol compounds, sulfur compounds, thiol compounds, halogenated hydrocarbons, nitrogen oxides ( NOx ), ozone, or combinations thereof. The above aliphatic hydrocarbon includes methane, ethane, propane, butane, pentane, hexane, or a combination thereof, and The above aromatic hydrocarbon includes benzene, toluene, xylene, or a combination thereof, and The above amine compound comprises methylamine, dimethylamine, trimethylamine, ethylamine, aniline, or a combination thereof, and The above aldehyde compound includes formaldehyde, acetaldehyde, propioaldehyde, butylaldehyde, or a combination thereof, and The above ketone compound includes dimethyl ketone, methyl ethyl ketone, diethyl ketone, methyl propyl ketone, dipropyl ketone, or a combination thereof, and The above alcohol compound includes methanol, ethanol, propanol, isopropanol, butanol, pentanol, hexanol, heptanol, or a combination thereof, The above sulfur compound includes hydrogen sulfide, sulfur dioxide, elemental sulfur, sulfur oxides ( SO₄x⁻ ), or a combination thereof, and A composite catalyst for H₂ -SCR, wherein the thiol compound comprises methanethiol, ethantirol, 1-propanethiol, 2-propanethiol, propenethiol, butanethiol, tert-butyl mercaptan, thiophetol, or a combination thereof.
  15. Step of preparing the support; and A step of preparing a support on which a first particle precursor is supported by supporting a platinum-containing salt and a platinum group element-containing salt, which are first particle precursors; and A reducing agent is mixed into a support on which a first particle precursor is supported, and then this A method for manufacturing a composite catalyst for H₂ - SCR (hydrogen-selective catalytic reduction), comprising a heat treatment step; and The above H₂ -SCR composite catalyst is configured to remove the first compound from an unpurified air stream containing the first compound, and Support; and It includes a first particle supported on the above support, The first particle comprises a metal, a metal oxide, or a combination thereof, and The above metal comprises platinum and platinum group elements other than the platinum, and A method for manufacturing a composite catalyst for H₂ -SCR, wherein the platinum content is 3 parts by weight or more per 1 part by weight of platinum group element content.
  16. A method for manufacturing a composite catalyst for H₂ -SCR according to claim 15, wherein the heat treatment is performed at 300°C to 900°C in an inert gas atmosphere.
  17. In item 15, the above support is a support having mesopores formed therein, The above-mentioned support with formed mesopores is Step of providing a bare support; A step of preparing a base-treated support by contacting the above-mentioned untreated support with a basic solution; a step of preparing a heat-treated porous support by performing a first heat treatment on the above-mentioned base-treated support; A step of preparing an ion-exchanged support by contacting the above heat-treated support with an ammonium salt-containing solution; and A method for manufacturing a composite catalyst for H₂ -SCR, comprising the step of drying an ion-exchanged support and then heat-treating it.
  18. Housing; and Includes a composite catalyst for H₂ -SCR, The above composite catalyst is disposed within the housing, and is an air purification device. The above H₂ -SCR composite catalyst is configured to remove the first compound from an unpurified air stream containing the first compound, and Support; and It includes a first particle supported on the above support, The first particle comprises a metal, a metal oxide, or a combination thereof, and The above metal comprises platinum and platinum group elements other than the platinum, and An air purification device having a platinum content of 3 parts by weight or more per 1 part by weight of platinum group element content.
  19. In paragraph 18, the operating temperature of the air purification device is 70 to 125℃, and An air purification device having an oxygen content of 5 volume% to 20 volume% O2 and 80 volume% to 95 volume% nitrogen.
  20. An air purification device according to claim 18, wherein the amount of hydrogen ( H₂ ) gas injected into the air purification device is 100 ppm to 40,000 ppm based on the total weight of the exhaust gas and the hydrogen gas.

Description

Composite catalyst for hydrogen-selective catalytic reduction, preparation method thereof, and air purification device including composite catalyst The present invention relates to a composite catalyst for hydrogen-selective catalytic reduction ( H₂ -selective catalytic reduction: H₂ -SCR), a method for manufacturing the same, and an air purification device including the same. Recently, due to the high integration of semiconductors, the types and quantities of reaction gases used in the manufacturing process are increasing. Consequently, as the types and quantities of hazardous substances within hazardous gases are also increasing in proportion, various hazardous gas treatment methods are being utilized. A conventional method for treating hazardous gases is the heat recovery oxidation method using a Regenerative Thermal Oxidizer (RTO). This method is widely used in the downstream stages of semiconductor processes because it recovers and reuses waste heat, resulting in a very high heat recovery efficiency of over 95% and a treatment efficiency of over 98%. However, in the case of the RTO process, there is a problem in that highly toxic hazardous substances, such as nitrogen oxides (NOx), silanes, tetramethylsilanes, trimethylamines, halogens, hydrocarbons, and sulfur compounds, are generated at the downstream end. These malodorous gases, which are not treated in the RTO process and are emitted as is, cause air pollution and have adverse effects on the human body. Therefore, an efficient pollutant removal method is required that can be applied to areas where malodorous gases are generated without being removed at the downstream end of the RTO process. Figures 1a to 1c are transmission scanning electron microscope images of the composite catalyst prepared in Example 1. FIGS. 2a to 2c are transmission scanning electron microscope images of the composite catalyst prepared in Comparative Example 3. Figure 3 is a graph showing the results of a nitrogen oxide removal experiment for the composite catalysts of Examples 1-2 and Comparative Examples 1-4, and shows the nitrogen oxide conversion rate (NO conversion). Figure 4 is a graph showing the results of a nitrogen oxide removal experiment for the composite catalysts of Examples 1-2 and Comparative Examples 1-4, and shows the nitrogen selectivity ( N2 selectivity). FIG. 5 is a schematic diagram of a catalytic filter according to one embodiment. Figure 6 is a front view of the inlet side of the catalytic filter of Figure 5 for unpurified air. Figure 7 is a front view of the discharge surface of the purified air of the catalytic filter of Figure 5. Figure 8 is a cross-sectional view of the catalytic filter of Figure 6 cut in the 4-4' direction. FIG. 9 is an enlarged cross-sectional view of the first part (A1) of FIG. 8. The present inventive concept described below is subject to various modifications and may have various embodiments, and specific embodiments are illustrated in the drawings and described in detail. However, this is not intended to limit the present inventive concept to specific embodiments, and it should be understood that it includes all modifications, equivalents, or substitutions that fall within the scope of the description of the present inventive concept. The terms used below are used merely to describe specific embodiments and are not intended to limit the creative concept. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the following, terms such as "comprising" or "having" are intended to indicate the existence of the features, numbers, steps, actions, components, parts, components, materials, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, components, materials, or combinations thereof. The "/" used below may be interpreted as "and" or "or" depending on the context. In the drawings, thicknesses have been enlarged or reduced to clearly represent various layers and regions. Throughout the specification, the same reference numerals have been used for similar parts. Throughout the specification, when a part such as a layer, film, region, or plate is described as being "on" or "above" another part, this includes not only cases where it is directly above another part but also cases where there is another part in between. Throughout the specification, terms such as "first," "second," etc., may be used to describe various components, but the components should not be limited by these terms. Terms are used solely for the purpose of distinguishing one component from another. In this specification and drawings, components having substantially the same functional configuration are referred to by the same reference numerals to avoid redundant descriptions. In this specification, "size" of a particle refers to the "diameter" of a particle unless otherwise def