KR-20260065615-A - Multilayer filter housing

Abstract

A filter housing is provided having a housing inlet/outlet section having an inlet port and an outlet port, and a hollow filter housing body that defines a fluid flow path between the inlet port and the outlet port, wherein the filter housing body comprises at least three layers.

Inventors

• 아그불라 올루미데 다밀라레
• 쉬크 로버트 에이

Assignees

• 폴 코포레이션

Dates

Publication Date

20260508

Application Date

20241010

Priority Date

20231017

Claims (9)

1. A filter housing comprising a hollow filter housing body and having a filter housing inlet/outlet section having an inlet port and an outlet port, and defining a fluid flow path between the inlet port and the outlet port, The above hollow filter housing body comprises at least three layers: a first layer comprising perfluoroalkoxyalkane (PFA), a second layer comprising a thermoplastic elastomer, and a third layer comprising a thermoplastic resin. A filter housing, wherein the second layer is interposed between the first layer and the third layer, and the second layer comprises a bonding layer bonded to both the first layer and the third layer.
2. In paragraph 1, The filter housing, wherein the second layer comprises a thermoplastic elastomer selected from the group consisting of styrene block copolymers, polyolefins, polyamides, or polyester elastomers.
3. In paragraph 1 or 2, The above thermoplastic elastomer comprises polymethylpentene (PMP), forming a filter housing.
4. In any one of paragraphs 1 through 3, The filter housing comprises a thermoplastic resin selected from the group consisting of polyolefin homopolymers, polyolefin copolymers, cyclic olefin homopolymers, copolymers of cyclic olefins, ethylene-vinyl acetate copolymers, polyesters, polyamides, polyvinyl chloride, polyvinylidene chloride, polystyrene, styrene-based copolymers, polyisoprene, polyurethanes, ethylene ethyl acrylates, ethylene acrylic acid copolymers, and combinations thereof, wherein the third layer comprises a polyolefin homopolymer, polyolefin copolymer, cyclic olefin homopolymer, cyclic olefin copolymer, ethylene-vinyl acetate copolymer, ethylene-vinyl acetate copolymer, and combinations thereof.
5. In paragraph 4, The above thermoplastic resin comprises polyetherimide (PEI), forming a filter housing.
6. In any one of paragraphs 1 through 5, A filter housing further comprising a filter housing vent section having an upstream vent port and a downstream vent port.
7. In any one of paragraphs 1 through 5, A filter housing, wherein the first layer has a first layer thickness, the third layer has a third layer thickness, and the third layer thickness is at least 20% greater than the first layer thickness.
8. In any one of paragraphs 1 through 7, The above-described hollow filter housing body is a filter housing having an inner surface including the first layer and an outer surface including the third layer.
9. In any one of paragraphs 1 through 8, Each of the filter housing inlet/outlet portions comprises at least three layers: a first layer comprising a perfluoroalkoxyalkane (PFA), a second layer comprising a thermoplastic elastomer, and a third layer comprising a thermoplastic resin, wherein the second layer is interposed between the first layer and the third layer, and the second layer comprises a bonding layer bonded to both the first layer and the third layer.

Description

Multilayer filter housing Cross-reference regarding related applications This patent application claims the benefit of U.S. provisional application No. 63/544,482 filed on October 17, 2023, and includes it by reference. Filter housings for filter devices used in semiconductor industry applications, such as lithography and wet-etching chemical filter applications, may be exposed to harsh conditions, such as highly corrosive fluids like hydrochloric acid, sulfuric acid, and hydrofluoric acid, which can be used in extreme temperature ranges and often in combination with dissolved hydrogen peroxide. These fluids can damage existing devices and pose health risks to workers exposed to them. Additionally, materials in contact with these fluids must not contaminate the fluids or add impurities to them. There is a need for improved housing. The present invention improves upon at least some of the disadvantages of the prior art. These and other advantages of the present invention will be apparent from the description provided below. One embodiment of the present invention provides a filter housing comprising a hollow filter housing body and a filter housing inlet/outlet section having an inlet port and an outlet port, and defining a fluid flow path between the inlet port and the outlet port, wherein the hollow filter housing body comprises at least three layers: a first layer comprising a perfluoroalkoxyalkane (PFA), a second layer comprising a thermoplastic elastomer, and a third layer comprising a thermoplastic resin, wherein the second layer is interposed between the first layer and the third layer, and the second layer comprises a bonding layer bonded to both the first layer and the third layer. FIG. 1a is a side view of an exemplary filter housing according to one embodiment of the present invention, comprising a hollow filter housing body, a filter housing inlet/outlet section having an inlet port and an outlet port, and a filter housing vent section having an upstream vent port and a downstream vent port, wherein at least the hollow filter housing body comprises at least three layers; FIG. 1b is a cross-sectional view of the filter housing shown in FIG. 1a, wherein filter elements are arranged across a flow path between an inlet port and an outlet port to form a filter device. FIG. 2a is a schematic diagram illustrating one embodiment of a sequential injection overmolding method for manufacturing one embodiment of at least three-layer films used to form a filter housing according to another embodiment of the present invention. FIG. 2b is a schematic diagram illustrating one embodiment of a compression molding method for manufacturing one embodiment of at least three-layer film used to form a filter housing according to another embodiment of the present invention. According to one aspect of the present invention, a filter housing is provided that includes a hollow filter housing body and has a filter housing inlet/outlet section having an inlet port and an outlet port, and defines a fluid flow path between the inlet port and the outlet port, wherein the hollow filter housing body comprises at least three layers: a first layer comprising a perfluoroalkoxyalkane (PFA), a second layer comprising a thermoplastic elastomer, and a third layer comprising a thermoplastic resin, wherein the second layer is interposed between the first layer and the third layer, and the second layer comprises a bonding layer bonded to both the first layer and the third layer. In some embodiments, the filter housing further comprises a filter housing vent section having an upstream vent port and a downstream vent port. In some embodiments, the vent section and vent ports additionally or alternatively comprise a filter housing drain section and drain ports. Advantageously, filter housings according to embodiments of the present invention provide desirable chemical resistance and mechanical integrity. They can be produced at a lower cost than commercially available single-component housings manufactured by injection molding. Filter housings can be manufactured using a smaller amount of fluoropolymer than is used to manufacture commercially available single-component housings manufactured by injection molding, thereby reducing potential contamination. Aspects of the present invention can be used to manufacture filter housings for filter devices for filtering various fluids in the semiconductor industry. Applications include, for example, the filtration of fluids including hydrochloric acid, sulfuric acid, hydrofluoric acid, and isopropyl alcohol, and in particular, filtration at elevated temperatures, such as the filtration of high-temperature sulfuric acid and high-temperature isopropyl alcohol. In one embodiment of the filter housing, the second layer comprises a thermoplastic elastomer selected from the group consisting of styrene block copolymers, polyolefins, polyamides, or polyester elastomers. The thermoplastic elastomer may have the