KR-20260065698-A - MANUFACTURING APPARATUS FOR DISPLAY DEVICE, METHOD OF MANUFACTURING DISPLAY DEVICE, AND ELECTRONIC DEVICE

Abstract

A manufacturing apparatus for a display device according to an embodiment of the present disclosure comprises: a mask electrostatic chuck; a mask support portion on the mask electrostatic chuck; and a mask on the mask support portion, wherein the mask electrostatic chuck may include a seating portion on which the mask support portion is seated; a contact portion in contact with the mask; and a position alignment portion for aligning the position of the mask support portion.

Inventors

• 배민호
• 김성진
• 박준하
• 심재원
• 정석원
• 한정원

Assignees

• 삼성디스플레이 주식회사

Dates

Publication Date

20260511

Application Date

20241101

Claims (20)

1. Mask electrostatic chuck; and A mask support portion on the above mask electrostatic chuck; and It includes a mask on the above-mentioned mask support, The above mask electrostatic chuck is, A seating portion on which the above-mentioned mask support is seated; A contact portion in contact with the above mask; and A manufacturing device for a display device comprising a position alignment unit for aligning the position of the above-mentioned mask support.
2. In Article 1, The above mask electrostatic chuck further includes an outer portion disposed at the outer edge of the contact portion, and A manufacturing device for a display device, wherein the height of the outer portion is lower than the height of the contact portion.
3. In Article 2, A manufacturing device for a display device, wherein the height of the above-mentioned seating portion is lower than the height of the above-mentioned contact portion.
4. In Article 2, The above-mentioned seating portion and the above-mentioned contact portion have different heights from each other, A manufacturing device for a display device, wherein the height difference between the above-mentioned seating portion and the above-mentioned contact portion is greater than or equal to the thickness of the above-mentioned mask support portion.
5. In Article 2, It further includes a transfer unit that transfers at least one of the above mask support and the above mask, and The above-mentioned transfer unit is a manufacturing device for a display device that is in non-contact with the above-mentioned outer part.
6. In Article 2, A camera hole penetrating the above contact portion; and It further includes a camera positioned to overlap with the above camera hole, The above camera is a manufacturing device for a display device that captures the above mask.
7. In Article 2, The above position alignment part is a groove formed in the outer part, a manufacturing device for a display device.
8. In Article 7, A manufacturing device for a display device, wherein the above-mentioned groove has a constant width when viewed in cross-section, or becomes narrower from one end to the other.
9. In Article 7, The above mask support is, Support frame; and It is connected to the support frame and includes a guide portion protruding from the support frame, The above guide portion is a manufacturing device for a display device that is positioned on the above position alignment portion.
10. In Article 9, The above guide portion is a manufacturing device for a display device having a rod shape when viewed in a planar view.
11. In Article 9, The above mask support further includes a guide outer portion connected to the above guide portion, and A manufacturing device for a display device, wherein the outer portion of the above guide has a ring shape when viewed in a planar view.
12. In Article 2, The above position alignment unit is, A protrusion connected to the above-mentioned seating portion and protruding from the above-mentioned seating portion; A protrusion hole penetrating at least a portion of the above-mentioned protrusion; and It further includes a pin inserted into the above-mentioned protrusion hole, The above pin is a manufacturing device for a display device that protrudes above the upper surface of the above protrusion.
13. In Article 12, The above contact portion is connected to the above seating portion, and The above outer portion is a manufacturing device for a display device connected to the above contact portion.
14. In Article 12, The above pin is a manufacturing device for a display device, having a constant width when viewed in cross-section or a width that narrows from one end to the other.
15. In Article 12, The above mask support includes a guide hole penetrating the above mask support, and The above pin is inserted into the above guide hole, a manufacturing device for a display device.
16. In Article 15, The above guide hole includes a first guide hole and a second guide hole, and A manufacturing device for a display device, wherein the second guide hole has a larger area when viewed in a planar view than the first guide hole.
17. Substrate; A substrate electrostatic chuck on the above substrate; A mask corresponding to a pattern of material formed on the substrate; A mask electrostatic chuck disposed at the bottom of the above mask; and It includes a substrate electrostatic chuck moving part that moves the above-mentioned substrate electrostatic chuck, and A manufacturing device for a display device, wherein the above-mentioned substrate electrostatic chuck moving part moves the substrate electrostatic chuck to deform the shape of the substrate.
18. In Article 17, A pressure sensor for measuring pressure applied to the substrate; and It further includes a gap sensor for measuring the gap between the substrate and the mask, The above substrate is a manufacturing device for a display device that can be bent by the above substrate electrostatic chuck moving part.
19. Substrate; A substrate electrostatic chuck on the above substrate; A mask corresponding to a pattern of material formed on the substrate; A mask electrostatic chuck disposed at the bottom of the above mask; and It includes a mask electrostatic chuck moving part that moves the above mask electrostatic chuck, and The above mask electrostatic chuck moving part moves the mask electrostatic chuck to deform the shape of the mask, a manufacturing device for a display device.
20. In Article 19, The above mask electrostatic chuck is provided in multiple units, and The above mask electrostatic chucks can be moved and spaced apart from each other, The above mask electrostatic chuck moving part is provided in the number of the above mask electrostatic chucks, The above mask electrostatic chuck moving part is a manufacturing device for a display device capable of tensioning the above mask.

Description

Manufacturing apparatus for display device, method of manufacturing display device, and electronic device The present disclosure relates to an apparatus for manufacturing a display device, a method for manufacturing a display device, and an electronic device. With the advancement of information technology, the importance of display devices, which serve as a medium connecting users and information, is being highlighted. Accordingly, research and development on display devices is continuously being carried out. A display device can be formed by placing a mask with a pattern formed thereon onto a substrate and depositing a material onto the substrate. In order for the materials to be properly formed on the substrate, the mask needs to be properly fixed. FIG. 1 is a cross-sectional view schematically showing a manufacturing apparatus for a display device according to an embodiment. FIG. 2 is a plan view schematically showing a mask according to an embodiment. FIGS. 3 and FIGS. 4 are schematic plan views showing a mask support according to an embodiment. FIG. 5 is a schematic enlarged view of a mask electrostatic chuck according to an embodiment. FIG. 6 is a schematic enlarged view showing a guide portion arranged on a position alignment portion according to an embodiment. FIG. 7 is a schematic cross-sectional view of a manufacturing apparatus for a display device according to an embodiment. FIG. 8 is a schematic perspective view showing a mask support member according to an embodiment placed on a mask electrostatic chuck. FIG. 9 is a schematic plan view showing a mask support according to an embodiment. FIG. 10 is a schematic enlarged view of a mask electrostatic chuck according to an embodiment. FIG. 11 is a schematic cross-sectional view of a manufacturing apparatus for a display device according to an embodiment. FIG. 12 is a schematic perspective view showing a mask support member according to an embodiment placed on a mask electrostatic chuck. FIG. 13 is a schematic cross-sectional view of a manufacturing apparatus for a display device according to an embodiment. FIG. 14 is a schematic cross-sectional view of a manufacturing apparatus for a display device according to an embodiment. FIG. 15 is a schematic plan view of a mask electrostatic chuck according to an embodiment. FIG. 16 is a plan view showing a display device according to an embodiment. FIG. 17 is a plan view showing a subpixel according to an embodiment. Figure 18 is a cross-sectional view taken along line II' of Figure 17. FIG. 19 is a flowchart illustrating a method for manufacturing a display device according to an embodiment. FIG. 20 is a block diagram showing an example of an electronic device including the display device of FIG. 18. FIG. 21 is a perspective view showing an example of a smartphone that can be implemented using the electronic device of FIG. 20. FIG. 22 is a perspective view showing an example of a tablet computer that can be implemented using the electronic device of FIG. 20. Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings. It should be noted that in the following description, only the parts necessary for understanding the operation according to the present invention are described, and the description of other parts is omitted to avoid obscuring the gist of the present invention. Furthermore, the present invention is not limited to the embodiments described herein and may be embodied in other forms. The embodiments described herein are provided to explain in detail sufficient to enable those skilled in the art to easily implement the technical concept of the present invention. Throughout the specification, when a part is described as being "connected" to another part, this includes not only cases where they are "directly connected," but also cases where they are "indirectly connected" with other elements interposed between them. The terms used herein are intended to describe specific embodiments and are not intended to limit the invention. Throughout the specification, when a part is described as "comprising" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components. "At least one of X, Y, and Z" and "at least one selected from the group consisting of X, Y, and Z" may be interpreted as one X, one Y, one Z, or any combination of two or more of X, Y, and Z (e.g., XYZ, XYY, YZ, ZZ). Here, "and/or" includes all combinations of one or more of such components. Herein, terms such as first, second, etc. may be used to describe various components, but these components are not limited to these terms. These terms are used to distinguish one component from another. Accordingly, the first component may refer to the second component to the extent that it does not depart from what is disclosed herein. Spatially relative terms, such as "below" and "above,"