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KR-20260065904-A - Thermo-curable composition for inkjet adaptive planarization

KR20260065904AKR 20260065904 AKR20260065904 AKR 20260065904AKR-20260065904-A

Abstract

The curable composition may include a polymerizable material and an initiator, wherein the polymerizable material may include at least one polyfunctional vinylbenzene monomer in an amount of at least 70 wt% based on the total weight of the polymerizable material; and at least one initiator may include an azo compound; wherein the cured layer of the curable composition has a linear shrinkage of up to 3.0% after baking treatment at 350°C.

Inventors

  • 스태초위악 티모시 브라이언
  • 류 웨이쥔

Assignees

  • 캐논 가부시끼가이샤

Dates

Publication Date
20260511
Application Date
20240722
Priority Date
20230912

Claims (20)

  1. A curable composition comprising a polymerizable material and an initiator, wherein The polymerizable material comprises at least one polyfunctional vinylbenzene monomer in an amount of at least 70 wt% based on the total weight of the polymerizable material; At least one initiator comprises an azo compound; Here, the cured layer of the curable composition has a linear shrinkage of up to 3.0% after baking treatment at 350°C. Curable composition.
  2. A curable composition according to claim 1, wherein the linear shrinkage is up to 1.8%.
  3. A curable composition according to claim 1, wherein the curable composition essentially does not contain particles.
  4. A curable composition according to claim 1, wherein the azo-compound comprises 1,1'-azobis(cyclohexane carbonibonitrile) (ACHN), 2,2'-azobisisobutyronitrile (AIBN), or a combination thereof.
  5. A curable composition according to claim 1, wherein the amount of initiator is at least 2 wt% based on the total weight of the curable composition.
  6. A curable composition according to claim 1, wherein at least one polyfunctional vinylbenzene comprises a divinylbiphenyl (DVBPh) monomer, a trivinylbiphenyl (TVBPh) monomer, a divinylbenzyl acrylate (DVBA), or a combination thereof.
  7. In paragraph 5, a curable composition in which the curable composition is essentially composed of DVBPh monomer and TVBPh monomer.
  8. A curable composition according to claim 6, wherein the weight percentage ratio of DVBPh monomer to TVBPh monomer is in the range of 1:1 to 4:1.
  9. A curable composition according to claim 1, wherein the amount of polymerizable material is at least 90 wt% based on the total weight of the curable composition.
  10. A curable composition according to claim 1, wherein the viscosity of the curable composition is a maximum of 30 mPa·s.
  11. A curable composition according to claim 1, wherein the polymerizable material has a carbon content of at least 80 percent.
  12. A curable composition according to claim 1, wherein the curable composition essentially does not contain a solvent.
  13. A curable composition according to claim 1, wherein the curable composition is configured for inkjet adaptive planarization (IAP) processing.
  14. A laminate comprising a substrate and a cured layer placed on the substrate, wherein the cured layer is formed from the curable composition of claim 1.
  15. A laminate according to claim 14, wherein the initial decomposition temperature T(X) of the cured layer is at least 400°C.
  16. A method for forming a cured layer on a substrate, comprising the following steps: A step of applying a layer of a curable composition on a substrate, wherein the curable composition comprises a polymerizable material and at least one initiator, the polymerizable material comprises at least one polyfunctional vinylbenzene monomer in an amount of at least 70 wt% based on the total weight of the polymerizable material, and the at least one initiator comprises an azo compound; A step of bringing a curable composition into contact with Super Straight; A step of curing a curable composition to form a cured layer; and Step of removing the template or superstraight from the cured layer, Here, the hardened layer has a maximum thermal shrinkage of 3.0% after baking at 350°C. method.
  17. A method according to claim 16, wherein the curing comprises heating the curable composition to a temperature of at least 40°C and up to 200°C.
  18. A method according to paragraph 16, wherein the azo-compound comprises 1,1'-azobis(cyclohexane carbononitrile) (ACHN), 2,2'-azobisisobutyronitrile (AIBN), or a combination thereof.
  19. A method for manufacturing an article comprising the following steps: A step of applying a layer of a curable composition on a substrate, wherein the curable composition comprises a polymerizable material and at least one initiator, the polymerizable material comprises at least one polyfunctional vinylbenzene monomer in an amount of at least 70 wt% based on the total weight of the polymerizable material, and the at least one initiator comprises an azo compound; A step of bringing a curable composition into contact with a template or Super Straight; A step of curing a curable composition to form a cured layer; A step of removing a template or superstraight from a cured layer, wherein the cured layer has a maximum thermal shrinkage of 3.0% after baking at 350°C; Step of forming a pattern on a substrate; A step of processing a substrate on which a pattern is formed in the above formation step; and A step of manufacturing an article from a substrate processed in the above processing step.
  20. A method according to claim 19, wherein the curing comprises heating the curable composition to a temperature of at least 40°C and up to 200°C.

Description

Thermo-curable composition for inkjet adaptive planarization The present disclosure relates to curable compositions, in particular to thermocurable compositions adapted for inkjet-adapted planarization. Inkjet Adaptive Planarization (IAP) is a process for planarizing the surface of a substrate, such as a wafer containing electronic circuits, by spraying droplets of a curable composition onto the surface of a substrate and bringing a flattened superstraight into direct contact with the added liquid to form a flattened liquid layer. The flattened liquid layer typically solidifies under UV light exposure, and a flattened surface is obtained after the removal of the superstraight, which can then be applied to subsequent processing steps, such as baking, etching, and/or additional deposition steps. A disadvantage of UV-curable compositions is that the superstraight and the superstraight chuck must be transparent, which limits, for example, the material selection for these components. There is a need for curable compositions for IAP that can be heat-cured to form a layer with high thermal stability and do not require a transparent superstraight. In one embodiment, the curable composition may comprise a polymerizable material and an initiator, wherein the polymerizable material may comprise at least one polyfunctional vinylbenzene monomer in an amount of at least 70 wt% based on the total weight of the polymerizable material; and at least one initiator may comprise an azo compound; wherein the cured layer of the curable composition may have a linear shrinkage of up to 3.0% after baking treatment at 350°C. In one aspect of the curable composition, the linear shrinkage may be up to 1.8%. In one aspect, the curable composition may not essentially contain particles. In another aspect of the curable composition, the amount of initiator may be at least 2 wt% based on the total weight of the curable composition. In terms of additional aspects of the curable composition, the azo-compound may include 1,1'-azobis(cyclohexane carbonitrile) (ACHN), 2,2'-azobisisobutyronitrile (AIBN), or a combination thereof. In one aspect of the curable composition, the amount of initiator may be at least 2 wt% based on the total weight of the curable composition. In one embodiment of the curable composition, at least one polyfunctional vinylbenzene may comprise a divinylbiphenyl (DVBPh) monomer, a trivinylbiphenyl (TVBPh) monomer, or a combination thereof. In one aspect, the polymerizable material of the curable composition may essentially consist of a DVBPh monomer and a TVBPh monomer. In terms of additional aspects of the curable composition, the weight % ratio of DVBPh monomer to TVBPh monomer may be in the range of 1:1 to 4:1. In another additional aspect of the curable composition, the amount of polymerizable material may be at least 90 wt% based on the total weight of the curable composition. In another aspect, the viscosity of the curable composition can be up to 30 mPa·s. In certain aspects, the curable composition may not essentially contain a solvent. In one aspect, the polymerizable material of the curable composition may have a carbon content of at least 80 percent based on the total weight of the polymerizable material. In another aspect, the curable composition may not essentially contain a solvent. In another aspect, the curable composition can be configured for inkjet adaptive planarization (IAP). In addition, the cured layer of the curable composition may have an initial decomposition temperature T(X) of at least 400°C. In another embodiment, the laminate may comprise a substrate and a cured layer placed on the substrate, wherein the cured layer may be formed from the curable composition described above. In one aspect of the laminate, the initial decomposition temperature T(X) of the cured layer may be at least 400°C. In a further embodiment, a method for forming a cured layer on a substrate may comprise the steps of: applying a layer of a curable composition on a substrate, wherein the curable composition comprises a polymerizable material and at least one initiator, wherein the polymerizable material comprises at least one polyfunctional vinylbenzene monomer in an amount of at least 70 wt% based on the total weight of the polymerizable material, and the at least one initiator comprises an azo compound; bringing the curable composition into contact with a superstraight; curing the curable composition to form a cured layer; and removing the template or superstraight from the cured layer, wherein the cured layer has a linear shrinkage of up to 3.0% after baking at 350°C. In one aspect of the method, curing may include heating the curable composition to a temperature of at least 40°C and up to 200°C. In certain aspects of the method, the azo-compound may include 1,1'-azobis(cyclohexane carbonitrile) (ACHN); 2,2'-azobisisobutyronitrile (AIBN); or a combination thereof. In one embodiment, a method for manufacturing an article m