KR-20260065916-A - Stage device, lithography device and method of manufacturing article

KR20260065916AKR 20260065916 AKR20260065916 AKR 20260065916AKR-20260065916-A

Abstract

The stage device comprises a stage, a actuator that drives the stage, a actuator that drives the stage, a gyro moment generator coupled to the actuator, and a control unit that controls the gyro moment generator so as to offset at least a portion of the moment acting on the actuator by driving the stage by the actuator with the moment generated by the gyro moment generator.

Inventors

사사키 켄

Assignees

캐논 가부시끼가이샤

Dates

Publication Date: 20260511
Application Date: 20241011
Priority Date: 20231017

Claims (17)

The stage and, An actuator that drives the stage, having a actuator that moves together with the stage and a stator that generates thrust for the actuator, and A gyro moment generating unit coupled to the above-mentioned actuator, and A stage device characterized by having a control unit that controls a gyro moment generator so as to offset at least a portion of the moment acting on the actuator by driving the stage by the actuator with the moment generated by the gyro moment generator.
In Article 1, The above gyro moment generating unit is, A first gimbal that supports a rotating body so as to be rotatable around a second axis perpendicular to a first axis parallel to the direction in which the actuator drives the stage, and A first motor that rotates the above-mentioned rotating body around the second axis, and A second gimbal that supports the first gimbal so as to be rotatable around the first axis, and A stage device characterized by including a second motor that rotates the first gimbal around the first axis.
In Article 2, A stage device characterized in that the above-described control unit feedforwardly controls the second motor based on control information for controlling the actuator.
In Paragraph 3, A stage device characterized in that the above control information includes a thrust generated by the actuator.
In Paragraph 3, A stage device characterized in that the above control information includes a current supplied to the actuator.
In any one of paragraphs 1 to 5, The apparatus further comprises a flat plate and a driving unit coupled to the movable member to move on the flat plate, and A stage device characterized by the above stage moving together with the driving unit on the above plate.
In Article 6, A stage device characterized in that the above-mentioned gyro moment generating unit is coupled to the upper surface of the above-mentioned movable member.
In Article 6, A stage device characterized in that the above-mentioned gyro moment generating unit is coupled to the side of the above-mentioned movable member.
In Article 6, A stage device characterized in that the above-mentioned gyro moment generating unit is coupled to the lower surface of the above-mentioned movable member.
In any one of paragraphs 1 through 9, A plurality of gyro moment generating units including the above-mentioned gyro moment generating unit, and The above plurality of gyro moment generating units are coupled to the above-mentioned movable member, and A stage device characterized in that the control unit controls the plurality of gyro moment generators so that at least a portion of the moment acting on the actuator is offset by the moment generated by the plurality of gyro moment generators by driving the stage by the actuator.
In Article 10, A stage device characterized in that the plurality of gyro moment generating units are aligned along the direction in which the actuator drives the stage.
In Article 2, Further comprising a second gyro moment generating unit coupled to the above-mentioned actuator, The above gyro moment generating unit and the second gyro moment generating unit are aligned along the direction in which the actuator drives the stage, and The above second gyro moment generating unit is, A third gimbal that supports the second rotating body so as to be rotatable around the second axis, and A fixed third motor that rotates the second rotating body around the second axis, and A fourth gimbal that supports the third gimbal so as to be rotatable around the first axis, and It includes a fourth motor that rotates the fourth gimbal around the first axis, and In the above-mentioned gyro moment generating unit, the direction in which the first motor rotates the rotating body and the direction in which the third motor rotates the second rotating body in the above-mentioned gyro moment generating unit are opposite directions to each other. A stage device characterized in that the direction in which the second motor rotates the rotating body in the above-mentioned gyro moment generating unit and the direction in which the fourth motor rotates the second rotating body in the above-mentioned gyro moment generating unit are opposite directions to each other.
In any one of paragraphs 1 through 9, A plurality of gyro moment generating units including the above gyro moment generating unit, and a plurality of actuators including the above actuator, are provided. Each of the plurality of actuators has a moving member that moves together with the stage and a stator that generates thrust for the moving member. A stage device characterized in that each of the plurality of gyro moment generating parts is coupled to the actuator of a corresponding actuator among the plurality of actuators.
In Article 13, A stage device characterized in that the above control unit feedforwardly controls each of the plurality of gyro moment generating units based on control information for controlling a corresponding actuator among the plurality of actuators.
In any one of paragraphs 1 to 14, A stage device characterized in that the above control unit activates the gyro moment generator before the actuator starts driving the stage.
As a lithography device for transferring a pattern from a disc onto a substrate, A lithography apparatus characterized by having a stage device described in any one of claims 1 to 15 configured to positionally align the above-mentioned disc and the above-mentioned substrate.
A transfer process for transferring a pattern of a plate onto a substrate using a lithography device described in claim 16, and A method for manufacturing an article characterized by including a processing process for obtaining an article by processing the substrate that has undergone the above-mentioned transfer process.

Description

Stage device, lithography device and method of manufacturing article The present invention relates to a stage device, a lithography device, and a method for manufacturing an article. In a lithography device, represented by an exposure device and an imprint device, the substrate can be driven so that the shot area of the substrate and the plate are aligned. In such a lithography device, a stage for aligning the position of the substrate and the plate can be driven at high speed. However, when the stage is driven at high speed, a corresponding moment is generated, which may cause the stage to vibrate or the floor on which the lithography device is installed to vibrate. Japanese Patent Publication No. 11-190786 describes a stage device comprising a movable stage, a base plate supporting the stage, a driving mechanism for driving the stage, and a rotor that generates a moment to reduce the reaction force generated as the stage moves. Japanese Patent Publication No. 2012-161896 describes a moving device comprising a moving body, a linear motor that moves a movable body attached to the moving body in a single axis direction, and a rotary motor fixed to the moving body. A moving assembly consisting of a moving body, a movable body, and a rotary motor receives rotational torque as the linear motor moves the movable body. The rotary motor rotates a rotor to offset at least a portion of its rotational torque. However, Japanese Patent Publication No. 11-190786 and Japanese Patent Publication No. 2012-161896 do not disclose the concept of offsetting at least a portion of the moment generated when moving the movable body by a gyro moment. The present invention provides a technology advantageous for reducing vibrations that may occur due to the driving of a stage. One aspect of the present invention relates to a stage device, wherein the stage device comprises a stage, a movable member that moves together with the stage, and a stator that generates thrust on the movable member, an actuator that drives the stage, a gyro moment generator coupled to the movable member, and a control unit that controls the gyro moment generator so as to offset at least a portion of the moment acting on the movable member by driving the stage by the actuator with the moment generated by the gyro moment generator. Other features and advantages of the present invention will become apparent from the following description with reference to the accompanying drawings. In addition, in the accompanying drawings, the same or similar components are given the same reference numerals. The attached drawings are included in the specification, constitute part thereof, illustrate embodiments of the invention, and are used to explain the principles of the invention together with the description thereof. [Fig. 1] A perspective view showing the configuration of a stage device of the first embodiment. [Fig. 2a] A schematic diagram showing the standby state of the gyro moment generating unit. [Fig. 2b] A schematic diagram showing the operating state of the gyro moment generating unit. [Fig. 3] A schematic diagram showing the stage in operation. [Fig. 4] A schematic diagram showing a configuration in which a gyro moment generating unit is coupled to the lower surface of a moving part. [Fig. 5] A perspective view showing the configuration of a stage device of the second embodiment. [Fig. 6] A schematic diagram showing the operating state of two gyro moment generating units. [Fig. 7] A perspective view showing the configuration of a stage device of the third embodiment. [Fig. 8] A perspective view illustrating the operation of a stage device of the third embodiment. [Fig. 9] A drawing showing the configuration of an exposure device of one embodiment. [Fig. 10] Block diagram of a control system controlling the angular velocity of the second motor. [Fig. 11] A schematic diagram showing a configuration in which a gyro moment generating unit is coupled to the side of a mover. [Fig. 12] A drawing showing an example of the time variation of the angular velocity ωY of the second motor, the angular velocity ωZ of the first motor, and the stage moment AM of the gyro moment generating unit. Hereinafter, embodiments will be described in detail with reference to the attached drawings. Furthermore, the following embodiments do not limit the invention according to the claims. Although multiple features are described in the embodiments, not all of these multiple features are essential to the invention, and multiple features may be combined at will. Moreover, in the attached drawings, the same reference number is assigned to identical or similar components, and redundant descriptions are omitted. In this specification and drawings, the structure and operation are described according to the XYZ coordinate system. The Z-axis in the XYZ coordinate system may be an axis parallel to the vertical direction. The directions parallel to the X-axis, Y-axis, and Z-axis in the XYZ coordinate s