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KR-20260065951-A - Anti-reflective edge coating

KR20260065951AKR 20260065951 AKR20260065951 AKR 20260065951AKR-20260065951-A

Abstract

The present disclosure provides a waveguide coupler and methods thereof. The waveguide coupler comprises a substrate having a top surface, a bottom surface, and an edge array. The edge array has at least a first inclined surface. The first inclined surface comprises an angle of about 0.1° to about 90° with respect to the top surface or bottom surface of the substrate. A plurality of structures are disposed on the substrate. An anti-reflective composition is deposited on the first inclined surface of the edge array.

Inventors

  • 왕, 에반

Assignees

  • 어플라이드 머티어리얼스, 인코포레이티드

Dates

Publication Date
20260511
Application Date
20240822
Priority Date
20230918

Claims (20)

  1. As a waveguide coupler, A substrate having an uppermost surface, a lowermost surface, and an edge array, wherein the edge array has at least a first inclined surface, A substrate, wherein the first inclined surface comprises an angle of about 0.1° to about 90° with respect to the uppermost surface or the lowermost surface of the substrate; A plurality of structures disposed on the above substrate; and A waveguide coupler comprising an anti-reflective composition deposited on the first inclined surface of the edge array.
  2. A waveguide coupler according to claim 1, wherein the first inclined surface extends from about 0.1 mm to about 10 mm.
  3. In claim 1, the edge array is a waveguide coupler having a first inclined surface and a second inclined surface.
  4. In paragraph 3, the waveguide coupler, wherein the second inclined surface extends from about 0.1 mm to about 10 mm.
  5. A waveguide coupler according to paragraph 3, wherein the first inclined surface is relative to the uppermost surface and the second inclined surface is relative to the lowermost surface.
  6. In paragraph 3, the edge arrangement is a waveguide coupler having a first inclined surface, a second inclined surface, and a third inclined surface.
  7. In claim 6, the waveguide coupler, wherein the third inclined surface extends from about 0.1 mm to about 10 mm.
  8. A waveguide coupler according to claim 6, wherein the first inclined surface is relative to the uppermost surface, the second inclined surface is relative to the lowermost surface, and the third inclined surface is relative to the first inclined surface or the second inclined surface.
  9. In claim 8, the third inclined surface intersects the first inclined surface and the second inclined surface, forming a waveguide coupler.
  10. As a waveguide coupler, A substrate having an uppermost surface, a lowermost surface, and an edge array, wherein the edge array has a first inclined surface and a second inclined surface, The first inclined surface comprises an angle of about 0.1° to about 90° with respect to the uppermost surface of the substrate, and A substrate, wherein the second inclined surface comprises an angle of about 0.1° to about 90° with respect to the lowest surface of the substrate; A plurality of structures disposed on the above substrate; and A waveguide coupler comprising an anti-reflective composition optionally deposited on the first inclined surface and the second inclined surface of the edge array.
  11. In item 10, the waveguide coupler, wherein the second inclined surface extends about 0.1 mm to about 10 mm.
  12. In paragraph 10, the edge arrangement is a waveguide coupler having a first inclined surface, a second inclined surface, and a third inclined surface.
  13. In paragraph 12, the waveguide coupler, wherein the third inclined surface extends about 0.1 mm to about 10 mm.
  14. A waveguide coupler according to claim 12, wherein the first inclined surface is relative to the uppermost surface, the second inclined surface is relative to the lowermost surface, and the third inclined surface is relative to the first inclined surface or the second inclined surface.
  15. In paragraph 14, the third inclined surface intersects the first inclined surface and the second inclined surface, forming a waveguide coupler.
  16. As a waveguide coupler, A substrate having an uppermost surface, a lowermost surface, and an edge array, wherein the edge array has a first inclined surface, a second inclined surface, and a third inclined surface; The first inclined surface comprises an angle of about 0.1° to about 90° with respect to the uppermost surface of the substrate, and The second inclined surface comprises an angle of about 0.1° to about 90° with respect to the lowest surface of the substrate, and A substrate, wherein the third inclined surface comprises an angle of about 0.1° to about 90° with respect to the uppermost first inclined surface or the second inclined surface; A plurality of structures disposed on the above substrate; and A waveguide coupler comprising an anti-reflective composition optionally deposited on the first inclined surface, the second inclined surface, and the third inclined surface of the edge array.
  17. In paragraph 16, the third inclined surface extends about 0.1 mm to about 10 mm, and the third inclined surface intersects the first inclined surface and the second inclined surface, a waveguide coupler.
  18. As a method, Step of manufacturing a formulation; A step of applying the formulation onto a first inclined surface of a waveguide coupler using an edge tool—the first inclined surface comprises an angle of about 0.1° to about 90° with respect to the uppermost or lowermost surface of the substrate of the waveguide coupler—; and A method comprising the step of curing the above preparation to form an anti-reflective composition.
  19. A method according to claim 18, further comprising the step of applying the formulation onto a second inclined surface of the waveguide coupler, wherein the second inclined surface comprises an angle of about 0.1° to about 90° with respect to the lowest surface of the substrate.
  20. A method according to claim 19, further comprising the step of applying the formulation onto a third inclined surface of the waveguide coupler, wherein the third inclined surface comprises an angle of about 0.1° to about 90° with respect to the first inclined surface or the second inclined surface.

Description

Anti-reflective edge coating The embodiments of the present disclosure generally relate to waveguide couplers for augmentation, mixing, and virtual reality. Virtual reality is generally considered to be a computer-generated simulation environment in which the user has a distinct physical presence. Virtual reality experiences are created in 3D and can be viewed using a head-mounted display (HMD), such as glasses or other wearable display devices, which have near-eye display panels as lenses to display a virtual reality environment that replaces the real environment. However, augmented reality enables an experience where users can still look through the display lenses of glasses or other HMD devices and observe their surroundings, while also being able to see images of virtual objects generated for the display and appearing as part of the environment. Augmented reality can include any type of input, such as audio and haptic inputs, as well as virtual images, graphics, and videos that enhance or augment the environment experienced by the user. As an emerging technology, augmented reality presents many challenges and design constraints. One such challenge is displaying virtual images overlaid on the surrounding environment. Waveguide couplers, such as augmented reality waveguide couplers, are used to assist in overlaying images. The generated light propagates through the waveguide coupler until it exits and is overlaid on the surrounding environment. Unfortunately, stray light is often generated because the light undergoes scattering, reflection, and diffraction within the waveguide coupler. Therefore, improved waveguide couplers that reduce the amount of stray light are needed. In a manner that the features of the above-mentioned disclosure can be understood in detail, a more specific description of the disclosure briefly summarized above may be made with reference to embodiments, some of which are illustrated in the accompanying drawings. However, it should be noted that the accompanying drawings are merely illustrative of exemplary embodiments and, therefore, should not be construed as limiting the scope thereof, and that other equally effective embodiments may be permitted. FIG. 1a is a front perspective view of a waveguide coupler according to embodiments described in this specification. FIG. 1b is a schematic cross-sectional view of a waveguide coupler having a first edge array according to embodiments described in this specification. FIG. 1c is a schematic cross-sectional view of a waveguide coupler having a second edge array according to embodiments described in this specification. FIG. 1d is a schematic cross-sectional view of a waveguide coupler having a third edge array according to embodiments described in this specification. FIG. 2 is a flowchart of a method for forming an anti-reflection composition on the edge of a waveguide coupler according to embodiments described in this specification. For ease of understanding, the same reference numbers have been used to denote identical elements common to the drawings where possible. The elements and features of one embodiment are considered to be advantageously incorporated into other embodiments without further mention. FIG. 1a is a front perspective view of a waveguide coupler (100) according to embodiments. It should be understood that the waveguide coupler (100) described herein is an exemplary waveguide coupler, and that other waveguide couplers may increase transparency by allowing stray light, for example, light not diffracted by one or more gratings, to exit the waveguide coupler along the lateral edge of the waveguide coupler and thereby reducing the reflection of stray light back toward the gratings. A waveguide coupler (100) comprises a plurality of structures (102) disposed on and/or above the surface (103) of a substrate (101). The structures (102) may be nanostructures having sub-micron dimensions, for example, nano-size dimensions. The waveguide coupler (100) comprises regions of the structures (102) corresponding to one or more gratings (104), such as a first grating (104a), a second grating (104b), and a third grating (104c). The first grating (104a) may correspond to an input coupling grating, and the third grating (104c) may correspond to an output coupling grating. The second grating (104b) may correspond to an intermediate grating, for example, a pupil dilator. The substrate (101) may also be selected to transmit a suitable amount of light of a desired wavelength or wavelength range, such as one or more wavelengths of about 100 to about 3000 nanometers. Without limitation, in some embodiments, the substrate (101) is configured such that the substrate (101) transmits about 50% to about 100% of the infrared to ultraviolet region of the light spectrum. The substrate (101) may be formed of any suitable material, provided that the substrate (101) can adequately transmit light of a desired wavelength or wavelength range and can serve as a s