KR-20260065985-A - Comprehensive modeling platform for manufacturing equipment

KR20260065985AKR 20260065985 AKR20260065985 AKR 20260065985AKR-20260065985-A

Abstract

The disclosed method includes the step of interacting with a manufacturing system and process chambers through a graphical user interface (GUI). The method includes the step of receiving user input for viewing data from a process chamber in a plurality of modes, such as a first mode having actual process operation data and a second mode having virtual process operation data, and the step of displaying corresponding data on the GUI. The method further includes the step of outputting a graphical view of a manufacturing system including process chambers, transfer chambers, and load locks, along with selectable view options, and the step of loading virtual models associated with the selected process chambers and view options. The method further includes the step of providing sensor data from a process chamber to a first model to obtain predicted output data, and providing simulation inputs of a virtual substrate processing operation to a second model to obtain predicted output data, wherein the two sets of data are displayed on the GUI for analysis.

Inventors

모라디안, 알라
켈카르, 우메쉬
코토누르, 프라샨트
라마나탄, 카르식
라오, 프리트햄
파사가다굴라, 무딧
도다마네, 아눕 쿠마르 디.

Assignees

어플라이드 머티어리얼스, 인코포레이티드

Dates

Publication Date: 20260512
Application Date: 20240909
Priority Date: 20230908

Claims (20)

As a method, A step of receiving a first user input for viewing data associated with a first process chamber in a first chamber data mode via a graphical user interface (GUI) by a processing device, wherein the data in the first chamber data mode includes data of a process operation performed in the first process chamber. For display on the GUI, a step of providing first display data of the first data chamber mode in response to receiving the first user selection; A step of receiving a second user input for viewing data associated with the first process chamber in a second chamber data mode—the data in the second chamber data mode includes data of a virtual process operation performed by a virtual representation of the first process chamber—; and For display on the GUI above, the step of providing second display data of the second data chamber mode in response to receiving the second user selection A method including
In paragraph 1, A step of receiving a third user input for viewing data associated with a second process chamber in the first chamber data mode or the second chamber data mode; and A step of providing third display data in response to receiving the third user selection for display on the above GUI A method that further includes.
In claim 1, the step of generating the first display data is: A step of providing sensor data of the process operation performed in the first process chamber to a physics-based digital twin model of the first process chamber; and A step of obtaining an output from the physical-based digital twin model that indicates the quality of performance of the above process operation. A method comprising, wherein the first display data comprises the output from the digital twin model.
In claim 1, the step of generating the second display data is: The step of providing input data of the above virtual process operation to a trained machine learning model associated with the first process chamber; and A step of obtaining an output from the trained machine learning model that indicates the quality of performance of the above virtual process operation. A method comprising, wherein the second display data comprises the output from the trained machine learning model.
As a method, A step of outputting a view of a manufacturing system comprising a plurality of process chambers, one or more transfer chambers, and one or more load locks by a processing device—the view comprises, for each of the plurality of process chambers, a graphic representation of the process chamber and one or more view options for data associated with the process chamber—; A step of receiving input of a view option for a selected process chamber from one or more view options of the plurality of process chambers; and A step of loading one or more virtual models associated with the selected process chamber and the view option. A method comprising, wherein each process chamber is associated with one or more virtual models configured for the corresponding process chamber.
In paragraph 5, A step of receiving input of a process operation performed in the selected process chamber; A step of providing sensor data associated with the above process operation to one or more virtual models; and A step of displaying data output by one or more virtual models based on the sensor data. A method that further includes.
In paragraph 5, A step of providing input data to one or more virtual models—the input data is associated with a processed substrate—; and Step of obtaining output data from one or more virtual models A method further comprising, wherein the output data includes a prediction of the cross-sectional profile of the processed substrate.
In paragraph 7, the prediction of the cross-sectional profile is: The bottom region of the trench of the above-mentioned processed substrate; The sidewall of the trench of the above-mentioned processed substrate; or Field adjacent to the trench of the above-mentioned processed substrate A method comprising predicting the thickness of a layer of the processed substrate in one or more of the above.
A method according to claim 7, wherein the prediction of the cross-sectional profile comprises a first prediction of the cross-sectional profile when a first part of a process operation associated with the processed substrate is executed, and a second prediction of the cross-sectional profile when the first part of the process operation and a second part of the process operation are executed.
In paragraph 5, A step of receiving a first set of simulation inputs; A step of providing a first set of the simulation inputs to one or more virtual models; A step of obtaining first output data representing a virtual substrate process operation from one or more virtual models - said first output data is based on a first set of simulation inputs -; and Step of making the above first output data display A method that further includes.
A method according to claim 10, wherein the first output data includes characteristic data of a virtual substrate associated with the virtual substrate process operation.
A method according to claim 10, wherein the first output data includes characteristic values of a virtual process chamber associated with the virtual process operation.
In paragraph 5, Among the plurality of process chambers above, the first process chamber includes a physical vapor deposition (PVD) chamber, and the one or more virtual models associated with the first process chamber are one or more PVD virtual models; A method in which a second process chamber among the plurality of process chambers comprises an atomic layer deposition (ALD) chamber, and one or more virtual models associated with the first process chamber are one or more ALD virtual models.
As a method, A step of receiving a first user input of a first process chamber through a graphical user interface (GUI) of a modeling platform; A step of providing first input data to a first model in response to receiving a first user input of the first process chamber, wherein the first input data includes sensor data from the first process chamber; A step of obtaining first output data from the first model - the first output data includes prediction data associated with the sensor data from the first process chamber -; A step of providing second input data to a second model in response to receiving a first user input of the first process chamber, wherein the second input data includes simulation inputs of a virtual substrate processing operation; A step of obtaining second output data from the second model above - the second output data includes prediction data of the virtual substrate processing operation -; and A step of providing the first output data and the second output data for display on the GUI of the above-mentioned modeling platform A method including
A method according to claim 14, wherein the first modeling data mode includes the first model, and the first modeling data mode includes providing input data from substrate processing operations performed in the first process chamber to a plurality of models.
A method according to claim 14, wherein the first modeling data mode includes the second model, and the second modeling data mode includes providing simulation inputs of virtual substrate processing operations to a plurality of models.
In Paragraph 14, A step of receiving a second user input of a second process chamber; A step of providing third input data to a third model in response to receiving a second user input from the second process chamber, wherein the third input data includes sensor data from the second process chamber, and the third model is configured to perform functions in association with the second process chamber that are identical to the functions configured to be performed by the first model in association with the first process chamber. A step of obtaining a third output from the above third model; and The step of providing the third output for display on the GUI of the above-mentioned modeling platform A method that further includes.
In Paragraph 14, A step of providing fourth input data to a corrected physics-based model associated with the first process chamber in response to the first user input; A step of obtaining a third output from the above-mentioned corrected physics-based model; and The step of providing the third output for display on the GUI of the above-mentioned modeling platform A method that further includes.
In claim 14, a method wherein at least one of the first model or the second model comprises a trained machine learning model.
In claim 14, a method wherein at least one of the first model or the second model comprises a corrected physics-based model.

Description

Comprehensive modeling platform for manufacturing equipment The present disclosure relates to methods associated with models used to evaluate manufactured devices, such as semiconductor devices. More specifically, the present disclosure relates to a comprehensive modeling platform for manufacturing equipment. Products can be produced by performing one or more manufacturing processes using manufacturing equipment. For example, semiconductor manufacturing equipment can be used to produce substrates through semiconductor manufacturing processes. Products must be produced to possess specific characteristics suitable for target applications. Various models, such as digital twin models, are used in various process control and prediction functions associated with manufacturing equipment. Models associated with manufacturing equipment are trained and/or calibrated using data associated with the equipment. The following is a simplified summary of the present disclosure to provide a basic understanding of some aspects of the present disclosure. This summary is not an extensive overview of the present disclosure. It is not intended to identify the core or important elements of the present disclosure, nor is it intended to describe any scope of specific embodiments or claims of the present disclosure. The sole purpose of this summary is to present some concepts of the present disclosure in a simplified form as an introduction to the more detailed description to be presented later. In one aspect of the present disclosure, the method comprises receiving a first user input for viewing data associated with a first process chamber in a first chamber data mode via a graphical user interface (GUI) by a processing device. The data in the first chamber data mode includes data of a process operation performed in the first process chamber. The method further comprises providing first display data in the first data chamber mode in response to receiving the first user input for display on the GUI. The method further comprises receiving a second user input for viewing data associated with the first process chamber in a second chamber data mode. The data in the second chamber data mode includes data of a virtual process operation performed by a virtual representation of the first process chamber. The method further comprises providing second display data in the second data chamber mode in response to receiving the second user input for display on the GUI. In another aspect of the present disclosure, the method comprises the step of outputting a view of a manufacturing system by means of a processing device. The manufacturing system comprises a plurality of process chambers. The manufacturing system further comprises one or more transfer chambers. The manufacturing system further comprises one or more load locks. For each process chamber of the manufacturing system, the view comprises a graphical representation of the process chamber. The view further comprises one or more view options for data associated with the process chambers of the manufacturing system. The method further comprises the step of receiving input of a view option for a process chamber from one or more view options of the plurality of process chambers. The method further comprises the step of loading one or more virtual models associated with a selected process chamber and a selected view option. Each process chamber is associated with one or more virtual models configured for that process chamber. In another aspect of the present disclosure, the method comprises the step of receiving a first user input of a first process chamber through a GUI of a modeling platform. The method further comprises the step of providing first input data to a first model in response to receiving the first user input of the first process chamber. The first input data includes sensor data from the first process chamber. The method further comprises the step of obtaining first output data from the first model. The first output data includes prediction data associated with the sensor data from the first process chamber. The method further comprises the step of providing second input data to a second model in response to receiving the first user input of the first process chamber. The second input data includes simulation inputs for a virtual substrate processing operation. The method further comprises the step of obtaining second output data from the second model. The second output data includes prediction data for a virtual substrate processing operation. The method further comprises the step of providing the first output data and the second output data for display on a GUI of a modeling platform. The present disclosure is illustrated in the accompanying drawings as an example, not a limitation. FIG. 1 is a block diagram illustrating an exemplary system architecture according to some embodiments. FIG. 2a illustrates a block diagram of a system including an exemplary data set generator for g