KR-20260066114-A - Systems and methods for detecting malfunctions in a gas distribution system

KR20260066114AKR 20260066114 AKR20260066114 AKR 20260066114AKR-20260066114-A

Abstract

Systems and methods for monitoring and detecting malfunctions within a gas distribution system are provided. The system may first enable gas flow through a flow path of the gas distribution system by means of a controller. Then, while gas flow through the flow path of the gas distribution system is enabled, the system may receive data including pressure data and/or flow rate data associated with the flow path. The system may process the data to determine whether the first flow path of the gas distribution system contains a malfunction. In response to the determination that the flow path contains a malfunction, the system may determine the relative location of the malfunction within the flow path with respect to a mass flow controller (MFC) or sensor within the flow path. The system may generate a report indicating whether the flow path contains a malfunction and the relative location of any determined malfunction.

Inventors

벤자민 라즈, 대미안 라즈
알리, 하산
매지, 트래비스 클라크
크릴, 토르스텐
벤카테슈와르, 비그네시 쿠마르
샨카라무르티, 벤카타나라야나

Assignees

어플라이드 머티어리얼스, 인코포레이티드

Dates

Publication Date: 20260512
Application Date: 20240828
Priority Date: 20230927

Claims (19)

As a method for detecting malfunctions within a gas distribution system, A step of enabling gas flow through a first flow path of the gas distribution system by means of a controller; A step of receiving first data including at least one of first pressure data or first flow rate data associated with the first flow path while gas flow through the first flow path of the gas distribution system is enabled; A step of processing the first data to determine whether the first flow path of the gas distribution system includes a malfunction; In response to determining that the first flow path contains a malfunction, the method comprises the step of determining the relative location of the malfunction within the first flow path with respect to at least one of a pressure sensor or a flow sensor within the first flow path; and The method comprises the step of generating a report indicating whether the first flow path includes a malfunction and the relative location of any determined malfunction. method.
In Article 1, The above first flow path is: A gas stick comprising a first plurality of valves upstream of at least one pressure sensor or flow sensor and a second plurality of valves downstream of the at least one pressure sensor or flow sensor; A processing chamber fluidly coupled to the above gas stick; and A exhaust conduit fluidly coupled to the processing chamber and configured to exhaust gas flow from the gas distribution system, method.
In Article 1, A step of making gas flow through the first flow path impossible by the above controller; A step of enabling gas flow through a second flow path of the gas distribution system by means of the above controller; A step of receiving second data including at least one of second pressure data or second flow rate data associated with the second flow path while gas flow through the second flow path of the gas distribution system is enabled; A step of processing the second data to determine whether the second flow path of the gas distribution system includes a malfunction; and In response to determining that the second flow path contains a malfunction, the method further includes the step of determining the relative location of the malfunction within the second flow path with respect to at least one pressure sensor or flow sensor within the second flow path; The above report further indicates whether the second flow path includes a malfunction and the relative location of any determined malfunction of the second flow path, method.
In Paragraph 3, A step of making gas flow through the second flow path impossible by the controller above; A step of enabling gas flow through a third flow path of the gas distribution system by means of the above controller; While gas flow through the third flow path of the gas distribution system is enabled, a step of receiving third data including at least one of third pressure data or third flow rate data associated with the third flow path; A step of processing the third data to determine whether the third flow path of the gas distribution system includes a malfunction; and In response to determining that the third flow path contains a malfunction, the method further includes the step of determining the relative location of the malfunction within the third flow path with respect to at least one pressure sensor or flow sensor within the third flow path; The above report further indicates whether the third flow path includes a malfunction and the relative location of any determined malfunction of the third flow path, method.
In Paragraph 4, The first flow path comprises a gas stick including at least one pressure sensor or flow sensor, and a flow path for a first gas passing through a process chamber, and The second flow path above includes a flow path for the first gas through the gas stick and a bypass conduit bypassing the process chamber, and The third flow path comprises the gas stick and the flow path for the second gas passing through the process chamber or the bypass conduit. method.
In Article 1, The above first data is: Chamber pressure data indicating the pressure inside the processing chamber; Exhaust conduit pressure data indicating the pressure inside the exhaust conduit; Gas stick pressure data indicating pressure within a portion of a gas stick comprising at least one pressure sensor or flow sensor; or Gas stick flow data indicating the flow rate within the portion of the gas stick comprising at least one pressure sensor or flow sensor. including at least one of, method.
In Article 1, The step of processing the first data to determine whether the first flow path of the gas distribution system includes a malfunction is: A step of determining a delta in chamber pressure data between a first time before enabling gas flow through the first flow path and a second time after enabling gas flow through the first flow path; A step of determining the delta in the exhaust pipe pressure data between the first time and the second time; A step of determining the stability level of the gas flow rate through the first flow path; and The method includes the step of determining whether the delta in the chamber pressure data, the delta in the exhaust pipe pressure data, and the stability level of the gas flow rate are within individual acceptable ranges. A malfunction is identified in response to any of the delta in the chamber pressure data, the delta in the exhaust duct pressure data, or the stability level of the gas flow rate deviating from the individual acceptable ranges. method.
In Article 1, The step of processing the first data to determine whether the first flow path of the gas distribution system includes a malfunction is: A step of determining a delta in chamber pressure data between a first time before enabling gas flow through the first flow path and a second time after making gas flow through the first flow path impossible; A step of determining the delta in the exhaust pipe pressure data between the first time and the second time; A step of determining the stability level of the gas flow rate through the first flow path; and The method includes the step of determining whether the delta in the chamber pressure data, the delta in the exhaust pipe pressure data, and the stability level of the gas flow rate are within individual acceptable ranges. A malfunction is identified in response to any of the delta in the chamber pressure data, the delta in the exhaust duct pressure data, or the stability level of the gas flow rate deviating from the individual acceptable ranges. method.
In Article 1, The step of determining the relative position of the malfunction within the first flow path is: A step of opening one or more valves in an upstream portion of a gas stick associated with a first flow path, which is upstream of at least one pressure sensor or flow sensor, to allow gas flow to proceed through the upstream portion of the gas stick; A step of closing one or more valves in a downstream portion of a gas stick associated with the first flow path, located downstream of at least one pressure sensor or flow sensor; A step of receiving second data indicating a first pressure change within an upstream portion of the gas stick as the downstream portion of the gas stick is isolated; and A step comprising determining that the upstream portion of the gas stick includes the malfunction in response to a determination that the first pressure change exceeds the first pressure change threshold, method.
In Article 1, The step of determining the relative position of the malfunction within the first flow path is: A step of closing one or more valves in an upstream portion of a gas stick associated with the first flow path, located upstream of at least one pressure sensor or flow sensor; A step of opening one or more valves in a downstream portion of a gas stick associated with the first flow path, located downstream of at least one pressure sensor or flow sensor; A step of receiving second data indicating a first pressure change within a downstream portion of the gas stick; and A step comprising determining that the downstream portion of the gas stick includes the malfunction in response to a determination that the first pressure change exceeds the first pressure change threshold, method.
In Article 1, The step of determining the relative location of a malfunction within the first flow path comprises determining that the malfunction is associated with one or more components of the first flow path located downstream of at least one pressure sensor or flow sensor, or determining that the malfunction is associated with one or more components of the first flow path located upstream of the at least one pressure sensor or flow sensor. method.
A non-transient computer-readable storage medium comprising instructions that cause the processing device to perform operations when executed by the processing device, The above operations are: An operation that enables gas flow through a first flow path of a gas distribution system by means of a controller; While gas flow through the first flow path of the gas distribution system is enabled, the operation of receiving first data including at least one of first pressure data or first flow rate data associated with the first flow path; An operation of processing the first data to determine whether the first flow path of the gas distribution system includes a malfunction; In response to determining that the first flow path contains a malfunction, an operation of determining the relative position of the malfunction within the first flow path with respect to at least one of the pressure sensor or flow sensor within the first flow path; and The operation of generating a report indicating whether the first flow path includes a malfunction and the relative location of any determined malfunction, Non-transient computer-readable storage media.
In Article 12, The above first flow path is: A gas stick comprising a first plurality of valves upstream of at least one pressure sensor or flow sensor and a second plurality of valves downstream of said at least one pressure sensor or flow sensor; A processing chamber fluidly coupled to the above gas stick; and A exhaust conduit fluidly coupled to the processing chamber and configured to exhaust gas flow from the gas distribution system, Non-transient computer-readable storage media.
In Article 12, The operations performed by the above processing device are: An operation by the above controller to make gas flow through the first flow path impossible; An operation that enables gas flow through a second flow path of the gas distribution system by the above controller; While gas flow through the second flow path of the gas distribution system is enabled, the operation of receiving second data including at least one of second pressure data or second flow rate data associated with the second flow path; The operation of processing the second data to determine whether the second flow path of the gas distribution system includes a malfunction; and In response to determining that the second flow path contains a malfunction, the method further includes an operation of determining the relative position of the malfunction within the second flow path with respect to at least one of the pressure sensor or flow sensor within the second flow path; The above report further indicates whether the second flow path includes a malfunction and the relative location of any determined malfunction of the second flow path, Non-transient computer-readable storage media.
In Article 14, The operations performed by the above processing device are: An operation by the above controller to make gas flow through the second flow path impossible; An operation that enables gas flow through a third flow path of the gas distribution system by the above controller; While gas flow through the third flow path of the gas distribution system is enabled, the operation of receiving third data including at least one of third pressure data or third flow rate data associated with the third flow path; The operation of processing the third data to determine whether the third flow path of the gas distribution system includes a malfunction; and In response to determining that the third flow path contains a malfunction, the method further includes an operation of determining the relative position of the malfunction within the third flow path with respect to at least one of the pressure sensor or flow sensor within the third flow path; The above report further indicates whether the third flow path includes a malfunction and the relative location of any determined malfunction of the third flow path, Non-transient computer-readable storage media.
In Article 15, The first flow path comprises a gas stick including at least one pressure sensor or flow sensor, and a flow path for a first gas passing through a process chamber, and The second flow path above includes a flow path for the first gas through the gas stick and a bypass conduit bypassing the process chamber, and The third flow path comprises the gas stick and the flow path for the second gas passing through the process chamber or the bypass conduit. Non-transient computer-readable storage media.
As a system, memory device; and It includes a processing device coupled to the memory device so as to be communicable, and The above processing device is: Enabling gas flow through the first flow path of the gas distribution system; While gas flow through the first flow path of the gas distribution system is enabled, first data including at least one of first pressure data or first flow rate data associated with the first flow path is received; Processing the first data to determine whether the first flow path of the gas distribution system includes a malfunction; In response to determining that the first flow path contains a malfunction, the relative location of the malfunction within the first flow path is determined with respect to at least one of the pressure sensor or flow sensor within the first flow path; and The purpose is to generate a report indicating whether the above-mentioned first flow path includes a malfunction and the relative location of any determined malfunction. System.
In Article 17, The above first flow path is: A gas stick comprising a first plurality of valves upstream of at least one pressure sensor or flow sensor and a second plurality of valves downstream of said at least one pressure sensor or flow sensor; A processing chamber fluidly coupled to the above gas stick; and A exhaust conduit fluidly coupled to the processing chamber and configured to exhaust gas flow from the gas distribution system, System.
In Article 17, The above processing device additionally: Making gas flow through the above-mentioned first flow path impossible; Enabling gas flow through the second flow path of the above gas distribution system; While gas flow through the second flow path of the gas distribution system is enabled, receiving second data including at least one of second pressure data or second flow rate data associated with the second flow path; Processing the second data to determine whether the second flow path of the gas distribution system contains a malfunction; and In response to determining that the second flow path contains a malfunction, the method is to determine the relative location of the malfunction within the second flow path with respect to at least one pressure sensor or flow sensor within the second flow path; The above report further indicates whether the second flow path includes a malfunction and the relative location of any determined malfunction of the second flow path, System.

Description

Systems and methods for detecting malfunctions in a gas distribution system [0001] The embodiments of the present disclosure generally relate to systems and methods for monitoring component integrity within a gas distribution system (GDS). [0002] Gas distribution systems used today are tools used to deliver, manage, and utilize gases and gas applications within modern manufacturing systems and manufacturing designs. These modern gas distribution systems (GDS) are systems and associated components that can be designed to handle both inert and toxic gases in numerous applications, such as purging, venting, or reaction applications, for process chambers or manufacturing spaces. For example, in some manufacturing applications, GDSs can be used to remove or dilute hazardous substances, maintain appropriate environmental conditions, deliver process gases (e.g., for etching, physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), etc.), or ensure that various processes are performed under controlled and stable pressure conditions. In other cases, GDSs may include features for using specialized vacuum systems for purging (e.g., purging oxygen to prevent unwanted oxidation reactions) and/or removing contaminants from the working environment. These features can be useful for maintaining product and process integrity and quality, and GDSs can facilitate this, while promoting safe practices, stability, and repeatability for these processes. [0003] Modern GDSs can include a wide range of components ranging from various types, functions, and methodologies for effectively distributing and exhausting gases. Common components found within a GDS (to name a few) may include gas panels, gas sources, gas stick assemblies, flow conduits, gas valves, flow regulators, mass flow controllers (MFCs), pressure transducers, and sensors, which are collectively used to deliver and manage gases to and from chambers and spaces in a controlled manner. In examples of combinations of some components, the gas source of the GDS may provide raw gas (e.g., toxic ammonia gas, inert nitrogen gas, or other similar gases) to pass through a gas stick assembly, which may include valves, sensors, and regulators for starting, pausing, decreasing, increasing, and otherwise controlling and measuring the flow and pressure of the gas through the assembly. [0004] Combinations of these components can be complex and may depend on the corresponding sophistication of the associated control mechanisms. Traditionally, once a gas distribution system is assembled, lengthy manual testing is performed to determine whether the gas distribution system is incorrectly assembled and/or if there are any malfunctions in the gas distribution system. Such manual testing is prone to errors and can consume a significant amount of the technician's time. [0005] The following is a brief summary of the present disclosure to provide a basic understanding of some aspects of the present disclosure. This summary is not an extensive overview of the present disclosure. It is not intended to identify any core or important elements of the present disclosure, nor to describe any scope of any specific implementations or claims of the present disclosure. Its sole purpose is to present some concepts of the present disclosure in a simple form as an introduction to the more detailed description that follows. [0006] In some embodiments of the present disclosure, a method for detecting a malfunction in a gas distribution system is provided. The method comprises the step of enabling gas flow through a first flow path of the gas distribution system by means of a controller. The method further comprises the step of receiving first data including at least one of first pressure data or first flow rate data associated with the first flow path while gas flow through the first flow path of the gas distribution system is enabled. The method further comprises the step of processing the first data to determine whether the first flow path of the gas distribution system contains a malfunction. The method further comprises the step of determining the relative location of the malfunction in the first flow path with respect to at least one of the pressure sensor or flow sensor in the first flow path in response to the determination that the first flow path contains a malfunction. The method further comprises the step of generating a report indicating whether the first flow path contains a malfunction and the relative location of any determined malfunction. [0007] In some embodiments of the present disclosure, a non-transient computer-readable storage medium is provided. The non-transient computer-readable storage medium includes instructions that cause the processing device to perform operations when executed by the processing device. The operations include an operation that enables gas flow through a first flow path of a gas distribution system by a controller. The operat