Search

KR-20260066441-A - GAS SENSOR AND MANUFACTURING METHOD OF THE SAME

KR20260066441AKR 20260066441 AKR20260066441 AKR 20260066441AKR-20260066441-A

Abstract

The present invention relates to a gas sensor and a method for manufacturing the same, comprising a substrate; an electrode layer provided on the substrate; and a sensing layer provided on the substrate and the electrode layer, wherein the sensing layer comprises a metal oxide, a nanoparticle, and a polymer compound having repeating units represented by a specific chemical formula. The gas sensor can be used under ambient temperature conditions and in a wide range of humidity environments, and can be utilized as a highly reliable non-invasive gas sensor capable of detecting ethanol at a concentration of 100 ppm or less.

Inventors

  • 이초연
  • 천승환

Assignees

  • 동우 화인켐 주식회사

Dates

Publication Date
20260512
Application Date
20241104

Claims (13)

  1. Substrate; An electrode layer provided on the above substrate; and It includes a sensing layer provided on the above substrate and electrode layer, and A gas sensor comprising a sensing layer including a metal oxide, nanoparticles, and a polymer compound having repeating units represented by the following chemical formula 1. [Chemical Formula 1] (In the above Chemical Formula 1, n is an integer from 1 to 200.)
  2. In claim 1, A gas sensor comprising one or more selected from the group consisting of tungsten oxide ( WO3 ), tin oxide ( SnO2 ), titanium oxide ( TiO2 ), copper oxide (CuO), nickel oxide (NiO), and cobalt oxide ( CO3O4 ).
  3. In claim 2, A gas sensor characterized in that the metal oxide is titanium oxide ( TiO2 ).
  4. In claim 1, A gas sensor comprising one or more nanoparticles selected from quantum dots, metal nanoparticles, magnetic nanoparticles, graphene, and carbon nanotubes.
  5. In claim 1, A gas sensor comprising a polymer compound having repeating units represented by the above chemical formula 1, in an amount of 0.01% to 10% by weight based on the total weight of the sensing layer.
  6. In claim 1, A gas sensor in which the metal oxide is included in an amount of 0.01% to 5% by weight relative to the total weight of the sensing layer.
  7. In claim 1, A gas sensor characterized by detecting ethanol gas.
  8. In claim 7, A gas sensor characterized by detecting ethanol gas having a concentration range of 0.1 to 100 ppm.
  9. In claim 1, A gas sensor characterized by being operable in a temperature range of 10℃ to 30℃.
  10. In claim 7, A gas sensor characterized by a reaction rate (%) calculated by the following Equation 1 being 0.5 or higher when detecting ethanol gas at a concentration of 80 ppm under conditions of temperature 23℃ and humidity 10% RH. [Equation 1] Reaction rate (%) = |R g -R a |/R a * 100 (In Equation 1 above, R g represents the reaction resistance value of ethanol, and R a represents the resistance value in the atmosphere.)
  11. In claim 1, A gas sensor in which the electrode layer is in the form of a vortex.
  12. Step of preparing the substrate; A step of forming an electrode layer on the above substrate; and The method includes the step of forming a sensing layer on a substrate on which the electrode layer is formed, and A method for manufacturing a gas sensor, wherein the sensing layer comprises a metal oxide, nanoparticles, and a polymer compound having repeating units represented by the following chemical formula 1. [Chemical Formula 1] (In the above Chemical Formula 1, n is an integer from 1 to 200.)
  13. A gas sensor manufactured by the method of manufacturing a gas sensor of claim 12.

Description

Gas Sensor and Manufacturing Method of the Same The present invention relates to a gas sensor for detecting ethanol gas and a method for manufacturing the same. Gas sensors are used throughout society; in industries, they enable the prevention of major accidents or human casualties by detecting hazardous gas leaks early through hazardous environment gas alarms, while in daily life, they are used as air pollution meters or indoor air quality monitors to provide a comfortable environment by monitoring the overall air quality of living spaces. Furthermore, with the recent increase in demand for personalized healthcare tailored to individuals, there is a growing need for gas sensors capable of detecting biomarker gases for rapid and accurate diagnosis. Gas sensors are classified according to their detection method into capacitive, optical, electrochemical, and semiconductor gas sensors; among these, research is actively being conducted on semiconductor gas sensors due to their ability to be miniaturized and their ease of manufacturing processes. Semiconductor gas sensors utilize metal oxides as the primary sensor material and track changes in resistance values resulting from interactions with the target gas, thereby selectively detecting specific gases. Korean Patent Publication No. 10-2012-0101938 discloses a gas sensor for detecting ammonia gas, but it has the problem that the operating temperature is very high at about 333℃, resulting in high power consumption and inability to operate at room temperature. Therefore, there is a need to develop highly reliable, non-invasive biosensors that can operate at room temperature and run on low power. FIG. 1 briefly illustrates a stacked structure of a gas sensor according to one embodiment of the present invention. FIG. 2 shows a plan view of a gas sensor according to one embodiment of the present invention. The present invention relates to a gas sensor capable of operating with low power even at room temperature and usable in a wide range of humidity environments, and a method for manufacturing the same. Specifically, the gas sensor according to the present invention comprises a substrate; an electrode layer provided on the substrate; and a sensing layer provided on the substrate and the electrode layer, wherein the sensing layer comprises a metal oxide, a nanoparticle, and a polymer compound having repeating units represented by a specific chemical formula, and can be used as a biosensor for detecting ethanol gas. The polymer compound having repeating units represented by Chemical Formula 1 used in the above-mentioned sensing layer is a material that is reactive to a target substance such as ethanol on its own, and in particular, its resistance decreases when ethanol is present, and it responds to ethanol even at room temperature. Similarly, semiconductor oxides such as titanium oxide ( TiO2 ) are also materials that are reactive to ethanol on their own, and they have the characteristic of responding to a target substance such as ethanol even at room temperature. Accordingly, the gas sensor of the present invention includes a polymer compound having repeating units represented by Chemical Formula 1 and a metal oxide that react at room temperature as a sensing layer, thereby improving the selective response characteristics of the sensing layer to ethanol gas and simultaneously improving the accuracy of the detection result at room temperature. Referring to FIG. 1, specifically, the present invention relates to a gas sensor comprising: a substrate; an electrode layer provided on the substrate; and a sensing layer provided on the substrate and the electrode layer, wherein the sensing layer comprises a metal oxide, a nanoparticle, and a polymer compound having repeating units represented by a specific chemical formula. Additionally, referring to FIG. 2, the electrode layer may be in the form of a vortex, but is not limited thereto as long as it is in a form that can increase the surface area of the reaction. The sample to be detected by the gas sensor of the present invention may be exhaled air expelled through the subject's nose and/or mouth. The substance to be detected included in the sample to be detected may include ethanol, and in particular, may be ethanol gas. The gas sensor according to the present invention may selectively detect ethanol from a gas mixture of ethanol and other types of gases. In addition, the gas sensor according to the present invention can be used as a gas detection system to selectively detect ethanol gas that may occur in industrial sites, thereby detecting the leakage of gases that pose a risk of explosion or are harmful to the human body at an early stage and preventing accidents that may occur in industrial sites. Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings. However, the following drawings attached to this specification are intended to illustrate preferred embodiments