KR-20260066518-A - CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND DEVICE FOR TREATMENT OF ULTRASOUND

KR20260066518AKR 20260066518 AKR20260066518 AKR 20260066518AKR-20260066518-A

Abstract

A capacitive micromachined ultrasonic transducer (CMUT) according to one embodiment of the present disclosure comprises a semiconductor substrate and a membrane disposed above the semiconductor substrate and configured to form a vacuum gap in at least a portion between the semiconductor substrate and the membrane, wherein the membrane comprises a plurality of groups configured such that at least one cell is electrically connected in series with each other, and the plurality of groups are electrically connected in parallel to a power source.

Inventors

김태균
신승우

Assignees

(주) 레지에나

Dates

Publication Date: 20260512
Application Date: 20241104

Claims (16)

In a capacitive micromachined ultrasonic transducer (CMUT), semiconductor substrate; and It includes a membrane disposed above the semiconductor substrate and configured to form a vacuum gap in at least a portion between it and the semiconductor substrate, The above membrane includes a plurality of groups configured such that at least one cell is electrically connected in series with each other, and the plurality of groups are electrically connected in parallel to a power source. Capacitive micromachined transducer.
In Article 1, The plurality of groups are each electrically connected to a fuse configured to respond actively or passively to overcurrent, Capacitive micromachined transducer.
In Article 1, The invention further comprises an insulating layer that is insulatingly coated to prevent a short circuit caused by contact between the membrane and the substrate in the vacuum gap. Capacitive micromachined transducer.
In Article 1, The above membrane comprises a plurality of elements divided into a distance range of a specified size around a preset focus, and The above plurality of elements are each connected to a plurality of channels configured to output ultrasound based on independent driving signals. Capacitive micromachined transducer.
In Article 1, The above membrane comprises a plurality of elements divided into a phase difference range of a specified size around a preset focus, and The above plurality of elements are each connected to a plurality of channels configured to output ultrasound based on independent driving signals. Capacitive micromachined transducer.
In an ultrasonic surgical device, A capacitive microprocessed transducer comprising a plurality of groups configured such that at least one cell is electrically connected in series with each other, and a membrane in which the plurality of groups are electrically connected in parallel to a power source; and An ultrasonic surgical device comprising a plurality of channels configured to output ultrasound from a plurality of elements included in the capacitive microprocessing transducer based on independent driving signals.
In Article 6, The above plurality of groups are each electrically connected to a fuse configured to respond actively or passively to overcurrent, and The plurality of channels are configured to output ultrasound from at least some of the plurality of elements based on whether there is an overcurrent in the plurality of groups, Ultrasonic surgical device.
In Article 6, The above membrane comprises a plurality of elements divided into a phase difference range of a specified size around a preset focus, and The above plurality of elements are each connected to the above plurality of channels, and The above plurality of groups is included in any one of the above plurality of elements, Ultrasonic surgical device.
In Article 8, The above at least one cell is configured to output ultrasound upward from the membrane, and In the above membrane, a through-hole extending backward to be electrically or signal-signally connected to the plurality of groups is formed for each of the plurality of groups, and The above through-hole is positioned at a location where the phase difference with at least one cell in the above plurality of groups is minimized. Ultrasonic surgical device.
In Article 8, One of the plurality of channels comprises a driver that outputs the driving signal, a detector configured to detect whether there is an overcurrent in the plurality of groups, and a controller configured to control the driving signal based on the detected overcurrent. The above controller is configured to adjust the weight of the driving signal based on the number of groups among the plurality of groups detected as overcurrent. Ultrasonic surgical device.
In Article 8, The plurality of elements comprises at least one group included in the plurality of groups, wherein the at least one cell having the same phase difference from the preset focus is grouped together. Ultrasonic surgical device.
In Article 6, The above membrane comprises a plurality of elements divided by a phase difference of a specified size around a preset focus, and The above plurality of elements are each connected to the above plurality of channels, Ultrasonic surgical device.
In Article 12, The above plurality of elements are arranged so that the phase difference is repeated in a plurality of ways with a 360-degree period, and The plurality of groups above are grouped together with at least one cell having the same period, Ultrasonic surgical device.
In Article 12, The above plurality of elements are arranged so that the phase difference is repeated in a plurality of ways with a 360-degree period, and The above plurality of groups are grouped for each of the above plurality of repeating elements, Ultrasonic surgical device.
In Article 12, The above plurality of elements are arranged so that the phase difference is repeated in a plurality of ways with a 360-degree period, and The plurality of groups are grouped such that for each of the plurality of elements that are repeated multiple times, the at least one cell having the same period is grouped together. Ultrasonic surgical device.
In Article 12, The plurality of groups are grouped together such that at least one cell having the same phase difference from the preset focus in the plurality of elements is grouped together. Ultrasonic surgical device.

Description

Capacitive Micromachined Transducer and Ultrasonic Treatment Device The present disclosure relates to a capacitive microprocessing transducer and an ultrasonic surgical device. Focused ultrasound therapy, utilizing high-intensity focused ultrasound (HIFU), is a procedure that burns away tissue by using the heat generated at the focal point when high-intensity ultrasound energy output through a capacitive micromachined ultrasonic transducer (CMUT) housed inside the treatment device is concentrated at a single spot. It is widely used not only for treating diseases but also for skin procedures that improve wrinkles by inducing skin regeneration. Focused ultrasound therapy stimulates the skin and induces regeneration by forming a focus within the epidermis of the patient, specifically in the dermis and subcutaneous tissue. It is known that this skin treatment is effective when the depth of the focus formed inward into the skin is varied, for example, to 1.5 mm, 3.0 mm, or 4.5 mm. FIG. 1a illustrates a membrane (M) of a capacitive micro-machined transducer according to the prior art. FIG. 1b is a diagram showing the configuration of cells (C) arranged on the membrane (M) of a capacitive micro-machined transducer according to the prior art. Referring to FIGS. 1a and 1b, a capacitive micro-processed transducer according to the prior art has a plurality of cells (C) connected in series to a power source (V) on a membrane (M). Accordingly, there was a problem in that if some of the multiple cells (C) of the membrane were defective or damaged, the entire membrane (M) would become inoperable. FIG. 1a illustrates a membrane of a capacitive micro-machined transducer according to the prior art. FIG. 1b is a diagram showing the configuration of cells arranged in the membrane of a capacitive microprocessed transducer according to the prior art. FIG. 2 is a configuration diagram of a capacitive micro-machined transducer according to one embodiment of the present disclosure. FIG. 3 is a diagram showing the configuration of a capacitive microprocessed transducer and a membrane according to one embodiment of the present disclosure. FIG. 4 is a diagram showing the configuration of a plurality of cells included in the membrane of a capacitive microprocessed transducer according to one embodiment of the present disclosure. FIG. 5 is a diagram showing the configuration of a membrane having a plurality of elements each connected to a plurality of channels according to one embodiment of the present disclosure. FIG. 6 is a configuration diagram illustrating an embodiment (Fresnel Method) in which a plurality of elements according to one embodiment of the present disclosure are divided into a distance range of a specified size around a preset focus. FIG. 7 is a diagram showing the configuration of a plurality of groups grouped according to a first embodiment of the present disclosure. FIG. 8 is a diagram showing the front view of a membrane according to one of the groups grouped according to the first embodiment of the present disclosure. FIG. 9 is a diagram showing the rear surface configuration of a membrane according to a plurality of groups grouped according to a first embodiment of the present disclosure. FIG. 10 is a diagram showing the configuration of a plurality of groups grouped according to a second embodiment of the present disclosure. FIG. 11 is a configuration diagram of one of a plurality of channels according to one embodiment of the present disclosure. FIG. 12 is a configuration diagram illustrating a phase-delay method according to one embodiment of the present disclosure, in which a plurality of elements are divided into a phase difference range of a specified size around a preset focus. FIG. 13 is a diagram showing the configuration of a plurality of groups grouped according to the seventh embodiment of the present disclosure. Embodiments of the present invention are described below with reference to the attached drawings to enable those skilled in the art to easily implement the invention. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. Furthermore, in order to clearly explain the present invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification are denoted by similar reference numerals. Throughout this specification, when a component is described as being located "on" another component, this includes not only cases where a component is in contact with another component, but also cases where another component exists between the two components. Throughout this specification, when a part is described as "comprising" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components. Throughout this specification, terms of degree such as “about,” “substantially,” etc., are used to mean