KR-20260066582-A - Copying Apparatus

KR20260066582AKR 20260066582 AKR20260066582 AKR 20260066582AKR-20260066582-A

Abstract

The present invention relates to a mimicry device, and more specifically, to a mimicry device that supports a material by mimicking the angle of a support surface parallel to the support surface of the material. The imitation device of the present invention has the advantage of enabling operations such as inspection, photography, processing, and light irradiation on a material by contacting the material with a surface adjusted to be parallel to the support surface of the target material, while allowing a path for external access to the support surface of the material.

Inventors

강성민
정미진

Assignees

주식회사 피앤엠

Dates

Publication Date: 20260512
Application Date: 20241212
Priority Date: 20241104

Claims (11)

A support member having a support body and a hollow portion formed to penetrate vertically in the central part of the support body; A lifting member having a cylindrical body portion and a through hole penetrating the center of the body portion along the longitudinal direction, and installed by being inserted into the hollow portion of the support member so as to be vertically movable; A porous floating member made of a porous material, having a concave portion formed by cutting out a part of a hemisphere and formed in a ring shape, arranged to surround the outer diameter of the lifting member, and installed in the hollow portion of the support member; A fixing member formed in a ring shape and positioned to face a concave portion of the lifting member, having a mimic curved surface with a shape corresponding to the curved surface of the concave portion on the surface in contact with the concave portion of the lifting member, and assembled coaxially with the lifting member so as to be fixed in close contact with the concave portion or in a free state according to the lifting movement of the lifting member; and A mimicry device comprising: a levitation channel formed by connecting to the support body of the support member up to the installation position of the levitation member so as to transmit gas pressure to the mimic curved surface of the fixed member through the levitation member.
In paragraph 1, It further includes a permanent magnet installed on the support member, positioned to face the fixed member with the above-mentioned injury member in between, and The above-mentioned fixed member is a mimicry device formed of a magnetic material.
In paragraph 2, The above-mentioned support member is a mimicry device formed of a non-magnetic material.
In paragraph 2, The above permanent magnet is a mimicry device formed in the shape of a ring.
In paragraph 2, The above-mentioned permanent magnets are provided in plurality and arranged along the circumferential direction of the above-mentioned levitation member in a mimicry device.
In any one of paragraphs 1 through 5, The lifting member further includes a piston portion formed to protrude in a ring shape from the outer diameter of the body portion, and The above support member further includes a cylinder portion formed to be recessed in a ring shape into the inner diameter of the hollow portion so as to accommodate the piston portion of the lifting member so as to be able to move up and down. A first fluid passage formed in the support member, connected to the space between one side of the piston portion and the cylinder portion so as to transmit gas pressure to the piston portion; and A mimicry device further comprising: a second passage formed in the support member, connected to the space between the other side of the piston portion and the cylinder portion so as to transmit gas pressure to the piston portion.
In paragraph 6, A first sealing ring disposed between the above-mentioned lifting member and the piston part and installed between the outer diameter of the body part of the lifting member and the inner diameter of the hollow part of the support member; and A mimicry device further comprising: a second sealing ring installed between the outer diameter of the piston portion and the inner diameter of the cylinder portion to seal the outer diameter of the piston portion and the inner diameter of the cylinder portion.
In Paragraph 7, A mimicry device further comprising: a third sealing ring positioned opposite to the first sealing ring with respect to the second sealing ring, installed between the inner diameter of the hollow portion of the support member and the outer diameter of the body portion of the lifting member.
In paragraph 6, The lifting member further includes a head portion formed to protrude radially from the outer diameter of the body portion, and The above fixed member further includes a catch portion, and the catch portion catches on the head portion so that the fixed member is in close contact with or free from the levitation member depending on the movement of the lifting member.
In Paragraph 9, The above-mentioned fixed member includes a first ring member and a second ring member formed in a ring shape, and The above-mentioned imitation curved surface is formed on the first ring member, and the above-mentioned catch is formed on the second ring member, and A mimicry device in which the first ring member is positioned between the second ring member and the levitating member so that when the lifting member descends, the catch portion catches on the head portion, allowing the second ring member to press the first ring member against the levitating member.
In Paragraph 9, The head portion of the above lifting member is formed in a conical shape with an outer diameter that increases toward the upper side, and A mimicry device in which the locking portion of the above-mentioned fixed member is formed as a curved surface corresponding to the outer diameter of the head portion to surround the head portion of the above-mentioned lifting member.

Description

Copying Apparatus The present invention relates to a mimicry device, and more specifically, to a mimicry device that supports a material by mimicking the angle of a support surface parallel to the support surface of the material. In devices for adsorbing or supporting materials such as semiconductor chips, printed circuit boards, and display panels, a device having the function of supporting the material by adjusting the support surface parallel to the support surface of the target material is widely used. Such a device is called a mimicry device or an air gyro. While it was sufficient for such a copying device to support the material by adjusting the position of the support member relative to the material's support surface to a parallel angle, recently, there has been a need to perform operations such as inspection, photography, and processing on the material's support surface depending on the characteristics of the material. In particular, when supporting a relatively small material such as a semiconductor chip with a copying device, conventional copying devices such as Patent Document 1 have a problem in that it is difficult to perform additional operations because the support surface (contact surface with the semiconductor chip) covers the entire upper surface of the semiconductor chip. Therefore, there was a need for a mimicry device with a structure that supports the material by adjusting the slope to match the slope of the material's support surface, while also securing a space to perform operations such as inspection, photography, and processing on a portion of that support surface. FIG. 1 is a perspective view of a mimicry device according to one embodiment of the present invention. Figure 2 is an exploded perspective view of the imitation device shown in Figure 1. FIG. 3 is a cross-sectional view taken along line III-III of the imitation device shown in FIG. 1. FIG. 4 is a cross-sectional view along line IV-VI of the imitation device shown in FIG. 1. FIG. 5 is a cross-sectional view along line III-III to explain the operation of the imitation device shown in FIG. 1. Figure 6 is a diagram illustrating an example of how to use the imitation device shown in Figure 1. Hereinafter, a mimicry device according to an embodiment of the present invention will be described with reference to the attached drawings. FIG. 1 is a perspective view of a mimicry device according to one embodiment of the present invention, FIG. 2 is an exploded perspective view of the mimicry device shown in FIG. 1, and FIG. 3 is a cross-sectional view taken along line III-III of the mimicry device shown in FIG. 1. Referring to FIGS. 1 to 3, the imitation device according to the present embodiment comprises a support member (100), a lifting member (200), a lifting member (300), a fixed member (400), and a lifting channel (510). The support member (100) comprises a support body (110) and a hollow portion (130). The support member (100) is a component that supports the overall components of the present embodiment. The support body (110) is formed in the shape of a rough cylinder, but is not limited to this shape and may be formed in a cuboidal structure or a hexagonal column shape. The hollow portion (130) is formed to penetrate the central part of the support body (110) vertically. The size of the inner diameter of the hollow portion (130) does not need to be formed uniformly. The support body (110) does not need to be formed as a single body, but may be composed by assembling two or more parts together. The lifting member (200) is configured to move up and down relative to the support member (100), and to press the fixing member (400), which will be described later, to fix it relative to the support member (100), or to allow the fixing member (400) to rise so that the fixing member (400) can move freely within a predetermined range. The lifting member (200) is formed by including a body portion (210) and a through hole (230). The body portion (210) is formed in the shape of an approximate cylinder. The through hole (230) is formed to penetrate the center of the body portion (210) in the vertical direction. Such a lifting member (200) is installed to be seated in the hollow portion (130) of the support member (100). The lifting member (200) is formed to be able to move up and down within an allowed range relative to the hollow portion (130) of the support member (100). The lifting member (200) installed in the hollow portion (130) of the support member (100) has a central portion that is empty due to the configuration of the through hole (230) of the lifting member (200). Therefore, it is possible for a separate device, such as an inspection device, to move through the through hole (230) of the lifting member (200), and it is also possible to irradiate light such as a laser beam. In addition, it is possible to photograph necessary parts of materials or products using a camera through the through hole (230). A head portion (211) is for