KR-20260066605-A - Ion Source Including an Integrated Adapter

KR20260066605AKR 20260066605 AKR20260066605 AKR 20260066605AKR-20260066605-A

Abstract

One embodiment may provide an ion source comprising: an output unit that generates and outputs ions by means of an electric field and a magnetic field, and a source body located on one side of the output unit that transmits a voltage for generating ions to the anode electrode of the output unit; wherein the output unit generates ions between the anode electrode and the cathode electrode using the voltage, and the output unit is connected to one port of a chamber and communicates with the internal space of the chamber in a vacuum state to utilize the atmosphere of the internal space of the chamber, and outputs the ions to the internal space of the chamber using the magnetic field, and includes an adapter unit comprising an extension structure communicating with a through hole formed in one port of the chamber and a connection structure integrally connected to the output unit located outside the chamber.

Inventors

최권영
이영섭
임영진

Assignees

주식회사 저스템

Dates

Publication Date: 20260512
Application Date: 20250527
Priority Date: 20241104

Claims (9)

An output unit comprising an anode electrode, a cathode electrode, and an output case, which generates and outputs ions by an electric field and a magnetic field; and A source body located on one side of the output unit and transmitting a voltage for generating ions to the anode electrode of the output unit; comprising The output unit generates ions between the anode electrode and the cathode electrode using the voltage, and the output unit is connected to one port of the chamber and communicates with the internal space of the chamber in a vacuum state, thereby utilizing the atmosphere of the internal space of the chamber, and outputs the ions to the internal space of the chamber using the magnetic field. An ion source comprising an integrated adapter including an adapter part comprising an extension structure communicating with a through hole formed in one port of the chamber and a connection structure integrally connected to the output part located outside the chamber.
In paragraph 1, The above chamber includes a service port for connecting to a utility and auxiliary device and a view port for visually observing the inside of the chamber, and the output part includes an integrated adapter connected to the service port or the view port.
In paragraph 1, An ion source comprising an integrated adapter, wherein the cathode electrode includes a central cathode electrode located at the center of an opening and an edge cathode electrode located at the edge of an opening, wherein the central cathode electrode is located at the inner center of a circular output case and the edge cathode electrode is located at the inner edge of the output case and is electrically connected to have the same potential.
In paragraph 1, An ion source comprising an integrated adapter, wherein the output portion further includes an opening that is open on the side facing the port, and the anode electrode is exposed toward the chamber through the opening.
In paragraph 1, An ion source comprising an integrated adapter that controls the straightness of the ions by adjusting the length of the extension structure.
In paragraph 1, The above extension structure is an ion source comprising an integrated adapter tilted in at least one of the upper, lower, left, and right directions.
In paragraph 1, The above ion source includes an integrated adapter in which the output direction is widened or narrowed by the extension structure, thereby controlling the output value.
In paragraph 1, The above extension structure is an ion source comprising an integrated adapter that further includes a baffle connecting structure to allow a baffle to be installed in the ion's movement path.
In paragraph 1, The above-described connecting structure is an ion source including an integrated adapter that is integrally connected to the above-described output section and is not separated.

Description

Ion Source Including an Integrated Adapter The present embodiment relates to an ion source comprising an integrated adapter that controls at least one of the output direction and output intensity of ions through an adapter integrally connected to the output portion of the ion source. Static electricity is generated by various causes, including friction and peeling. Such static electricity can occur in diverse environments, regardless of whether the material is a solid, liquid, insulator, or conductor. While the generated static electricity consists of equal amounts of positive and negative charges, in actual processes, static electricity of only one polarity often appears due to the difference in capacitance between the two. In the manufacturing process of electronic devices such as memory devices, flat panel displays, and integrated circuits, foreign substances may adhere to the electronic devices due to the generation of static electricity, or patterns may be damaged by electrostatic discharge. Various methods are being implemented to suppress or eliminate such static electricity generation, and methods to eliminate static electricity using ionization devices are mainly being proposed. Ionization devices generate positive and negative ions and release them into the air using a fan or compressed air, and the released ions neutralize the charged particles by providing ion particles opposite to the charged particles of the substrate where static electricity is generated, thereby eliminating static electricity. However, conventional ionization devices for electrostatic discharge release ions into the air in a non-vacuum environment, which presents a problem in that they are difficult to apply in vacuum environments where high cleanliness must be maintained. Conventional electrostatic discharge processes involve two steps: forming a thin film of an electronic device in a vacuum environment, and then removing static electricity through a separate discharge process in a non-vacuum environment. Conventional electrostatic discharge devices have limitations in preventing device damage caused by static electricity because the thin film process and the static discharge process are separated, making it impossible to immediately remove static electricity generated during thin film formation. In addition, conventional electrostatic discharge devices may cause damage to the substrate because they directly irradiate the substrate with ion particles and ion light generated during the ion generation process. Furthermore, according to conventional technology, the ion source and adapter are manufactured as separate components, which requires a large amount of space for assembling the ion source when mounted in the chamber, resulting in poor workability and the occurrence of numerous fluid leakage points, making efficient static elimination difficult. Figure 1 is a drawing showing a chamber that performs a specific process in a vacuum. FIG. 2 is a diagram showing an ion source coupled to a chamber according to one embodiment. FIGS. 3 and FIGS. 4 are drawings showing a side cross-section of an ion source according to one embodiment. FIG. 5 is a drawing showing a part of the upper surface of an ion source according to one embodiment. FIG. 6 is a diagram showing the installation location of an ion source according to one embodiment. Figure 7 is a diagram showing an ion source including an integrated adapter coupled to a chamber. Figure 8 is a drawing showing an ion source including a long integrated adapter with an extension structure coupled to a chamber. Figure 9 is a drawing showing an ion source including an integrated adapter in a tilted shape coupled to a chamber. FIG. 10 is a configuration diagram according to a first example of an ion source including an integrated adapter. FIG. 11 is a configuration diagram according to a second example of an ion source including an integrated adapter. Hereinafter, some embodiments of the present invention will be described in detail with reference to the exemplary drawings. It should be noted that in assigning reference numerals to the components of each drawing, the same components are given the same reference numeral whenever possible, even if they are shown in different drawings. Furthermore, in describing the present invention, if it is determined that a detailed description of related known components or functions could obscure the essence of the invention, such detailed description is omitted. In addition, terms such as first, second, A, B, (a), (b), etc., may be used when describing the components of the present invention. These terms are intended only to distinguish the components from other components, and the essence, order, or sequence of the components is not limited by the terms. Where it is stated that a component is "connected," "combined," or "connected" to another component, it should be understood that the component may be directly connected or connected to the other c