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KR-20260066652-A - Method and apparatus for transporting an optical device, gripper for handling an optical device

KR20260066652AKR 20260066652 AKR20260066652 AKR 20260066652AKR-20260066652-A

Abstract

A method for transporting an optical device (350) is provided. The method includes the step of holding the optical device (350) using a gripper (300) having a non-contact suspension system (310), wherein the optical device (350) has two main surfaces, such as a first main surface (352) and a second main surface (354). The step of holding the optical device (350) includes the step of providing the optical device (350) at an angle of inclination (320) using the non-contact suspension system (310). The method includes the step of moving the gripper (300) from a first position (412) to a second position (424) to transport the optical device (350) in an inclined orientation. The movement from the first position (412) to the second position (424) includes an acceleration phase (410) and a deceleration phase (420). The method includes the step of controlling a non-contact suspension system (310) for at least part of a movement from a first position (412) to a second position (424) to control a first non-contact force acting on an optical device (350). The first non-contact force is set to a first value during at least part of the acceleration phase (410) and to a second value during at least part of the deceleration phase (420), the second value being different from the first value.

Inventors

  • 콜라, 다비데

Assignees

  • 어플라이드 머티어리얼스, 인코포레이티드

Dates

Publication Date
20260512
Application Date
20230908

Claims (15)

  1. As a method for transporting an optical device (350), A step of holding the optical device using a gripper (300) having a contactless suspension system (310) - the optical device has two main surfaces (352, 354), and the holding step includes a step of providing the optical device at an angle of inclination (320) using the contactless suspension system -; A step of moving the gripper from a first position (412) to a second position (424) to transport the optical device in an inclined orientation - the movement from the first position to the second position includes an acceleration phase (410) and a deceleration phase (420) -; and A step of controlling the non-contact suspension system for at least a portion of the movement from the first position to the second position to control the first non-contact force acting on the optical device—the first non-contact force is set to a first value during at least a portion of the acceleration phase and to a second value during at least a portion of the deceleration phase, wherein the second value is different from the first value. A method including
  2. A method according to claim 1, wherein the optical device is a waveguide (10, 10a-c) comprising a substrate (110) and a plurality of optical structures (122) formed on the substrate.
  3. A method according to claim 1 or 2, wherein the optical device is transported by the gripper without contact with the two main surfaces of the optical device.
  4. A method according to any one of claims 1 to 3, wherein during at least part of the movement of the gripper from the first position to the second position, the inclination of the optical device defined from the rear edge of the optical device to the front edge of the optical device is an upward inclination.
  5. In any one of paragraphs 1 through 4, The first non-contact force is a non-contact repulsive force, and the first value of the first non-contact force is greater than the second value of the first non-contact force; A method in which the first non-contact force is a non-contact attractive force, and the first value of the first non-contact force is smaller than the second value of the first non-contact force.
  6. In paragraph 5, the above-mentioned non-contact suspension system is: An ultrasonic vibration generator (514, 512) providing the above non-contact repulsive force; and The suction circuit (520) providing the above non-contact manpower A method comprising at least one of the following.
  7. In any one of paragraphs 1 through 6, A method further comprising the step of measuring the position of the optical device while the gripper is moved from the first position to the second position, wherein the first non-contact force is controlled based on the measured position of the optical device, and in particular, the position of the optical device is measured using a sensor (530) which is part of the gripper.
  8. A method according to any one of claims 1 to 7, wherein the optical device has a side surface (356) between the two main surfaces, and the step of holding the optical device further comprises the step of supporting the side surface by one or more side supports (550) of the gripper while the optical device is provided at the angle of inclination.
  9. In claim 8, the gravitational force acting on the optical device provided at the angle of inclination causes the side surface of the optical device to be supported by the one or more side supports.
  10. In any one of paragraphs 1 through 9, Before performing movement from the first position to the second position, a step of providing the optical device at a first inclination angle (710) using the non-contact suspension system; and A step of changing the orientation of the optical device from the first inclination angle to the second inclination angle (810) - the second inclination angle is greater than the first inclination angle, and the optical device is provided at the second inclination angle for at least part of the movement from the first position to the second position - A method that additionally includes
  11. As a method for transporting an optical device (350), A step of holding the optical device using a gripper (300) having a non-contact suspension system (310) - the holding step includes a step of providing the optical device at an inclination angle (320) using the non-contact suspension system -; A step of moving the gripper from a first position (412) to a second position (424) to transfer the optical device in an inclined orientation; A step of measuring the position of the optical device while the gripper is moved from the first position to the second position; and A step of controlling the non-contact suspension system during at least a portion of the movement of the gripper from the first position to the second position based on the measured position of the optical device. A method including
  12. As a device (500) for transporting an optical device (350), A gripper (300) comprising a non-contact suspension system (310) arranged to provide the optical device at an inclination angle (320); and Controller connected to the above non-contact suspension system A device comprising, wherein the controller is configured to control the non-contact suspension system for at least a portion of the movement of the gripper from a first position (412) to a second position (424) to control a first non-contact force acting on the optical device, the first non-contact force is set to a first value during at least a portion of the acceleration phase (410) of the movement from the first position to the second position and is set to a second value during at least a portion of the deceleration phase (420) of the movement, the second value being different from the first value.
  13. In Clause 12, the above-mentioned non-contact suspension system is: Ultrasonic vibration generator (512, 514); and suction circuit (520) A device comprising at least one of the following.
  14. A device according to claim 12 or 13, wherein the gripper comprises a sensor (530) for measuring the position of the optical device.
  15. As a gripper (300) for handling an optical device (350), A tilted or tiltable non-contact suspension system (310); One or more side supports (550) positioned adjacent to the optical device receiving area of the gripper; and Position sensor (530) facing the optical device receiving area A gripper including

Description

Method and apparatus for transporting an optical device, gripper for handling an optical device The embodiments described herein relate to devices and methods for transporting optical devices. The embodiments described herein relate specifically to grippers for transporting optical devices, and more specifically to optical devices for augmented reality applications, e.g., waveguide combiners. Virtual reality is generally considered to be a computer-generated simulation environment that appears to the user as if there were a physical presence. Virtual reality experiences can be created in 3D and can be displayed using a head-mounted display (HMD), for example, glasses or other wearable display devices having near-eye display panels as lenses to display a virtual reality environment that replaces the real environment. However, augmented reality enables an experience where users can view images of virtual objects generated for the display and appearing as part of the environment, while still looking through the display lenses of glasses or other HMD devices to see their surroundings. Augmented reality can include any type of input, such as audio and haptic input, as well as virtual images, graphics, and videos that enhance or augment the environment experienced by the user. As an emerging technology, augmented reality entails many challenges and design constraints. Optical couplers may be used to allow computer-generated virtual images to be combined with real-world images of the environment to provide an augmented reality experience. Such optical couplers may include waveguides comprising a substrate having multiple optical structures formed thereon. Since the optical structures are small (e.g., nanoscale) and fragile, easily damaged or contaminated, handling the waveguides can be a challenge. For instance, high-speed automated processing of waveguides can be difficult and thus affects the overall production rate in the manufacturing of display devices for augmented reality applications. Considering the above, improved systems and methods are needed to handle optical devices, such as waveguides, for augmented reality applications. According to an embodiment, a method for transporting an optical device is provided. The method comprises the step of holding the optical device using a gripper having a contactless suspension system, wherein the optical device has two main surfaces. The holding step comprises the step of providing the optical device at an angle of inclination using the contactless suspension system. The method comprises the step of moving the gripper from a first position to a second position to transport the optical device in an inclined orientation, wherein the movement from the first position to the second position includes an acceleration phase and a deceleration phase. The method comprises the step of controlling the contactless suspension system during at least a portion of the movement from the first position to the second position to control a first contactless force acting on the optical device, wherein the first contactless force is set to a first value during at least a portion of the acceleration phase and to a second value during at least a portion of the deceleration phase, and the second value is different from the first value. According to additional embodiments, a method for transporting an optical device is provided. The method comprises the step of holding the optical device using a gripper having a non-contact suspension system, and the holding step comprises the step of providing the optical device at an angle of inclination using the non-contact suspension system. The method comprises the step of moving the gripper from a first position to a second position to transport the optical device in an inclined orientation. The method comprises the step of measuring the position of the optical device while the gripper is moving from the first position to the second position. The method comprises the step of controlling the non-contact suspension system for at least a portion of the movement of the gripper from the first position to the second position based on the measured position of the optical device. According to additional embodiments, a device for transporting an optical device is provided. The device includes a gripper comprising a non-contact suspension system arranged to provide the optical device at an angle of inclination. The device includes a controller connected to the non-contact suspension system. The controller is configured to control the non-contact suspension system during at least a portion of the movement of the gripper from a first position to a second position to control a first non-contact force acting on the optical device. The first non-contact force is set to a first value during at least a portion of the acceleration phase of the movement from the first position to the second position and to a second value during at least a portion of the deceleration phas