KR-20260066656-A - Superconducting magnet device

Abstract

A superconducting magnet device (10) comprises an inner wall (12a) disposed radially outside of the bore (18) to surround the bore (18), and an outer wall (12b) disposed radially outside of the inner wall (12a) to surround the inner wall (12a); a cryostat (12) that provides a vacuum environment in an internal space (14) defined between the inner wall (12a) and the outer wall (12b); a pair of saddle-shaped superconducting coils (20) facing each other with the bore (18) in between, each disposed in the internal space (14) so as to be exposed to a vacuum environment; and a device disposed radially outside of the pair of saddle-shaped superconducting coils (20) in the internal space (14) and supporting the pair of saddle-shaped superconducting coils (20). A support frame (30) is provided.

Inventors

• 하시모토 아츠시
• 요시다 준

Assignees

• 스미도모쥬기가이고교 가부시키가이샤

Dates

Publication Date

20260512

Application Date

20240902

Priority Date

20230921

Claims (10)

1. A cryostat having an inner wall disposed radially outside of the bore to surround the bore, and an outer wall disposed radially outside of the inner wall to surround the inner wall, and providing a vacuum environment in an internal space defined between the inner wall and the outer wall; A pair of saddle-shaped superconducting coils facing each other with the above bore in between, wherein each is disposed in the internal space such that it is exposed to the vacuum environment, and A superconducting magnet device characterized by having a support frame that supports the pair of saddle-shaped superconducting coils, which is positioned on the radial outer side of the pair of saddle-shaped superconducting coils in the internal space.
2. In paragraph 1, A superconducting magnet device characterized in that the above pair of saddle-shaped superconducting coils are arranged in the internal space within a range of 1.05 to 1.32 times the diameter of the bore.
3. In paragraph 1, The above pair of saddle-shaped superconducting coils are concavely curved toward the bore, and A superconducting magnet device characterized in that the support frame comprises a pair of coil mounts having a curved shape based on the curvature of the saddle-shaped superconducting coil, and a pair of straight connecting beams connecting the pair of coil mounts.
4. In paragraph 3, A superconducting magnet device characterized in that the above pair of straight connecting beams have a smaller vertical dimension compared to the above pair of coil mounts.
5. In paragraph 3, A superconducting magnet device characterized in that the above-mentioned pair of linear connecting beams are arranged within the internal space within a range of 1.05 to 1.32 times the diameter of the bore.
6. In any one of paragraphs 1 through 5, Further comprising a horizontal load support member that supports the above support frame in a horizontal direction, A superconducting magnet device characterized in that the support frame has a concave portion formed radially inward from the outer surface of the support frame, and is supported by the horizontal load support body at the concave portion.
7. In any one of paragraphs 1 through 5, Further comprising a vertical load support member that supports the above support frame in the vertical direction, A superconducting magnet device characterized in that the support frame has a rib formed radially outward from the outer surface of the support frame, and is supported by the vertical load support body at the rib.
8. In any one of paragraphs 1 through 5, A superconducting magnet device characterized by further comprising a first support mounted on the support frame to press the saddle-shaped superconducting coil toward the radial outer side of the support frame.
9. In any one of paragraphs 1 through 5, Each saddle-shaped superconducting coil comprises a first coil cross-section facing outward in the radial direction, a second coil cross-section facing inward in the radial direction, and two coil sides connecting the first coil cross-section and the second coil cross-section. A superconducting magnet device characterized by further comprising a second support mounted on the support frame to insert the saddle-shaped superconducting coil on the sides of the two coils.
10. In any one of paragraphs 1 through 5, The above cryostat is equipped with a pair of cryogenic refrigerators that cool the pair of saddle-type superconducting coils, and One of the above pair of cryogenic refrigerators is installed on the cryostat on one side with respect to the bore, between the pair of saddle-shaped superconducting coils in the circumferential direction of the cryostat, and A superconducting magnet device characterized in that the other end of the pair of cryogenic refrigerators is located between the pair of saddle-shaped superconducting coils in the circumferential direction of the cryostat and is installed on the cryostat on the opposite side with respect to the bore.

Description

Superconducting magnet device The present invention relates to a superconducting magnet device. Superconducting magnet devices are used as a magnetic field source for single crystal pulling devices using the MCZ (Magnetic field applied Czochralski) method. A single crystal pulling device generally comprises a single crystal pulling furnace and a cryostat arranged to surround it and containing a plurality of superconducting coils. Saddle-shaped coils or ring-shaped coils are typically used for the superconducting coils. The strong magnetic field generated by the superconducting coils can suppress thermal convection in the molten liquid inside the pulling furnace. FIG. 1 is a cross-sectional view schematically showing a single crystal impression device equipped with a superconducting magnet device according to an embodiment. FIG. 2 is a cross-sectional view schematically showing a single crystal impression device equipped with a superconducting magnet device according to an embodiment. FIG. 3 is a perspective view schematically showing the external appearance of a superconducting magnet device with respect to an embodiment. FIG. 4 is a perspective view schematically showing the arrangement of superconducting coils in a superconducting magnet device with respect to an embodiment. FIG. 5 is a cross-sectional view schematically showing a superconducting magnet device with respect to an embodiment. FIG. 6 is a schematic diagram showing a part of the unfolded view of a saddle-shaped superconducting coil and a support frame viewed from the inner side in the radial direction with respect to an embodiment. FIG. 7 is a front view schematically showing a support frame viewed from the outer side in the radial direction with respect to an embodiment. FIG. 8 is a perspective view schematically showing another example of a superconducting coil arrangement in a superconducting magnet device with respect to an embodiment. Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In the description and drawings, identical or equivalent components, parts, and processes are given the same reference numerals, and redundant descriptions are appropriately omitted. The scale and shape of each part illustrated are set for convenience to facilitate explanation and are not to be interpreted restrictively unless specifically stated otherwise. The embodiments are examples and do not in any way limit the scope of the present invention. All features or combinations thereof described in the embodiments are not necessarily limited to the essential nature of the invention. FIGS. 1 and 2 are cross-sectional views schematically showing a single crystal impression device (100) equipped with a superconducting magnet device (10) with respect to an embodiment. FIG. 3 is a perspective view schematically showing the external appearance of the superconducting magnet device (10) with respect to an embodiment. FIG. 4 is a perspective view schematically showing the arrangement of superconducting coils in the superconducting magnet device (10) with respect to an embodiment. FIG. 5 is a cross-sectional view schematically showing the superconducting magnet device (10) with respect to an embodiment. FIG. 1 shows the cross-section along line B-B of FIG. 2, and FIG. 2 shows the cross-section along line A-A of FIG. 1. Also, FIG. 5 shows the cross-section along line C-C of FIG. 3. The single crystal pulling device (100) is equipped with a single crystal pulling furnace (102) and a superconducting magnet device (10). The single crystal pulling device (100) is, for example, a silicon single crystal pulling device by the HMCZ (Horizontal-MCZ; horizontal magnetic field type MCZ) method. As shown in FIG. 1, the single crystal drawing furnace (102) is equipped with a crucible (104), a single crystal drawing mechanism (106), and a heater (108). The crucible (104) is a container for storing molten material (e.g., molten silicon) and is formed of, for example, quartz. The single crystal lifting mechanism (106) is a driving device that lifts a single crystal (110) upward along a single crystal lifting axis (112) from a molten material in a crucible (104), and is equipped with a lifting driving source positioned above and outside the single crystal lifting furnace (102). The single crystal lifting axis (112) is an axis extending in a vertical direction (i.e., a direction perpendicular to the horizontal plane). The single crystal lifting mechanism (106) is configured to lift the single crystal (110) while rotating the single crystal (110) around the single crystal lifting axis (112). A heater (108) is placed around a crucible (104) within a single crystal forming furnace (102) to heat the crucible (104). By heating with the heater (108), the molten material inside the crucible (104) is maintained in a molten state. The superconducting magnet device (10) is equipped with a cryostat (12), a pair of saddle-shap