KR-20260066803-A - Capillary exchange mechanism and wire bonding device

KR20260066803AKR 20260066803 AKR20260066803 AKR 20260066803AKR-20260066803-A

Abstract

The capillary exchange unit comprises a supply module that moves a replacement capillary from a capillary receiving portion to a capillary supply port along the supply direction; a replacement module that performs the operation of extracting a replacement capillary from the capillary supply port by moving a replacement capillary located at the capillary supply port along an axis and the operation of moving the extracted replacement capillary along an axis; and a return module that performs the operation of receiving the replacement capillary moved by the moving operation of the replacement module and the return operation of moving the received replacement capillary linearly by a predetermined distance and rotating it by a predetermined angle.

Inventors

우치다 요헤이

Assignees

야마하 로보틱스 가부시키가이샤

Dates

Publication Date: 20260512
Application Date: 20241113
Priority Date: 20231115

Claims (10)

A receiving portion for receiving a plurality of replacement capillaries in a supply direction orthogonal to the axis of the replacement capillaries, and a supply module for moving the replacement capillaries from the receiving portion to the capillary supply port along the supply direction, having a capillary supply port for extracting the replacement capillaries. A replacement module having a moving member that moves relative to the receiving portion while maintaining the above-mentioned replacement capillary, and performing the operation of extracting the above-mentioned replacement capillary from the capillary supply port by means of the moving member that moves along the axis relative to the receiving portion, and the operation of moving the above-mentioned replacement capillary extracted by the extraction operation along the axis by means of the moving member; The device is equipped with a conveying module that performs the operation of receiving the replacement capillary moved by the moving operation of the replacement module, and the conveying operation of moving the received replacement capillary in a straight line by a predetermined distance and rotating it by a predetermined angle. The above return module moves the used capillary from the first position to the second position, and The above-mentioned moving member is a capillary exchange mechanism that removes the used capillary located at the second position from the return module by moving along the above-mentioned axis.
In paragraph 1, A first reference line overlapping the axis of a used capillary maintained in a horn and a second reference line orthogonal to the first reference line are defined, and The above return module is arranged to include the intersection of the first reference line and the second reference line, and The above replacement module is a capillary exchange mechanism positioned adjacent to the return module along the direction of the second reference line.
In paragraph 1, A first reference line overlapping the axis of a used capillary maintained in a horn, and a second reference line orthogonal to the first reference line are defined, and The above return module is arranged to include the intersection of the first reference line and the second reference line, and The above supply module is a capillary exchange mechanism positioned adjacent to the above return module along the direction of the above second reference line.
In paragraph 1, A first reference line overlapping the axis of a used capillary maintained in a horn, a second reference line orthogonal to the first reference line, and a third reference line parallel to the first reference line and spaced apart from the first reference line in the direction of the second reference line are defined, and The above replacement module is positioned to include the intersection of the second reference line and the third reference line, and The supply module is a capillary exchange mechanism positioned adjacent to the replacement module along the direction of the third reference line above the third reference line.
In paragraph 1, A first reference line overlapping the axis of a used capillary maintained in a horn, a second reference line orthogonal to the first reference line, and a third reference line parallel to the first reference line and spaced apart from the first reference line in the direction of the second reference line are defined, and The above return module is arranged to include the intersection of the first reference line and the second reference line, and The above replacement module is positioned to include the intersection of the second reference line and the third reference line, and The supply module is a capillary exchange mechanism positioned adjacent to the replacement module along the direction of the third reference line above the third reference line.
In paragraph 1, A first reference line is defined that overlaps the axis of the used capillary maintained in the horn, and The above-mentioned return module is positioned to overlap with the above-mentioned first reference line, and A capillary exchange mechanism in which the replacement module overlaps with the first reference line and is positioned adjacent to the return module along the direction of the first reference line.
In paragraph 1, A first reference line overlapping the axis of a used capillary maintained in a horn, and a second reference line orthogonal to the first reference line are defined, and The above-mentioned return module is positioned to overlap the first reference line but not to include the intersection point between the first reference line and the second reference line, and The above supply module is a capillary exchange mechanism positioned to overlap with the above second reference line.
In paragraph 1, A first reference line overlapping the axis of a used capillary maintained in a horn and a second reference line orthogonal to the first reference line are defined, and The above replacement module is arranged to include the intersection of the first reference line and the second reference line, and The above supply module is a capillary exchange mechanism positioned to overlap with the above second reference line.
In paragraph 1, A first reference line overlapping the axis of a used capillary maintained in a horn, and a second reference line orthogonal to the first reference line are defined, and The above-mentioned return module is positioned to overlap the first reference line but not to include the intersection point between the first reference line and the second reference line, and The above replacement module is arranged to include the intersection of the first reference line and the second reference line, and The above supply module is a capillary exchange mechanism positioned to overlap with the above second reference line.
soul and, A capillary detachably attached to the above horn, and It is equipped with a capillary exchange mechanism for replacing the above-mentioned used capillary with a replacement capillary, The above capillary exchange mechanism is, A receiving portion for receiving a plurality of replacement capillaries in a supply direction orthogonal to the axis of the replacement capillaries, and a supply module for moving the replacement capillaries from the receiving portion to the capillary supply port along the supply direction, having a capillary supply port for extracting the replacement capillaries. A replacement module having a moving member that moves relative to the receiving portion while maintaining the above-mentioned replacement capillary, and performing the operation of extracting the above-mentioned replacement capillary from the capillary supply port by means of the moving member that moves along the axis relative to the receiving portion, and the operation of moving the above-mentioned replacement capillary extracted by the extraction operation along the axis by means of the moving member; The device is equipped with a conveying module that performs the operation of receiving the replacement capillary moved by the moving operation of the replacement module, and the conveying operation of moving the received replacement capillary in a straight line by a predetermined distance and rotating it by a predetermined angle. The above return module moves the used capillary from the first position to the second position, and The above-mentioned moving member is a wire bonding device that removes the used capillary located at the second position from the return module by moving along the above-mentioned axis.

Description

Capillary exchange mechanism and wire bonding device The present invention relates to a capillary exchange mechanism and a wire bonding device. A wire bonding device electrically connects a lead frame to the electrodes of a semiconductor chip using a wire. The wire is pressed against the electrodes of the semiconductor chip by a component called a capillary, and simultaneously, heat or ultrasound is applied as needed. As a result, the wire is bonded to the electrodes of the semiconductor chip. This bonding operation is called bonding. If bonding is repeated, it becomes difficult to obtain the desired bonding result due to reasons such as wear on the tip of the capillary. Therefore, the capillary is replaced whenever replacement conditions, set based on the number of bonding cycles, are satisfied. Patent documents 1 to 3 each disclose technology related to wire bonding. Patent document 1 discloses an apparatus and method capable of performing bonding continuously while exchanging a capillary, which is a bonding tool. Patent document 2 discloses an apparatus and method for accurately detecting the position of a capillary. Patent document 3 discloses a method for more effectively suppressing wire slippage and wire bending. FIG. 1 is a perspective view showing the configuration of a wire bonding device of an embodiment. Figure 2 is a plan view showing an enlarged view of the tip of the ultrasonic horn. FIGS. 3(a), FIGS. 3(b), FIGS. 3(c) and FIGS. 3(d) are plan views illustrating the operation of removing the capillary. FIGS. 4(a), FIGS. 4(b), FIGS. 4(c), FIGS. 4(d) and FIGS. 4(e) are drawings for explaining the wire feeding operation performed by a wire bonding device. FIGS. 5(a), FIGS. 5(b), FIGS. 5(c), FIGS. 5(d) and FIGS. 5(e) are drawings for explaining the wire feeding operation performed by a wire bonding device. Figure 6 is a diagram illustrating the imaging operation performed by a wire bonding device. Figure 7 is a diagram schematically showing the configuration of a capillary exchange unit. Figure 8 is a diagram showing the arrangement of the return module, replacement module, and supply module. FIGS. 9(a), FIGS. 9(b), FIGS. 9(c) and FIGS. 9(d) are drawings for explaining the first return operation performed by the capillary exchange unit. FIGS. 10(a), FIGS. 10(b), FIGS. 10(c) and FIGS. 10(d) are drawings for explaining a second return operation performed by a capillary exchange unit. FIGS. 11(a) and FIGS. 11(b) are drawings for explaining the extraction operation performed by the capillary exchange unit. FIGS. 12(a), FIGS. 12(b), FIGS. 12(c) and FIGS. 12(d) are drawings for explaining the replacement operation performed by the capillary exchange unit. FIG. 13 is a functional block diagram of a controller equipped with a wire bonding device of an embodiment. FIG. 14 is a flowchart showing the main process of a method for replacing a capillary of an embodiment. FIG. 15 is a flowchart showing in detail the process of preparing for automatic capillary exchange in FIG. 14. FIG. 16(a) is a diagram showing the operation of moving the capillary onto the discard bonding stage. FIG. 16(b) is a diagram showing the operation of advancing the sub-base toward the capillary exchange unit. FIG. 16(c) is a diagram showing the operation of retracting the sub-base. FIG. 17 is a flowchart showing in detail the process of performing automatic capillary exchange in FIG. 14. FIGS. 18(a), FIGS. 18(b), FIGS. 18(c) and FIGS. 18(d) are drawings illustrating the process of performing automatic capillary exchange, from the operation of advancing the sub-base to the operation of moving the return carriage to the exchange position. FIGS. 19(a), FIGS. 19(b), FIGS. 19(c) and FIGS. 19(d) are drawings illustrating the process of performing automatic capillary exchange, from the operation of rotating the release pin to the operation of moving the replacement table in the insertion direction. FIGS. 20(a), FIGS. 20(b), FIGS. 20(c) and FIGS. 20(d) are drawings illustrating the process of performing automatic capillary exchange, from lowering the return carriage to a predetermined position to retracting the sub-base. FIG. 21 is a flowchart showing in detail the process of preparing the bonding in FIG. 14. FIG. 22 is a drawing showing the arrangement of the return module, replacement module, and supply module in the capillary exchange unit of Variant Example 1. FIG. 23 is a drawing showing the arrangement of the return module, replacement module, and supply module in the capillary exchange unit of Variant Example 2. (Form for carrying out the invention) Hereinafter, embodiments for implementing the present invention will be described in detail with reference to the attached drawings. In the description of the drawings, the same reference numerals are used for identical elements, and redundant descriptions are omitted. FIG. 1 is a perspective view showing a wire bonding device that is an embodiment of the present invention. The wire bonding