KR-20260066947-A - Fastening apparatus and and automatic system for replacement of parts including the same

KR20260066947AKR 20260066947 AKR20260066947 AKR 20260066947AKR-20260066947-A

Abstract

The present invention provides a fastening device and an automated parts replacement system including the same, which includes a vacuum adapter for a pick-and-place method and allows for integrated replacement of the vacuum adapter and the bit. The fastening device comprises: a power tool unit that provides power for fastening or unfastening a fastening part; a bit holder unit fixed to the end of the power tool unit; a second vacuum adapter unit that houses a bit for adsorbing the fastening part; and a first vacuum adapter unit that is coupled to the power tool unit and the second vacuum adapter unit, respectively, and provides a pneumatic fitting for connecting the bit holder unit and the bit. The second vacuum adapter unit is provided to be detachable, and the second vacuum adapter unit and the bit are integratedly replaced depending on the type of fastening part.

Inventors

김동현
박정준
김평강

Assignees

삼성전자주식회사

Dates

Publication Date: 20260512
Application Date: 20241105

Claims (10)

A power tool unit that provides power for fastening or unfastening a fastening component; A bit holder portion fixed to the end of the above-mentioned power tool portion; A second vacuum adapter part containing a bit that adsorbs the above-mentioned fastening part; and It includes a first vacuum adapter part that is coupled to the power tool part and the second vacuum adapter part, respectively, and provides a pneumatic fitting for connecting the bit holder part and the bit. The second vacuum adapter part is provided to be detachable, and The above second vacuum adapter part and the bit are a fastening device that is integrally replaced according to the type of fastening part.
In Article 1, The second vacuum adapter part includes a first ball lock pin for coupling with the first vacuum adapter part, and The above-mentioned first ball lock pin is, A main body including an internal space; A push button movably inserted into the above internal space; A second elastic body that surrounds the portion of the push button exposed to the outside of the main body and provides mobility of the push button in the internal space; and A fastening device comprising a ball that moves between a groove formed on the surface of the above-mentioned push button and a groove formed inside the above-mentioned main body.
In Article 2, A fastening device in which the ball is inserted into the groove of the push button when the push button is pressed, and inserted into the groove of the main body when the push button is released.
In Article 2, The first vacuum adapter part is a fastening device comprising a first pin insertion bushing into which the first ball lock pin is inserted.
In Article 1, The second vacuum adapter part is a fastening device comprising a bit stopper that limits the movement range of the bit inside.
A fastening device for fastening or unfastening fastening parts; A support frame portion supporting a first holder and a second holder; and It includes a robot arm that moves the above-mentioned fastening device, The above fastening device is, A power tool unit that provides power for the above-mentioned fastening or the above-mentioned release; A bit holder portion fixed to the end of the above-mentioned power tool portion; and It includes a first vacuum adapter part that is coupled to the above-mentioned power tool part and provides a pneumatic fitting for bit-to-bit bonding that adsorbs the bit holder part and the fastening part, and The above-mentioned first holder mounts a vacuum adapter a that incorporates a first bit, and The above second holder mounts a b-vacuum adapter containing a second bit that handles a fastening part of a different type from the first bit, and The above-mentioned vacuum adapter a and vacuum adapter b are a component replacement automation system that selectively combines with the fastening device according to the type of fastening part.
In Article 6, The first holder above is, Link attachment plate; A lower link installed on the above link attachment plate and supporting the a-th vacuum adapter; and It includes an upper link positioned above the lower link, and The above-mentioned vacuum adapter a includes a wing protruding laterally, and The above wing is a component replacement automation system that is seated and supported on the inclined surface of the above upper link.
In Article 7, A parts replacement automation system further comprising a ball plunger installed on the inclined surface of the upper link and fixing the mounting position of the vacuum adapter a.
In Article 7, The above vacuum adapter a moves along the longitudinal direction of the lower link and escapes to the outside, A parts replacement automation system in which a guide is installed on the surface of the lower link to reduce friction with the vacuum adapter a.
In Article 6, A first optical sensor for sensing the a-th vacuum adapter mounted on the first holder in a first direction, or sensing the fastening device coupled with the a-th vacuum adapter; and A parts replacement automation system further comprising a second optical sensor that senses the vacuum adapter a mounted on the first holder in a second direction different from the first direction, or senses the fastening device coupled with the vacuum adapter a.

Description

Fastening apparatus and automatic system for replacement of parts including the same The present invention relates to a fastening device that can be used for semiconductor equipment maintenance and an automated parts replacement system including the same. Bolt fastening and disassembly are frequently performed during preventive maintenance (PM) of semiconductor equipment, and recently, automation systems are being developed to reduce the labor and time required for these tasks. The automation process for bolt fastening and disassembly may include bolt supply and bolt retrieval processes. For the bolt supply process, the bolt shooting method is the most widely used. However, this method presents a problem where it is difficult to use for semiconductor equipment PM operations due to particle issues. FIG. 1 is a combined perspective view for explaining the structure of a fastening device according to some embodiments of the present invention. FIG. 2 is an exploded perspective view for explaining the structure of a fastening device according to some embodiments of the present invention. FIG. 3 is an illustrative diagram for explaining the structure of a parts replacement automation system including a fastening device according to some embodiments of the present invention. FIG. 4 is a first exemplary diagram for explaining the process of connecting bits and bits, which constitutes a fastening device according to some embodiments of the present invention. FIG. 5 is a second exemplary diagram for explaining the process of connecting bits and bits, which constitutes a fastening device according to some embodiments of the present invention. FIG. 6 is a third exemplary diagram illustrating the process of connecting bits and bits, which constitutes a fastening device according to some embodiments of the present invention. FIG. 7 is a fourth exemplary diagram for explaining the process of connecting bits and bits, which constitutes a fastening device according to some embodiments of the present invention. FIG. 8 is a fifth exemplary diagram illustrating the process of connecting bits and bits, which constitutes a fastening device according to some embodiments of the present invention. FIG. 9 is a sixth exemplary diagram illustrating the process of connecting bits and bits, which constitutes a fastening device according to some embodiments of the present invention. FIG. 10 is a seventh exemplary diagram illustrating the process of connecting bits and bits, which constitutes a fastening device according to some embodiments of the present invention. FIG. 11 is a first illustrative diagram for explaining the bolt supply process of a fastening device according to some embodiments of the present invention in steps. FIG. 12 is a second exemplary diagram for explaining the bolt supply process of a fastening device according to some embodiments of the present invention step by step. FIG. 13 is a third exemplary diagram for explaining the bolt supply process of a fastening device according to some embodiments of the present invention step by step. FIG. 14 is a fourth exemplary diagram for explaining the bolt supply process of a fastening device according to some embodiments of the present invention step by step. FIG. 15 is a fifth exemplary diagram for explaining the bolt supply process of a fastening device according to some embodiments of the present invention in steps. Embodiments of the present invention will be described in detail below with reference to the attached drawings. Identical components in the drawings are denoted by the same reference numerals, and redundant descriptions thereof are omitted. The present invention relates to a fastening device and an automated parts replacement system including the same. The fastening device may be used for fastening and unfastening bolts. Alternatively, the fastening device may be used for fastening and unfastening screws. For example, the fastening device may be provided as a power tool. Although the fastening device will be described below as being used for fastening and unfastening bolts, the present embodiment is not limited thereto, and it is understood that the fastening device may be used for fastening and unfastening screws. In the present invention, bolts and screws may be defined as fastening components. The fastening device can supply bolts using a pick-and-place method. The fastening device may include a vacuum adapter and a bit. The parts replacement automation system can integrate and replace the vacuum adapter and the bit. The parts replacement automation system including the fastening device can be used for semiconductor equipment maintenance (PM). FIG. 1 is an assembled perspective view for explaining the structure of a fastening device according to some embodiments of the present invention. FIG. 2 is an exploded perspective view for explaining the structure of a fastening device according to some embodiments of the present invention. The first direction (D1) an