KR-20260067014-A - APPARATUS FOR TRANSFERRING SUBSTRATE, AND APPARATUS FOR PROCESSING SUBSTRATE HAVING THE SAME

KR20260067014AKR 20260067014 AKR20260067014 AKR 20260067014AKR-20260067014-A

Abstract

A substrate transfer device may include a repeating stage configured to be repeatedly arranged at regular intervals along the width direction of the substrate perpendicular to the transfer direction of the substrate and configured to supply air toward the back side of the substrate so as to lift the substrate; a rotary transfer unit configured to be arranged between each repeating stage and configured to transfer the substrate along the repeating stage by rotating in contact with the back side of the substrate; a receiving stage configured to be arranged continuously with the repeating stage to receive the substrate from the repeating stage and configured to supply air toward the back side of the substrate so as to lift the substrate; and a gripping transfer unit configured to transfer the substrate along the receiving stage while gripping one end, the other end, or both ends in the width direction of the substrate.

Inventors

홍충오
이정수
오영규
정창화
안지윤

Assignees

세메스 주식회사

Dates

Publication Date: 20260512
Application Date: 20241105

Claims (10)

A repeating stage configured to be repeatedly arranged at regular intervals along the width direction of the substrate perpendicular to the transport direction of the substrate, and configured to supply air toward the back side of the substrate so as to lift the substrate; A rotary transfer unit disposed between each of the above-mentioned repeating stages, configured to transfer the substrate along the repeating stages by rotating it in contact with the back surface of the substrate; A receiving stage arranged continuously with the repeating stage to receive the substrate from the repeating stage, and configured to supply air toward the back side of the substrate to lift the substrate; and A substrate transfer device characterized by including a gripping and transfer unit configured to transfer the substrate along the receiving stage while gripping one end, the other end, or both ends in the width direction of the substrate.
In Article 1, A substrate transfer device characterized by the above-mentioned repeating stage being configured to allow board-shaped structures of the same size to be repeatedly arranged at regular intervals.
In Article 1, A substrate transfer device characterized by comprising a rotary transfer unit comprising a roller that contacts the back surface of the substrate, a driving unit that rotates the roller, and a lifting/lowering unit that raises and lowers the roller to a height capable of contacting the back surface of the substrate rising from the repeating stage.
In Paragraph 3, A substrate transfer device characterized by the above-mentioned rotary transfer unit being configured to rise and fall when the substrate enters the repeating stage, and configured to fall after the substrate exits the repeating stage.
In Article 1, A substrate transfer device further comprising an alignment unit for aligning the substrate being transferred from the above-mentioned repeating stage to the above-mentioned receiving stage at a predetermined position, wherein the gripping and transfer unit is configured to transfer the substrate after aligning the substrate using the alignment unit.
A first processing unit comprising: a first repeating stage configured to be repeatedly arranged at regular intervals along the width direction of the substrate perpendicular to the transport direction of the substrate, and configured to supply air toward the back side of the substrate so as to lift the substrate; and a first rotary transport unit configured to be arranged between the first repeating stages and configured to transport the substrate along the first repeating stages by rotating in contact with the back side of the substrate. A second processing unit comprising: a receiving stage arranged continuously with the first repeating stage to receive the substrate from the first repeating stage and configured to supply air toward the back side of the substrate so as to lift the substrate; and a gripping and transfer unit configured to transfer the substrate along the receiving stage while gripping one end, the other end, or both ends in the width direction of the substrate. A third processing unit comprising: a discharge stage arranged continuously with the receiving stage to receive the substrate from the receiving stage, and configured such that air supply and vacuum suction are performed together toward the back side of the substrate to lift the substrate; and a liquid dispensing unit configured to discharge a liquid onto the substrate being transported along the discharge stage by the gripping transport unit. A discharge stage arranged continuously with the discharge stage to receive the substrate from the discharge stage, and configured to supply air toward the back side of the substrate to lift the substrate; and a fourth processing unit configured to transport the substrate along the discharge stage by the gripping transport unit; and A substrate processing device characterized by comprising a fifth processing unit, wherein the second repeating stage is arranged continuously with the discharge stage to receive the substrate from the discharge stage and is arranged repeatedly at regular intervals along the width direction of the substrate, and is configured to supply air toward the back side of the substrate to lift the substrate, and a second rotary transfer unit is arranged between the second repeating stages and is configured to transport the substrate along the second repeating stage by rotating in contact with the back side of the substrate.
In Article 6, A substrate processing apparatus characterized in that each of the first repetition stage and the second repetition stage is configured such that a plank-shaped structure of the same size can be repeatedly arranged at regular intervals.
In Article 6, A substrate processing device characterized in that each of the first rotary transfer unit and the second rotary transfer unit comprises a roller that contacts the back surface of the substrate, a driving unit that rotates the roller, and a lifting/lowering unit that raises and lowers the roller to a height that can contact the back surface of the substrate rising from the repeating stage.
In Article 6, A substrate processing apparatus further comprising an alignment unit for aligning the substrate being brought from the first repetition stage to the receiving stage at a predetermined position, wherein the gripping and transfer unit is configured to transfer the substrate after aligning the substrate using the alignment unit.
In Article 6, A substrate processing device characterized in that the above-mentioned gripping transfer unit and the above-mentioned second rotary transfer unit are configured to transfer the substrate at the same transfer speed.

Description

Apparatus for transferring substrate, and apparatus for processing substrate having the same The present invention relates to a substrate transfer device and a substrate processing device including the same. More specifically, it relates to a substrate transfer device for transferring a substrate while the substrate is in a levitating state and a substrate processing device including the same. In the manufacturing of display devices such as OLEDs and QLEDs, a chemical dispensing process can be performed to dispense chemical solutions such as photoresist, R, G, and B inks. The chemical dispensing process can primarily be carried out with the substrate floating. A substrate processing device applied to the chemical dispensing process may include a chemical dispensing device capable of dispensing a chemical solution onto a substrate, along with a substrate transfer device capable of transferring the substrate while it is floating. In the case of the above-described substrate transfer device, rollers may be placed in a part of the receiving stage where the substrate is introduced. This is intended to be applied to transfer the substrate, which is levitating by supplying air, to an alignment position using the rollers. However, since the substrate may be in a state of being levitating by the supply of air, there may be a gap between the back surface of the substrate and the rollers, and as a result, transfer by the rollers may not occur. Accordingly, vacuum suction is applied to the part adjacent to the rollers to pull the substrate, thereby causing the rollers and the back surface of the substrate to come into contact, so that transfer by the rollers is achieved. However, the substrate may bend due to the aforementioned vacuum suction. If the substrate bends, it may hinder the transport of the substrate, and in severe cases, even lead to the substrate being damaged. Additionally, since the substrate is pulled to come into contact with the rollers, the aforementioned contact may cause mirror-like surface finishes to form on the rollers. FIG. 1 is a schematic drawing for illustrating a substrate processing apparatus according to exemplary embodiments of the present invention. FIG. 2 is a schematic diagram illustrating a rotary transfer unit in a substrate processing apparatus according to exemplary embodiments of the present invention. FIG. 3 is a schematic diagram illustrating an alignment section in a substrate processing apparatus according to exemplary embodiments of the present invention. The present invention is susceptible to various modifications and may take various forms, and embodiments are to be described in detail in the text. However, this is not intended to limit the invention to the specific disclosed forms, and it should be understood that the invention includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention. Similar reference numerals have been used for similar components in the description of each figure. Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. Such terms are used solely for the purpose of distinguishing one component from another. The terms used in this application are used only to describe specific embodiments and are not intended to limit the invention. A singular expression includes a plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "consisting of" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application. Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the attached drawings. Identical components in the drawings are given the same reference numerals, and redundant descriptions of identical components are omitted. FIG. 1 is a schematic drawing for illustrating a substrate processing apparatus according to exemplary embodiments of the present invention. Referring to FIG. 1, a substrate processing apparatus (1000) according to exemplary embodiments of the present invention can be applied to perform a chemical dispensing process for dispensing chemical solutions such as