KR-20260067035-A - Pogo block and probe card having the same

Abstract

A pogo block and a probe card including the same are provided. A pogo block according to one aspect of the present invention comprises: a top plate having a plurality of first holes formed penetrating one side and the other side; a bottom plate having a plurality of second holes formed penetrating one side and the other side; a middle plate disposed between the top plate and the bottom plate; a plurality of top contactors inserted into the first holes; a plurality of bottom contactors inserted into the second holes; and a conductor disposed between the top plate and the bottom plate, wherein one end is electrically connected to the top contactors and the other end is electrically connected to the bottom contactors.

Inventors

• 박상영
• 김우준

Assignees

• 주식회사 비이링크

Dates

Publication Date

20260512

Application Date

20241105

Claims (20)

1. A top plate having a plurality of first holes formed that penetrate one side and the other side; A bottom plate having a plurality of second holes formed that penetrate one side and the other side; A middle plate positioned between the top plate and the bottom plate; A plurality of top contactors inserted into the first hole above; A plurality of bottom contactors inserted into the second hole; and A pogo block comprising: a conductor disposed between the top plate and the bottom plate, wherein one end is electrically connected to the top contactor and the other end is electrically connected to the bottom contactor.
2. In Article 1, The above middle plate includes a plurality of third holes penetrating one side and the other side of the above middle plate, and The above conductor is a pogo block penetrating the third hole.
3. In Article 1, A pogo block further comprising a spacer disposed at one or more of the positions between the middle plate and the top plate or between the middle plate and the bottom plate.
4. In Paragraph 3, The above spacers are provided in a plurality, and are formed such that the sum of the thicknesses of the middle plate and the plurality of spacers corresponds to a predetermined first distance. One end of the top contactor and the other end of the bottom contactor are partially inserted into the spacer, and The above first distance is, A pogo block corresponding to the sum of the distance between one end of the conductor and the other end of the conductor, and the depth to which the top contactor and the bottom contactor are inserted into the spacer.
5. In Paragraph 3, The above spacers are provided in a plurality, and are formed such that the sum of the thicknesses of the middle plate and the plurality of spacers corresponds to a predetermined first distance. The above first distance is, A pogo block corresponding to the distance between one end of the conductor and the other end of the conductor.
6. In Article 2, The thickness of the above middle plate is formed to correspond to a predetermined first distance, and One end of the top contactor and the other end of the bottom contactor are partially inserted into the middle plate, and The above first distance is, A pogo block corresponding to the sum of the distance between one end of the conductor and the other end of the conductor, and the depth to which the top contactor and the bottom contactor are inserted into the middle plate.
7. In Paragraph 3, The above spacer includes a plurality of fourth holes penetrating one side and the other side of the spacer, and The above conductor is a pogo block inserted into the above fourth hole.
8. In Article 1, A plurality of fifth holes are formed penetrating one side and the other side, and further include a top holder disposed on the other side of the top plate, The above top contactor is a pogo block that simultaneously penetrates the first hole and the fifth hole.
9. In Article 1, A plurality of sixth holes are formed penetrating one side and the other side, and further include a bottom holder disposed on one side of the bottom plate. The above bottom contactor is a pogo block that simultaneously penetrates the above second hole and the above sixth hole.
10. In Article 1, A pogo block in which at least one of the top contactor and the bottom contactor is formed as a pogo pin.
11. In Article 1, The above conductor is a pogo block formed in a bar shape extending in one direction.
12. In Article 1, The above conductor includes the one end and the other end and a connecting portion connecting the one end and the other end, wherein A pogo block formed in a shape that can be bent from the connecting portion so that the above-mentioned one end and the above-mentioned other end are oriented in the same direction.
13. In Article 12, The above conductor is formed as a flexible circuit board, and A pogo block in which the portion in contact with the top contactor and the bottom contactor is formed of an electrically conductive material.
14. In Article 1, A pogo block in which the top plate, the bottom plate, and the middle plate have a cross-sectional shape formed by cutting a plane parallel to one side of the top plate in the form of a two-dimensional closed curved surface or a closed plane.
15. In Article 1, A pogo block in which at least one of the top plate or the bottom plate further comprises a first refrigerant flow path through which refrigerant can flow.
16. In Paragraph 3, A pogo block in which at least one of the above spacers or the above middle plates further comprises a first refrigerant flow path through which refrigerant can flow.
17. A pogo block of any one of claims 1 to 16; provided in a plurality, A probe card comprising a plurality of pads on which a plurality of the above-mentioned pogo blocks are fastened on one side.
18. In Article 17, Multiple of the above pads are formed in two or more different shapes, and A plurality of the above-mentioned pogo blocks, A probe card in which the cross-sectional shape perpendicular to the longitudinal direction of the above pogo block is formed in two or more different shapes corresponding to the pad.
19. In Article 17, The above pogo block is a probe card that is detachable from the pad.
20. In Article 17, A probe card further comprising a plurality of second refrigerant passages passing through the above pogo blocks or the above card.

Description

Pogo block and probe card having the same The present invention relates to a pogo block and a probe card including the same, and more specifically, to a pogo block that is adjustable in length in the vertical direction and corresponds to each pad of a probe card, and a probe card including the same. Generally, a wafer prober, a type of semiconductor inspection equipment, is a device that checks for defects by inspecting the electrical characteristics of semiconductor devices manufactured on a wafer immediately before it enters the back-end process, after the entire front-end process has been completed. In a semiconductor wafer on which a plurality of semiconductor devices are formed, a probe is used as a wafer inspection device to inspect the electrical characteristics of each semiconductor device. The probe is equipped with a probe card having a probe provided on one side facing the wafer. The probe card is equipped with a plurality of probes, which are contact terminals, on one surface facing each electrode pad or each solder bump of the semiconductor device on the wafer. A plurality of probes provided on the probe card come into contact with the electrode pads or solder bumps of the semiconductor device, and by allowing each probe to flow a test signal to the electrical circuit of the semiconductor device connected to each electrode pad or each solder bump, the conduction status of the electrical circuit is tested. The probe card is equipped with a pogo block on the opposite side of the probe that transmits a test signal to the test head side. Conventionally, the pogo block is formed in a shape corresponding to the pads of the card constituting the probe card; in this case, the pads are composed of multiple parts and have various shapes or arrangements depending on the type of wafer or prober to be inspected. The pogo block is equipped with an interposer containing a large number of pogo pins, and a single pogo block is connected to all the pads constituting the probe card. Consequently, even if only some of the numerous interposers in the pogo block that come into contact with the probe card pads were damaged, replacing or repairing that part was very difficult because the pogo block is manufactured as a single unit. In addition, as the size of the probe card increased, a problem occurred where bending occurred due to the load of the pogo block itself. In addition, there was a problem where the entire pogo block had to be remanufactured or reprocessed if a small error occurred in a part of the manufacturing process due to the pogo block itself. In addition, there were cases where the shape or arrangement of probe card pads was required differently depending on the situation; however, since the Pogo Block was manufactured as a single unit, there was a problem where the Pogo Block had to be remanufactured whenever the pad arrangement or shape of the probe card was modified. FIG. 1 is a perspective view illustrating a pogo block according to one embodiment of the present invention. FIG. 2 is a front view illustrating a pogo block according to one embodiment of the present invention. FIG. 3 is a top view illustrating a pogo block according to one embodiment of the present invention. FIG. 4 is a bottom view illustrating a pogo block according to one embodiment of the present invention. Figure 5 is a cross-sectional view illustrating the AA' section of Figure 4. FIG. 6 is a diagram showing a disassembled view of a pogo block according to one embodiment of the present invention. FIG. 7 is a drawing illustrating a partial configuration including a top plate of a pogo block according to one embodiment of the present invention. FIG. 8 is a drawing illustrating a partial configuration including a middle plate of a pogo block according to one embodiment of the present invention. FIG. 9 is a drawing illustrating a partial configuration including a bottom plate of a pogo block according to one embodiment of the present invention. FIG. 10 is a drawing illustrating a pogo block according to another embodiment of the present invention. FIG. 11 is a diagram showing a disassembled view of a pogo block according to another embodiment of the present invention illustrated in FIG. 10. FIG. 12 is a top view illustrating a flexible circuit board of a pogo block according to another embodiment of the present invention. FIG. 13 is a top view illustrating a probe card according to one embodiment of the present invention. FIG. 14 is a top view illustrating a modified pad arrangement of a probe card according to one embodiment of the present invention. Figure 15 is a diagram illustrating the use of a conventional probe card. FIG. 16 is a drawing illustrating the use of a probe card according to one embodiment of the present invention. FIG. 17 is a drawing showing a refrigerant flow path applied to the top plate of a pogo block according to one embodiment of the present invention. FIG. 18 is a drawing showing a cross-sectional view o