KR-20260067287-A - PRE-COMPENSATORY MULTI-PASS AMPLIFIER BASED ON SPECTRUM EXPANSION, FEMTOSECOND FIBER LASER SYSTEM INCLUDING THE SAME

KR20260067287AKR 20260067287 AKR20260067287 AKR 20260067287AKR-20260067287-A

Abstract

The present disclosure may be characterized by comprising: a first laser light source and a second laser light source; a first prism and a second prism that refract laser light generated from the first laser light source and the second laser light source; a crystal that expands the spectrum of the laser light of the first laser light source refracted through the first prism and the second prism, and expands the spectrum of the laser light generated from the second laser light source so that it is incident on the first prism through the second prism; and at least one mirror that transmits the laser light transmitted through the first prism back to the first prism and then to the second prism through the first prism, wherein the first prism and the second prism are arranged facing each other having shapes that are inverted vertically from one another and include a plurality of points for refracting each other in a predetermined order, and the first prism includes the last point among the plurality of points and refracts the laser light incident on the last point and transmits it to the outside.

Inventors

김형우
서홍석
송동훈

Assignees

주식회사 블루타일랩

Dates

Publication Date: 20260512
Application Date: 20250401
Priority Date: 20241105

Claims (10)

First laser light source and second laser light source; A first prism and a second prism that refract laser light generated from the first laser light source and the second laser light source; A crystal that expands the spectrum of the laser light of the first laser light source refracted through the first prism and the second prism, and expands the spectrum of the laser light generated from the second laser light source so that it passes through the second prism and enters the first prism; and It includes at least one mirror that transmits laser light transmitted through the first prism back into the first prism and passes through the first prism to the second prism. The first prism and the second prism are arranged facing each other while having shapes that are inverted vertically from one another, and include a plurality of points for refracting from each other in a predetermined order. A multi-pass amplifier device for spectrum expansion, characterized in that the first prism includes the last point among the plurality of points and refracts laser light incident on the last point and transmits it to the outside.
In paragraph 1, A multi-pass amplifier for spectrum expansion, further comprising a phase delay plate provided in the transmission path of the first prism and adjusting the polarization direction of the laser light incident at the last point.
In paragraph 2, The above laser light is, A multi-pass amplifier device for spectrum expansion, characterized by forming a round-trip path by alternately passing through the plurality of points one by one in the above-set order and being returned by a mirror located adjacent to the phase delay plate.
In paragraph 2, A multi-pass amplifier for spectrum expansion, further comprising a first lens provided between the second prism and the crystal, and focusing laser light incident through the second prism.
In paragraph 4, A multi-pass amplifier device for spectrum expansion, characterized in that the focusing intensity in the crystal is determined according to the focal length of the first lens.
In paragraph 5, A multipass amplifier device for spectrum expansion, characterized in that the crystal is a gain medium of Yb:YAG, Nd:YAG, and Nd:YVO4 and is formed in a cone shape.
In paragraph 6, The gap between the first prism and the second prism is, A multipass amplifier with pre-compensation for spectrum expansion, characterized by being configured to compensate for the Group Delay Dispersion (GDD) value generated during amplification of the above Yb:YAG.
In paragraph 1, A multi-pass amplifier for spectrum expansion, further comprising at least one second lens provided between the crystal and the second laser light source and focusing the laser light generated from the second laser light source.
In paragraph 1, The above mirror includes a first mirror and a second mirror, and The first mirror and the second mirror are, A multi-pass amplifier for spectrum expansion, characterized by having shapes that are vertically inverted and arranged facing each other to allow reflection of the laser light.
A femtosecond fiber laser system comprising a pre-compensation multi-pass amplification device according to spectrum expansion as described in any one of claims 1 to 9.

Description

Pre-compensated multi-pass amplifier based on spectrum expansion, femtosecond fiber laser system including the same The present disclosure relates to a laser system. More specifically, the present disclosure relates to a pre-compensation multipass amplifier for spectral expansion and a femtosecond fiber laser system including the same. Generally, femtosecond laser light has been used in industrial settings to reduce cutting defects in semiconductor wafers and secondary battery electrodes. Here, the femtosecond laser light was modulated by a pulse control signal to control the repetition rate as well as by a laser light formed by a pulse train of the femtosecond laser. At this time, laser light could be generated by a femtosecond fiber laser system. However, conventional femtosecond fiber laser systems had limitations in focusing and amplifying laser light into a laser gain medium while expanding the spectrum of the laser light. Therefore, recently, there is a demand for the development of improved technology capable of focusing and amplifying laser light into a laser gain medium while expanding the spectrum of the laser light. FIG. 1 illustrates a femtosecond fiber laser system according to the present disclosure. Figure 2 illustrates a detailed configuration of the femtosecond fiber laser system of Figure 1 as an example. FIG. 3 shows the wavelength of the pulsed laser light of FIG. 2, the wavelength of the first continuous wave laser light, and the wavelength of the second continuous wave laser light. Figure 4 illustrates the configuration of the pre-compensated multi-pass amplifier of Figure 2 as an example. Throughout this disclosure, the same reference numerals refer to the same components. This disclosure does not describe all elements of the embodiments, and general content in the art to which this disclosure pertains or content that overlaps between embodiments is omitted. The terms ‘part, module, component, block’ as used in the specification may be implemented in software or hardware, and depending on the embodiments, a plurality of ‘parts, modules, components, blocks’ may be implemented as a single component, or a single ‘part, module, component, block’ may include a plurality of components. Throughout the specification, when a part is described as being "connected" to another part, this includes not only cases where they are directly connected but also cases where they are indirectly connected, and indirect connections include connections made via a wireless communication network. Furthermore, when it is stated that a part "includes" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components. Throughout the specification, when it is stated that a component is located "on" another component, this includes not only cases where a component is in contact with another component, but also cases where another component exists between the two components. Terms such as "first," "second," etc., are used to distinguish one component from another, and the components are not limited by the aforementioned terms. Singular expressions include plural expressions unless there is an obvious exception in the context. In each step, identification codes are used for convenience of explanation and do not describe the order of the steps; the steps may be performed differently from the specified order unless a specific order is clearly indicated in the context. The operating principles and embodiments of the present disclosure will be described below with reference to the attached drawings. FIG. 1 illustrates a femtosecond fiber laser system according to the present disclosure. FIG. 2 illustrates a detailed configuration of the femtosecond fiber laser system of FIG. 1 as an example. FIG. 3 shows the wavelength of the pulsed laser light of FIG. 2, the wavelength of the first continuous wave laser light, and the wavelength of the second continuous wave laser light. Referring to FIGS. 1 to 3, a femtosecond fiber laser system (100) according to the present disclosure may include a femtosecond light source (10), a preamplifier (20), a pulse picker (30), a first continuous wave light source (40), a pre-compensated multi-pass amplifier (50), a pulse width compressor (60), a control module (70), and a second continuous wave light source (80). The femtosecond light source (10) can generate femtosecond laser light (12). Here, the femtosecond laser light (12) can have a frequency of about 10 MHz to about 1000 MHz. A preamplifier (20) can be connected to a femtosecond light source (10). Here, the preamplifier (20) can amplify femtosecond laser light (12). The pulse speaker (30) can be connected to a preamplifier (20). Here, the pulse speaker (30) can generate pulsed laser light (32) by modulating femtosecond laser light (12). Here, pulsed laser light (32) refers to femtosecond laser light having any pulse train. The first continuous wave lig