KR-20260067441-A - SYSTEM FOR CALIBRATING MEMS ACCELEROMETER

Abstract

The present invention discloses a MEMS accelerometer calibration system. More specifically, the present invention relates to a MEMS accelerometer calibration system and method capable of calibrating a plurality of different MEMS accelerometers in the form of PCBs simultaneously. According to an embodiment of the present invention, by measuring the attitude information and excitation direction information of a sensor based on an image and correcting an unstructured MEMS sensor through this, block design according to the measurement frequency band can be performed, MEMS accelerometers can be corrected at once, measurements for arbitrary shapes are possible, and the sensitivity of multiple unstructured MEMS accelerometers can be corrected at once.

Inventors

• 정인지
• 조완호
• 우제흔

Assignees

• 한국표준과학연구원

Dates

Publication Date

20260513

Application Date

20241104

Claims (9)

1. An exciter that generates vibrations in a constant direction; A reference accelerometer that measures the vibration generated by being combined with the above-mentioned exciter in real time and transmits it to the upper side, and outputs a reference signal for the vibration; A block portion formed on an inclined surface of a certain width having a slope at a certain angle with respect to a horizontal plane, wherein one or more MEMS accelerometers to be calibrated are disposed thereon, and which is connected to the reference accelerometer and receives vibrations from below; and A calibration device that receives the above reference signal and the output signal output from the above MEMS accelerometer and calculates sensitivity information A MEMS accelerometer calibration system including
2. In Article 1, An imaging camera positioned at a certain distance from the block portion and capturing the front surface of the block portion to generate a mode shape; and A coordinate system sensor installed on one side of the imaging camera and on the ground to detect whether the tilt of the imaging camera matches the angle of the floor surface or whether the tilt matches the direction of vibration. A MEMS accelerometer calibration system including
3. In Article 2, The above imaging camera is, A MEMS accelerometer calibration system that is a ToF (time of flight) or structured light method.
4. In Article 2, The above calibration device is, A MEMS accelerometer calibration system that corrects the entire coordinate system for the mode shape according to the result detected by the coordinate system sensor.
5. In Article 4, The above calibration device is, A MEMS accelerometer calibration system that receives the above mode shape and estimates the torsional angle and inclined plane angle for the MEMS accelerometer.
6. In Article 5, The above calibration device is, A MEMS accelerometer calibration system that generates sensitivity information by calculating an acceleration component measured from a mode shape of less than a specific frequency corrected by the entire coordinate system using the reference signal.
7. In Article 6, The magnitude of each acceleration component (a x , a y , a z ) for the x, y, and z axes applied to the MEMS accelerometer according to the vibration generated by the above exciter is given by the following mathematical formula, A MEMS accelerometer calibration system satisfying (where A ref is the actual acceleration magnitude applied to the reference accelerometer, α is the torsional angle of the MEMS accelerometer, and β is the angle of the inclined plane).
8. In Article 1, The above-mentioned exciter is, A MEMS accelerometer calibration system that generates uniaxial vibration in any one of mechanical, electronic, and hydraulic ways.
9. In Article 8, The inclined surface of the above block part is, A MEMS accelerometer calibration system in which the normal is formed with an inclination that is not parallel to at least the direction of vibration of the first axis.

Description

MEMS Accelerometer Calibration System The present invention relates to a MEMS accelerometer calibration system, and more particularly to a MEMS accelerometer calibration system capable of calibrating multiple different MEMS accelerometers in the form of PCBs at once. Recently, with the advancement of MEMS (Micro Electro Mechanical System) technology, various types of sensors utilizing MEMS are being developed. In particular, interest in MEMS accelerometers is steadily growing due to their numerous advantages over conventional mechanical sensors in terms of price, size, weight, and power consumption. These MEMS accelerometers take the form of a PCB composed of one or more MEMS devices and circuits for collecting the correct signals from them, and may have different components and forms depending on the design purpose and manufacturer. Therefore, there is a disadvantage in that it is difficult to directly apply conventional accelerometer calibration methods utilizing laser interferometers or reference accelerometers. In addition, 2-axis or 3-axis accelerometers, in addition to 1-axis accelerometers that can measure on a single axis, have the problem of increased complexity and measurement uncertainty as calibration processes must be performed for each axis. As a prior art document regarding a technology for calibrating such a MEMS accelerometer, Japanese Patent Publication No. 2016-218054 discloses an accelerometer device configured for field calibration, wherein the device applies a laser-induced push force of a first magnitude to a proof mass of the accelerometer and, while applying the laser-induced push force of the first magnitude to the proof mass, obtains a first output from the accelerometer, and the device is further configured to apply a laser-induced push force of a second magnitude to a calibration mass and, while applying the laser-induced push force of the second magnitude to the calibration mass, obtains a second output from the accelerometer. As mentioned above, in light of the prior art, including related prior art, a system for simultaneously calibrating multiple MEMS accelerometers has not yet been disclosed. FIG. 1 is a schematic diagram showing the overall configuration of a MEMS accelerometer calibration system according to an embodiment of the present invention. FIG. 2 is a block diagram showing the structure of a MEMS accelerometer calibration system according to an embodiment of the present invention. FIG. 3 is a perspective view showing the shape of a block part of a MEMS accelerometer calibration system according to an embodiment of the present invention. FIG. 4 is a diagram illustrating a block section of a MEMS accelerometer calibration system according to an embodiment of the present invention and an image taken of the same with an imaging camera. FIG. 5 is a diagram illustrating the intrinsic mode shape of a block portion by a MEMS accelerometer calibration system according to an embodiment of the present invention. The present invention as described above will be explained in detail through the attached drawings and embodiments. It should be noted that the technical terms used in this invention are used merely to describe specific embodiments and are not intended to limit the invention. Furthermore, unless specifically defined otherwise in this invention, the technical terms used in this invention should be interpreted in the sense generally understood by those skilled in the art to which this invention pertains, and should not be interpreted in an overly broad or overly narrow sense. Additionally, if a technical term used in this invention is an incorrect technical term that fails to accurately express the concept of the invention, it should be replaced with a technical term that can be correctly understood by those skilled in the art. Moreover, general terms used in this invention should be interpreted according to their prior definitions or the context, and should not be interpreted in an overly narrow sense. Furthermore, singular expressions used in the present invention include plural expressions unless the context clearly indicates otherwise. In the present invention, terms such as "composed of" or "comprising" should not be interpreted as necessarily including all of the various components or steps described in the invention, and should be interpreted as meaning that some of the components or steps may not be included, or that additional components or steps may be included. Additionally, terms including ordinal numbers, such as first, second, etc., used in the present invention may be used to describe components, but the components should not be limited by these terms. The terms are used solely for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component. Hereinafter, preferred