KR-20260067470-A - CRYOPUMP

KR20260067470AKR 20260067470 AKR20260067470 AKR 20260067470AKR-20260067470-A

Abstract

A cryo pump according to one embodiment of the present disclosure comprises a cryogenic refrigerator having a cooling stage, a cryo panel cooled by the cooling stage, a radiation shield protecting the cryo panel, a main body surrounding the radiation shield while spaced apart from the radiation shield through a support, a receiving body connected to the main body and formed to extend toward the cryogenic refrigerator, and a corrugated tube connected to the end of the receiving body to reduce vibrations generated from the cryogenic refrigerator.

Inventors

양원균
이지원
안경준

Assignees

크라이오에이치앤아이(주)

Dates

Publication Date: 20260513
Application Date: 20241105

Claims (8)

In cryopumps, A cryogenic refrigerator equipped with a cooling stage; A cryo panel cooled by the above cooling stage; A radiation shield protecting the above cryo panel; A main body that surrounds the radiation shield while being spaced apart from the radiation shield through a support; A receiving body formed by being connected to the main body and extending toward the cryogenic refrigerator; and A corrugated tube connected to the end of the receiving body to reduce vibrations generated from the above-mentioned cryogenic refrigerator, Cryo pump.
In Article 1, The above support members are provided in multiple numbers and are each positioned at multiple locations between the outer surface of the radiation shield and the inner surface of the main body. Cryo pump.
In Article 2, At least a portion of the above support is positioned on the lower surface along the direction of gravity of the radiation shield to support the load of the radiation shield and reduce vertical vibration of the radiation shield. Cryo pump.
In Article 2, At least a portion of the above support is positioned on the side along the direction of gravity of the radiation shield to reduce lateral vibration of the radiation shield, Cryo pump.
In Article 1, The above support is an elastic body capable of elastic deformation, Cryo pump.
In Article 5, The above support is a spring formed of fluorinated carbon resin material, Cryo pump.
In Article 1, The above corrugated tube has one end connected to a first flange fixed to the end of the receiving body and the other end connected to a second flange fixed to the cryogenic refrigerator. Cryo pump.
In Article 7, The invention further comprises a cover fixed to at least one of the first flange, the second flange, and the corrugated pipe, and configured to wrap around at least a portion of the corrugated pipe from the outside. Cryo pump.

Description

Cryo Pump The present invention relates to a cryo pump. A cryopump is equipment used to vacuum a vacuum chamber where a workpiece is located during manufacturing processes for OLED displays, semiconductors, IT devices, etc. The cryopump includes a cryogenic refrigerator to cool the cryo panel. A cryogenic refrigerator is configured to periodically fluctuate the pressure of the refrigerant gas inside, and such pressure fluctuations can cause the cryogenic refrigerator to vibrate. In conventional cryopumps, the cryogenic refrigerator is directly fixed to the body of the cryopump, and accordingly, vibrations from the cryogenic refrigerator are transmitted to the body and can be transmitted to a vacuum process device equipped with the cryopump. In display processes including the recently trending OLEDos, the vibration characteristics of cryogenic refrigerators are becoming critical due to patterns that are much finer than those in conventional display processes. Conventionally, bellows were used as structures to block vibrations. However, bellows tended to sag due to the load of connected objects, and to solve this problem, it was necessary to install guide blocks that support the load and vibration-absorbing rubber between the guide blocks. However, when installing such guide blocks, the size of the structure for blocking vibrations increased, which caused a problem of potential interference with surrounding parts. FIG. 1 shows a cross-sectional view of a bellows (100) according to the prior art. Referring to FIG. 1, a bellows (100) according to the prior art can reduce transmitted vibrations while connecting the body (350) of a cryo pump and a cryogenic refrigerator (250). According to the prior art, the bellows (100) has both ends connected to a first plate (300) and a second plate (300), respectively, the first plate (200) is connected to a cryogenic refrigerator (250), and the second plate (300) can be connected to a body (350). A bellows (100) according to the prior art supports the load by installing a plurality of guide blocks (400) to prevent sagging caused by the load of a connected object. The guide blocks (400) are installed between the first plate (200) and the second plate (300), and vibration-absorbing rubber is installed on the guide blocks (400) to prevent vibration transmission. According to the prior art, the bellows (100) had the disadvantage that, as more space was required for the guide block (400) to be installed according to the above configuration, the size of the first plate (200) and the second plate (300) was increased, taking up a large volume and not aesthetically pleasing. FIG. 1 shows a cross-sectional view of a bellows according to the prior art. FIG. 2 is a cross-sectional view of a cryopump combined with a cryogenic refrigerator according to one embodiment of the present disclosure. FIG. 3 is a cross-sectional view of a cryopump with a cryogenic refrigerator excluded, according to one embodiment of the present disclosure. FIG. 4 illustrates a cross-sectional view of a corrugated tube according to one embodiment of the present disclosure. FIG. 5 is a cross-sectional view of a cryopump combined with a cryogenic refrigerator according to another embodiment of the present disclosure. FIG. 6 is a cross-sectional view of a cryopump with a cryogenic refrigerator excluded, according to another embodiment of the present disclosure. Embodiments of the present invention are described below with reference to the attached drawings to enable those skilled in the art to easily implement the invention. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. Furthermore, in order to clearly explain the present invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification are denoted by similar reference numerals. Throughout this specification, when a component is described as being located "on" another component, this includes not only cases where a component is in contact with another component, but also cases where another component exists between the two components. Throughout this specification, when a part is described as "comprising" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components. Throughout this specification, terms of degree such as “about,” “substantially,” etc., are used to mean at or near the stated value when inherent manufacturing and material tolerances are presented in the stated meaning, and are used to prevent unscrupulous infringers from unfairly exploiting the disclosure in which precise or absolute values are mentioned to aid in understanding this specification. Throughout this specification, terms of degree such as “step” or “step of” do not mean “step for”. Throughout this specification, the term “combination(s) of these” included i