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KR-20260067490-A - WAFER CARRIER INFORMATION MANAGEMENT SYSTEM

KR20260067490AKR 20260067490 AKR20260067490 AKR 20260067490AKR-20260067490-A

Abstract

A wafer carrier information management system is provided. A wafer carrier information management system according to some embodiments includes an RFID tag attached to a wafer carrier and storing wafer carrier identification information; a conveyor for transporting a wafer carrier; a conveyor rail comprising a main conveyor rail for moving the conveyor from a first process zone to a second process zone and a sub-conveyor rail for moving the conveyor within the first process zone; a plurality of carrier buffers disposed on both sides of the sub-conveyor rail and on which wafer carriers are loaded; a plurality of antennas disposed on one side of the sub-conveyor rail and recognizing the RFID tag of the wafer carrier; an RF controller that receives the value of the RFID tag recognized by the antenna; and a conveyor controller that receives location information of the carrier buffer on which the wafer carrier is loaded from the conveyor.

Inventors

  • 장원일
  • 박상혁
  • 김영규
  • 정성실

Assignees

  • 삼성전자주식회사

Dates

Publication Date
20260513
Application Date
20241105

Claims (10)

  1. An RFID tag attached to the wafer carrier, in which wafer carrier identification information is stored; A transport device for transporting the above wafer carrier; A conveyor rail comprising a main conveyor rail that moves the conveyor device from a first process zone to a second process zone, and a sub-conveyor rail that moves the conveyor device within the first process zone; A plurality of carrier buffers disposed on both sides of the above sub-return rail and loaded with the wafer carrier; A plurality of antennas disposed on one side of the above sub-conveyor rail and recognizing the RFID tag of the wafer carrier; An RF controller that receives the value of the RFID tag recognized from the antenna; and A wafer carrier information management system comprising a conveying device controller that receives location information of the carrier buffer on which the wafer carrier is loaded from the conveying device.
  2. In paragraph 1, A wafer carrier information management system further comprising a buffer controller that stores in a database data combining the value of the RFID tag provided by the RF controller and the location information provided by the return device controller.
  3. In paragraph 2, The above main conveyor rail includes a first main conveyor rail and a second main conveyor rail facing each other with the carrier buffer in between, and The above sub-conveyor rails each include a first sub-conveyor rail and a second sub-conveyor rail connecting the first main conveyor rail and the second main conveyor rail, and The first process zone includes a first carrier buffer group disposed on both sides of the first sub-conveyor rail and a second carrier buffer group disposed on both sides of the second sub-conveyor rail. The antenna comprises a first antenna disposed on one side of the first sub-transport rail adjacent to the first main transport rail, a second antenna disposed on one side of the second sub-transport rail adjacent to the second main transport rail, a third antenna disposed on one side of the first sub-transport rail adjacent to the second main transport rail, and a fourth antenna disposed on one side of the second sub-transport rail adjacent to the first main transport rail. The first antenna and the third antenna recognize the RFID tag of the wafer carrier loaded on the conveyor moving along the first sub-conveyor rail, and A wafer carrier information management system in which the second antenna and the fourth antenna recognize the RFID tag of the wafer carrier loaded on the conveyor device moving along the second sub-conveyor rail.
  4. In paragraph 3, The above-mentioned return device is, It includes a first return device and a second return device, The first antenna recognizes the first RFID tag of the first wafer carrier loaded in the first conveying device that has entered the first sub-conveying rail, and The value of the first RFID tag is provided to the buffer controller through the RF controller, and The first carrier device moves along the first sub-carrier rail to the first carrier buffer within the first carrier buffer group, and The first transfer device transfers the first wafer carrier to the first carrier buffer, and A wafer carrier information management system in which the first carrier device provides first position information of the first carrier buffer to the buffer controller through the carrier device controller.
  5. In paragraph 4, The first antenna recognizes the second RFID tag of the second wafer carrier loaded in the second conveyor device that has entered the first sub-conveyor rail, and The value of the second RFID tag is provided to the buffer controller through the RF controller, and The second carrier device moves along the first sub-carrier rail to the second carrier buffer within the first carrier buffer group, and The second transfer device transfers the second wafer carrier to the second carrier buffer, and A wafer carrier information management system in which the second carrier device provides second location information of the second carrier buffer to the buffer controller through the carrier device controller.
  6. In paragraph 4, The second antenna recognizes the second RFID tag of the second wafer carrier loaded in the second conveyor device that has entered the second sub-conveyor rail, and The above second RFID tag is provided to the buffer controller through the RF controller, and The second carrier device moves along the second sub-carrier rail to the second carrier buffer within the second carrier buffer group, and The second transfer device transfers the second wafer carrier to the second carrier buffer, and A wafer carrier information management system in which the second carrier device provides second location information of the second carrier buffer to the buffer controller through the carrier device controller.
  7. In paragraph 4, The second transport device, which is not loaded with the wafer carrier, moves along the first sub-transport rail to the first carrier buffer within the first carrier buffer group, and The second conveying device loads the first wafer carrier from the first carrier buffer having first position information, and The third antenna recognizes the first RFID tag of the first wafer carrier loaded within the second transport device, and The value of the first RFID tag is provided to the buffer controller through the RF controller, and A wafer carrier information management system in which the buffer controller removes data combining the value of the first RFID tag and the first location information from the database.
  8. In paragraph 3, It further includes an RF reader that reads the value of the RFID tag recognized from the first to fourth antennas, and A wafer carrier information management system in which the RF reader provides the RFID tag to the RF controller.
  9. In paragraph 1, A wafer carrier information management system comprising either a FOUP or a FOSB, wherein the wafer carrier described above is a wafer carrier.
  10. An RFID tag attached to the wafer carrier, in which wafer carrier identification information is stored; A transport device for transporting the above wafer carrier; A conveyor rail comprising a main conveyor rail that moves the conveyor device from a first process zone to a second process zone, and a sub-conveyor rail that moves the conveyor device within the first process zone; A plurality of carrier buffers disposed on both sides of the above sub-return rail and loaded with the wafer carrier; A plurality of antennas disposed on one side of the above sub-conveyor rail and recognizing the RFID tag of the wafer carrier; An RF reader that reads the value of the RFID tag recognized from the antenna; An RF controller that receives the value of the RFID tag read from the RF reader; A transport device controller that receives location information of the carrier buffer on which the wafer carrier is loaded from the transport device; and A wafer carrier information management system comprising a buffer controller that stores in a database data combining the value of the RFID tag provided by the RF controller and the location information provided by the return device controller.

Description

Wafer Carrier Information Management System The present invention relates to a wafer carrier information management system. Recently, automated logistics management systems have been introduced into semiconductor processes, utilizing auto-guided vehicles, laser-guided vehicles, and overhead hoist transport (OHT) to transport and load wafer carriers containing wafers. Along the movement paths of these wafer carrier transport vehicles, carrier buffers are located to temporarily store wafer carriers during transport. Having information on which wafer carriers are in which carrier buffers allows for efficient management of vehicle movement, particularly when loading new wafer carriers into a buffer or transferring existing carriers to another location. Furthermore, information regarding wafer carriers loaded in carrier buffers plays a crucial role in managing the semiconductor process. FIG. 1 is a top view illustrating a wafer carrier information management system according to some embodiments. FIG. 2 is a top view showing only the first process area of FIG. 1. FIGS. 3 and FIGS. 4 are perspective views illustrating the conveying device of FIGS. 2. This is a flowchart for explaining the operation method of a return device according to some embodiments of FIG. 5. FIGS. 6 and FIGS. 7 are top views for explaining the operation method of a return device. FIGS. 8 to 11 are top views for explaining a method of operation of a conveying device that follows the operation of the conveying device described through FIGS. 5 to 7. FIG. 12 is a flowchart for explaining a method of operation of a conveyor device that follows the operation of the conveyor device described through FIG. 5 to 7. FIGS. 13 to 15 are top views for explaining a method of operation of a conveying device that follows the operation of the conveying device described through FIGS. 5 to 7. Embodiments of the present invention will be described in detail below with reference to the attached drawings. Identical components in the drawings are denoted by the same reference numerals, and redundant descriptions thereof are omitted. FIG. 1 is a top view illustrating a wafer carrier information management system according to some embodiments. Referring to FIG. 1, the wafer carrier information management system according to the present embodiment may include a conveyor rail (100) installed inside a semiconductor manufacturing line (FAB) where semiconductor processes are performed, a wafer carrier conveyor (200, hereinafter referred to as 'conveyor'), a plurality of carrier buffers (300), an antenna (400), an RFID reader (500), an RF controller (600), a conveyor controller (700), a buffer controller (800), and a database (900). A fab (FAB) may include a plurality of process zones, and each process zone may be referred to as a bay. For example, the fab may include a first process zone (AR1) and a second process zone (AR2). However, embodiments of the present invention are not limited thereto, and it is understood that the fab may include two or more process zones. A single bay may include a plurality of carrier buffers (300). A transport device (200) may load or transfer wafer carriers (FP) to or from carrier buffers (300) while moving along a transport rail (100) between carrier buffers (300). The carrier buffers (300) may be located at the same level as the transport rail (100). The types of wafer carriers (FP) used in this embodiment may include a Front Open Shipping Box (FOSB) or a Front Open Unified Pod (FOUP). An FOUP is an antistatic wafer carrier used for transferring between process equipment within a fabrication plant (FAB). Unlike an FOSB, it is used only within the fabrication plant, resulting in a longer service life. Furthermore, since it has functions such as preventing static electricity and surface resistance, FOUPs are primarily used in semiconductor processes recently. Therefore, embodiments of the present invention will be described below using a FOUP as an example of a wafer carrier. An antenna (400) can recognize an RFID tag (270) attached to a wafer carrier (FP). An RFID reader (500) can read identification information regarding the wafer carrier (FP) from the RFID tags (270) recognized by a plurality of antennas (400). For example, an RFID reader (500) can read identification information regarding the wafer carrier (FP) from the values of the RFID tags (270) recognized through four antennas (400). The value of the RFID tag (270) read from the RFID reader (500) can be provided to the buffer controller (800) through the RF controller (600). The transfer device (200) can load a wafer carrier (FP) according to the command of the transfer device controller (700) and move it to a process area. The transfer device (200) can transfer the loaded wafer carrier (FP) to a carrier buffer (300) and provide location information of the carrier buffer (300) to the transfer device controller (700). The transfer device (200) that can be used in this embodiment inc