KR-20260067514-A - DISPLAY PANEL AND ELECTRONIC DEVICE INCLUDING THE SAME, MAUFACTURING OF DISPLAY PANEL

KR20260067514AKR 20260067514 AKR20260067514 AKR 20260067514AKR-20260067514-A

Abstract

One embodiment of the present invention provides a display panel comprising: a substrate; a pixel circuit disposed on the substrate and comprising at least one thin-film transistor, at least one capacitor, and at least one double contact hole; and a light-emitting element electrically connected to the pixel circuit, wherein the double contact hole comprises: a lower contact hole defined in a first insulating layer; a lower conductive layer disposed on the upper surface of the first insulating layer and inside the lower contact hole; an inorganic material filled in a recess provided in the lower conductive layer by the lower contact hole; an intermediate conductive layer disposed on the lower conductive layer and the inorganic material; an upper contact hole defined in a second insulating layer on the first insulating layer; and an upper conductive layer disposed on the upper surface of the second insulating layer and inside the upper contact hole and connected to the intermediate conductive layer.

Inventors

엔귀엔탄티엔
김두나
김한빛
우성욱
이도경
차명근
최상건

Assignees

삼성디스플레이 주식회사

Dates

Publication Date: 20260513
Application Date: 20241105

Claims (20)

Substrate; A pixel circuit disposed on the above substrate and comprising at least one thin-film transistor, at least one capacitor, and at least one double contact hole; and A light-emitting element electrically connected to the pixel circuit above; comprising, The above double contact hole is, Lower contact hole defined in the first insulating layer; A lower conductive layer disposed on the upper surface of the first insulating layer and inside the lower contact hole; Inorganic material filled in the recess provided in the lower conductive layer by the lower contact hole; An intermediate conductive layer disposed on the lower conductive layer and the inorganic material; An upper contact hole defined in the second insulating layer on the first insulating layer; and A display panel comprising: an upper conductive layer disposed on the upper surface of the second insulating layer and inside the upper contact hole and connected to the intermediate conductive layer.
In paragraph 1, The above-mentioned inorganic material is a display panel comprising aggregated nanoparticles made of metal oxide or metal.
In paragraph 1, A display panel comprising at least one material selected from BaTiO3 , BaSO3 , BaSO4 , Ba( NO3 ) 2 , TiO2 , SiO2 , and ZnO.
In paragraph 1, A display panel comprising at least one of the inorganic material selected from Ag, Au, Pt, and Pd.
In paragraph 1, A display panel in which the upper contact hole overlaps with the lower contact hole.
In paragraph 1, The above double contact hole is, A display panel having a protective film disposed along the shape of the lower conductive layer and a buffer film disposed on the protective film further disposed within the recess.
In paragraph 6, The above buffer membrane is a display panel equipped with a material different from the above inorganic material.
In paragraph 1, The above at least one thin-film transistor includes a first thin-film transistor and a second thin-film transistor, and The above at least one double contact hole includes a first double contact hole and a second double contact hole, A display panel in which the first double contact hole connects the semiconductor layer of the first thin-film transistor and the pixel electrode of the light-emitting element.
In paragraph 8, The above at least one capacitor includes a first capacitor and a second capacitor, and The above second double contact hole is a display panel connecting the semiconductor layer of the second thin-film transistor and the second capacitor.
In Paragraph 9, The first capacitor is superimposed on the first thin-film transistor, and the display panel.
Step of forming a conductive layer on a substrate; A step of forming a first insulating layer covering the conductive layer and forming a lower contact hole that exposes a portion of the conductive layer; A step of forming a lower conductive layer connected to the conductive layer along the inner surface of the lower contact hole from the upper surface of the first insulating layer; A step of applying a dispersion solution in which inorganic nanoparticles are dispersed to cover the lower conductive layer on top of the first insulating layer; A method for manufacturing a display panel, comprising the step of annealing the substrate to form a recess in the lower conductive layer through the lower contact hole and filling it with aggregated inorganic nanoparticles.
In Paragraph 11, A method for manufacturing a display panel, further comprising the step of cleaning inorganic nanoparticles disposed outside the recess after the annealing above.
In Paragraph 11, A step of forming an intermediate conductive layer on top of a recess filled with the above-mentioned inorganic nanoparticles; and A step of forming a second insulating layer covering the intermediate conductive layer on the first insulating layer and forming an upper contact hole exposing a portion of the intermediate conductive layer; and A method for manufacturing a display panel, further comprising the step of forming an upper conductive layer connected to the intermediate conductive layer along the inner surface of the upper contact hole from the upper surface of the second insulating layer.
In Paragraph 11, A method for manufacturing a display panel, wherein the above-mentioned inorganic nanoparticles comprise at least one material selected from BaTiO3, BaSO3, BaSO4, Ba(NO3)2, TiO2, SiO2, and ZnO.
In Paragraph 11, A method for manufacturing a display panel, wherein the above-mentioned inorganic nanoparticles comprise at least one material selected from Ag, Au, Pt, and Pd.
In Paragraph 11, A method for manufacturing a display panel, further comprising the step of forming a protective film on the lower conductive layer before applying the dispersion solution.
In Paragraph 16, A step of depositing a buffer film thicker than the protective film on the protective film using chemical vapor deposition to partially fill the internal region of the lower contact hole; and A method for manufacturing a display panel, further comprising the step of removing a buffer film formed on the upper portion of the first insulating film by a chemical-mechanical polishing process.
In Paragraph 17, A method for manufacturing a display panel in which the above buffer membrane is provided with a material different from the above inorganic nanoparticles.
A display panel including double contact holes; and It comprises a cover portion that supports and mounts the above-mentioned display panel; and The above double contact hole is, Lower contact hole defined in the first insulating layer; A lower conductive layer disposed on the upper surface of the first insulating layer and inside the lower contact hole; Inorganic material filled in the recess provided in the lower conductive layer by the lower contact hole; An intermediate conductive layer disposed on the lower conductive layer and the inorganic material; An upper contact hole defined in the second insulating layer on the first insulating layer; and An electronic device comprising: an upper conductive layer disposed on the upper surface of the second insulating layer and inside the upper contact hole and connected to the intermediate conductive layer.
In Paragraph 19, The above electronic device is an electronic device that is a smartphone or a glasses-type display device.

Description

Display panel and electronic device including the same, method of manufacturing the display panel Embodiments of the present invention relate to a display panel, an electronic device including the same, and a method for manufacturing a display panel. Recently, display devices have become more diverse in their applications. In addition, there is a trend of display devices becoming thinner and lighter, expanding their range of use. The display device includes a display panel, and the display panel includes a display element that implements a pixel and a pixel circuit for controlling an electrical signal applied to the display element. The pixel circuit includes a thin film transistor (TFT), a capacitor, and a plurality of wires. Recently, active research is being conducted on the arrangement of thin-film transistors, capacitors, wiring, and contact holes connecting them for display devices in order to achieve high resolution and high integration. FIG. 1 is a schematic plan view of a display panel according to one embodiment of the present invention. FIGS. 2a and 2b are equivalent circuit diagrams of a pixel circuit that can be provided in a display panel according to embodiments of the present invention. FIG. 3 schematically illustrates a cross-sectional view of a display panel according to one embodiment of the present invention. FIG. 4 is a cross-sectional view schematically illustrating a double contact hole that can be applied to one embodiment of the present invention. FIGS. 5 to 10 are schematic cross-sectional views sequentially illustrating a method for forming a double contact hole that can be applied to one embodiment of the present invention. FIG. 11 is a cross-sectional view schematically illustrating a double contact hole that can be applied to one embodiment of the present invention. FIGS. 12 to 15 are schematic cross-sectional views sequentially illustrating a method for forming a double contact hole that can be applied to one embodiment of the present invention. The present invention is capable of various modifications and may have various embodiments; specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention, and the methods for achieving them, will become clear by referring to the embodiments described below in detail together with the drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various forms. Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. When describing with reference to the drawings, identical or corresponding components are given the same reference numerals, and redundant descriptions thereof will be omitted. In the following embodiments, terms such as first, second, etc. are used not in a limiting sense, but for the purpose of distinguishing one component from another component. In the following examples, singular expressions include plural expressions unless the context clearly indicates otherwise. In the following embodiments, terms such as "include" or "have" mean that the features or components described in the specification are present, and do not preclude the possibility that one or more other features or components may be added. In the following embodiments, when a part such as a film, region, or component is described as being on or above another part, it includes not only cases where it is directly on top of another part, but also cases where another film, region, or component is interposed in between. In the drawings, the size of components may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each component shown in the drawings are depicted arbitrarily for convenience of explanation, so the present invention is not necessarily limited to what is illustrated. Where an embodiment can be implemented differently, a specific process sequence may be performed differently from the order described. For example, two processes described consecutively may be performed substantially simultaneously or proceed in the reverse order of the description. In the following embodiments, when it is stated that a membrane, region, component, etc. is connected, it includes not only cases where the membrane, region, or component is directly connected, but also cases where other membranes, regions, or components are interposed between them to form an indirect connection. For example, when it is stated in this specification that a membrane, region, component, etc. is electrically connected, it includes not only cases where the membrane, region, or component, etc. are directly electrically connected, but also cases where other membranes, regions, or components are interposed between them to form an indirect electrical connection. FIG. 1 is a schematic plan view of a display panel according to one embodiment of the pre