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KR-20260067824-A - THERMOCOUPLE THERMOMETER AND SUBSTRATE PROCESSING APPARATUS WITH THE SAME

KR20260067824AKR 20260067824 AKR20260067824 AKR 20260067824AKR-20260067824-A

Abstract

A thermocouple temperature measuring device and a substrate processing device including the same are disclosed. The disclosed thermocouple temperature measuring device comprises: a thermocouple protection unit extending and including a plurality of overlapping tubes; a thermocouple housed inside the thermocouple protection unit; and a measuring base located outside the thermocouple protection unit and connected to the thermocouple so as to be electrically energized.

Inventors

  • 민경인
  • 김영기
  • 이선빈

Assignees

  • 한화솔루션 주식회사

Dates

Publication Date
20260513
Application Date
20241106

Claims (20)

  1. A thermocouple protection section including multiple overlapping tubes and extending thereto; A thermocouple housed inside the thermocouple protection part above; and A thermocouple temperature measuring device characterized by including a measuring base located on the outer side of the thermocouple protection part and connected to the thermocouple so as to be electrically energized.
  2. In Article 1, The above thermocouple protection unit is, A first tube comprising one of metal and quartz, which surrounds the thermocouple with its inner surface facing the outer surface of the thermocouple, and A thermocouple temperature measuring device characterized by including a second tube that surrounds the first tube with its inner surface facing the outer surface of the first tube, and includes the remaining one of the metal and the quartz.
  3. In Article 2, The thermal conductivity of the first tube is greater than the thermal conductivity of the second tube, and A thermocouple temperature measuring device characterized in that the stiffness of the first tube is smaller than the stiffness of the second tube.
  4. A main body having an internal space formed for processing a substrate; and A substrate processing device characterized by comprising: a thermocouple protection unit including a plurality of overlapping tubes that extend into the internal space by penetrating a through hole formed in the wall of the main body; a thermocouple housed inside the thermocouple protection unit; and a thermocouple temperature measuring device including a measuring base located outside the main body and connected to the thermocouple so as to be electrically conductive.
  5. In Paragraph 4, The above thermocouple protection unit is, A first tube surrounding the thermocouple with its inner surface facing the outer surface of the thermocouple, and A substrate processing apparatus characterized by including a second tube that surrounds the first tube, with the inner surface facing the outer surface of the first tube.
  6. In Article 5, The first tube above comprises one of metal and quartz, and A substrate processing apparatus characterized in that the second tube comprises the remaining one of the metal and the quartz.
  7. In Article 5, A substrate processing apparatus characterized in that the first tube and the second tube each comprise a metal.
  8. In Article 6 or Article 7, A substrate processing device characterized in that the above metal is stainless steel.
  9. In Article 5, The thermal conductivity of the first tube is greater than the thermal conductivity of the second tube, and A substrate processing device characterized in that the stiffness of the first tube is smaller than the stiffness of the second tube.
  10. In Paragraph 4, The above measuring instrument base includes a cap comprising a stopper portion that blocks the thermocouple protection portion so as not to penetrate the thermocouple protection portion, and an annular skirt portion protruding toward the wall from the outer periphery of the stopper portion. A substrate processing device characterized in that the above wall includes an annular cap coupling portion inserted into the inner side of the skirt portion and coupled to the cap.
  11. In Article 10, The above skirt portion is provided with a female screw pattern on its inner surface, and A substrate processing device characterized by the above-mentioned cap coupling portion having a male screw pattern on its outer surface that engages with the female screw pattern.
  12. In Article 10, A substrate processing apparatus characterized by the above thermocouple temperature measuring device further including a sealing member interposed between the stopper portion and one end of the cap coupling portion facing the stopper portion.
  13. In Article 12, One end of the above-mentioned cap coupling portion is provided with an inclined surface such that the inner diameter becomes larger as it approaches the stopper portion, and A substrate processing apparatus characterized in that the sealing member is elastically adhered to the outer surface of the outermost tube among the inclined surface, the stopper portion, and the plurality of tubes.
  14. In Paragraph 4, The above measuring instrument base includes a flange that blocks the thermocouple protection so as not to penetrate the thermocouple protection, and has an expanded flange with a diameter larger than the inner diameter of the through hole. A substrate processing device characterized in that the above thermocouple temperature measuring device further includes a fastening bolt for fixing the flange to the wall.
  15. In Article 14, A substrate processing device characterized by the above thermocouple temperature measuring device further including a sealing member interposed between the flange and the outer surface of the wall so as to be elastically in contact with the flange and the outer surface of the wall.
  16. In Paragraph 4, A substrate processing device characterized by the above thermocouple being in contact with the inner surface of the innermost tube among the plurality of tubes and supporting the innermost tube.
  17. In Paragraph 4, The above main body is, The above wall, A tubular side wall extending parallel to the thickness direction of the wall, with one end connected to the outer periphery of the wall and the other end having an open opening formed therein, and It includes a door detachably coupled to the other end of the side wall so as to close the opening, A substrate processing device characterized in that the thermocouple and the thermocouple protection unit extend from the wall toward the door.
  18. In Article 17, A substrate processing device characterized in that the length of the thermocouple protection part is smaller than the length of the side wall and larger than half the length of the side wall.
  19. In Article 17, A substrate processing apparatus characterized by further including a support fixed to the wall and supporting the outermost tube among a plurality of the tubes.
  20. In Article 17, A substrate processing apparatus characterized by further including a support fixed to the door and supporting the outermost tube among a plurality of tubes.

Description

Thermocouple temperature measuring device and substrate processing apparatus including the same The present invention relates to a thermocouple temperature measuring device and a substrate processing device including the same. A solar cell includes a solar cell that converts light energy into electrical energy by the photoelectric effect. The manufacturing process of the solar cell may include a process of depositing materials, such as light-absorbing materials or electrode materials, onto a substrate. The process of depositing a specific material onto a substrate can be performed in a deposition tube. For example, to reduce the defect rate of substrate processing operations such as deposition, it is necessary to accurately measure the internal temperature of the substrate processing tube in real time. FIG. 1 is a cross-sectional view of a substrate processing apparatus according to one embodiment of the present invention. FIG. 2 is a cross-sectional view of FIG. 1, in which the first support is cut along S1-S1 and the second support is cut along S2-S2. FIG. 3 is a cross-sectional view of a thermocouple temperature measuring device according to the first embodiment of the present invention, which is an enlarged view of part A of FIG. 1. Figure 4 is an enlarged view of part B of Figure 1. Figure 5 is an enlarged view of part C of Figure 3. FIG. 6 is a cross-sectional view of a thermocouple temperature measuring device according to a second embodiment of the present invention. Hereinafter, a thermocouple temperature measuring device according to the present invention and a substrate processing device including the same will be described with reference to the attached drawings. In this process, the thickness of lines or the size of components shown in the drawings may be exaggerated for clarity and convenience of explanation. Furthermore, the terms described below are defined considering their functions in the present invention, and these may vary depending on the intention or convention of the user or operator. Therefore, the definitions of these terms should be based on the content throughout this specification. Furthermore, in this specification, when a part is described as being "connected (or joined)" to another part, this includes not only cases where they are "directly connected (or joined)" but also cases where they are "indirectly connected (or joined)" with other members interposed between them. In this specification, when a part is described as "including (or having) a certain component," this means that, unless specifically stated otherwise, it does not exclude other components but may additionally "include (or have)" other components. Additionally, a “unit,” “module,” or “part” for a component as used herein performs at least one function or operation. Furthermore, a “unit,” “module,” or “part” may perform a function or operation by hardware, software, or a combination of hardware and software. Additionally, a plurality of “units,” a plurality of “modules,” or a plurality of “parts,” excluding a “unit,” “module,” or “part” that must be performed on specific hardware or on at least one processor, may be integrated into at least one module. A singular expression includes a plural expression unless the context clearly indicates otherwise. Furthermore, throughout this specification, the same reference numerals may refer to the same components. Even if the same or similar reference numerals are not mentioned or described in a specific drawing, they may be described based on other drawings. Additionally, even if a part is not indicated by a reference numeral in a specific drawing, that part may be described based on other drawings. Furthermore, the number, shape, size, and relative differences in size of the detailed components included in the drawings of this application are set for ease of understanding and do not limit the embodiments, and may be implemented in various forms. FIG. 1 is a cross-sectional view of a substrate processing apparatus according to one embodiment of the present invention, FIG. 2 is a cross-sectional view of FIG. 1 in which the first support is cut along S1-S1 and the second support is cut along S2-S2, FIG. 3 is a cross-sectional view of a thermocouple temperature measuring apparatus according to the first embodiment of the present invention, enlarged view of part A of FIG. 1, FIG. 4 is an enlarged view of part B of FIG. 1, and FIG. 5 is an enlarged view of part C of FIG. 3. Referring to FIGS. 1 to 5, a substrate processing device (10) according to one embodiment of the present invention includes a main body (11) and a thermocouple temperature measuring device (100). An internal space (47) for processing a substrate (not shown) is formed in the main body (11). The substrate may be, for example, a substrate for a solar cell. For example, the substrate processing device (10) is a deposition device that deposits a specific material on the surface of a substrate for a solar cell,