KR-20260067947-A - Display device, Electron device and method for fabricating the same

Abstract

A display device according to one embodiment comprises: a substrate including a light-emitting region; an anode electrode including silver located on the light-emitting region of the substrate; and a device insulating layer covering the edge of the anode electrode and defining a light-emitting opening, wherein the anode electrode comprises a first layer located on the substrate; a second layer located on the first layer; and a third layer located on the second layer and including a protrusion protruding from the side of the second layer, wherein the width of the protrusion of the third layer is 0.1 micrometer or less.

Inventors

• 조현민
• 박태상
• 진동규
• 정유광

Assignees

• 삼성디스플레이 주식회사

Dates

Publication Date

20260513

Application Date

20250121

Priority Date

20241104

Claims (20)

1. A substrate including a light-emitting region; An anode electrode located on a light-emitting region of the substrate and comprising silver; and It includes a device insulating layer that covers the edge of the anode electrode and defines a light-emitting opening, and The above anode electrode is a first layer located on the substrate; A second layer located on the first layer; and It includes a third layer located on the second layer and including a protrusion protruding from the side of the second layer, A display device in which the width of the protrusion of the third layer is 0.1 micrometer or less.
2. In Article 1, The first layer includes an upper surface in contact with the second layer, and The upper surface of the first layer includes a first portion that is not in contact with the second layer and a second portion that is in contact with the second layer, and A display device in which the width of the first portion is 0.1 micrometers or less.
3. In Article 2, A display device in which the height of the second layer is higher than the height of the first layer and the height of the third layer.
4. In Paragraph 3, A display device comprising a transparent conductive material in the first layer and the third layer.
5. In Article 1, The above-mentioned light-emitting region includes a first light-emitting region and a second light-emitting region adjacent to each other, and A first resonant auxiliary layer superimposed on the first light-emitting region and located between the first layer of the anode electrode and the substrate; and It further includes a second resonant auxiliary layer that overlaps the second light-emitting region and is spaced apart from the first resonant auxiliary layer, A display device in which the height of the first resonant auxiliary layer and the height of the second resonant auxiliary layer are different.
6. In Article 5, A display device in which an anode electrode located on the first resonant auxiliary layer and an anode electrode located on the second resonant auxiliary layer are located at different heights.
7. In Article 5, A display device in which the gap between the second layer of an anode electrode overlapping the first light-emitting region and the second layer of an anode electrode overlapping the second light-emitting region is 1.86 micrometers or less.
8. In Article 1, It further includes a residual pattern positioned in contact with the third layer of the anode electrode and surrounding the light-emitting opening. The above residual pattern is a display device that overlaps with a protrusion included in the third layer of the anode electrode.
9. A step of forming a first layer, a second layer, and a third layer of an anode electrode on a substrate, and then performing a dry etching process to remove a portion of the third layer; A step of performing a cleaning process after plasma treatment on a portion of the second layer; and A method for manufacturing a display device comprising the step of removing a portion of the first layer by performing a dry etching process.
10. In Article 9, The first layer and the third layer comprise a transparent conductive material, The above second layer is a method for manufacturing a display device comprising silver.
11. In Article 10, In the step of performing a cleaning process after plasma treatment on a part of the second layer, The above plasma treatment is performed using a gas containing fluorine, and A method for manufacturing a display device in which the bias power among the process parameter values of the above plasma treatment is performed as 0W.
12. In Article 11, The above plasma treatment further includes oxygen gas, and A method for manufacturing a display device in which a portion of the above-mentioned second layer includes silver fluoride.
13. In Article 12, A method for manufacturing a display device in which the above silver fluoride is dissolved in at least one of a cleaning solution such as an organic stripper or deionized water.
14. In Article 9, The third layer includes a protrusion that protrudes beyond the side of the second layer, and A method for manufacturing a display device in which the width of the above-mentioned protrusion is 0.1 micrometers or less.
15. In Article 9, A method for manufacturing a display device in which the side of the first layer, the side of the second layer, and the side of the third layer are located on the same line.
16. At least one display device comprising a substrate including a light-emitting region; and The device comprises at least one of a display module, a processor, a memory, and a power module connected to the above display device, and The above-mentioned at least one display device is, An anode electrode located on a light-emitting region of the substrate and comprising silver; and It includes a device insulating layer that covers the edge of the anode electrode and defines a light-emitting opening, and The above anode electrode is a first layer located on the substrate; A second layer located on the first layer; and It includes a third layer located on the second layer and including a protrusion protruding from the side of the second layer, An electronic device in which the width of the protrusion of the third layer is 0.1 micrometer or less.
17. In Article 16, The first layer includes an upper surface in contact with the second layer, and The upper surface of the first layer includes a first portion that is not in contact with the second layer and a second portion that is in contact with the second layer, and An electronic device in which the width of the first portion is 0.1 micrometers or less.
18. In Article 17, An electronic device in which the height of the second layer is higher than the height of the first layer and the height of the third layer.
19. In Article 18, The electronic device comprising the first layer and the third layer, wherein the first layer and the third layer comprise a transparent conductive material.
20. In Article 16, The above-mentioned light-emitting region includes a first light-emitting region and a second light-emitting region adjacent to each other, and An electronic device in which the gap between the second layer of the anode electrode overlapping the first light-emitting region and the second layer of the anode electrode overlapping the second light-emitting region is 1.86 micrometers or less.

Description

Display device, electronic device using the same, and method for fabricating the same The present invention relates to a display device, an electronic device using the same, and a method for manufacturing a display device. As the information society develops, the demand for display devices for displaying images is increasing in various forms. For example, display devices are being applied to a wide range of electronic devices, such as smartphones, digital cameras, laptop computers, navigation systems, and smart televisions. Display devices may be flat panel display devices, such as Liquid Crystal Display Devices, Field Emission Display Devices, and Organic Light Emitting Display Devices. Among these flat panel display devices, light-emitting display devices include light-emitting elements in which each pixel of the display panel can emit light independently, thereby enabling the display of images without a backlight unit that provides light to the display panel. FIG. 1 is an exploded perspective view showing a display device according to one embodiment. Figure 2 is a layout diagram showing an example of a display panel illustrated in Figure 1. FIG. 3 is an equivalent circuit diagram of a first pixel according to one embodiment. Figure 4 is a plan view showing the arrangement of multiple pixels located in the display area of Figure 2. FIG. 5 is a cross-sectional view of a display device according to one embodiment cut along X1-X1' of FIG. 4. FIG. 6 is an enlarged cross-sectional view of a display element layer overlapping the first light-emitting region and the second light-emitting region in FIG. 5. Figure 7 is an enlarged cross-sectional view of the anode electrode in Figure 5. FIG. 8 is a cross-sectional view of the anode electrode in FIG. 5, enlarged, as in another embodiment. FIG. 9 is a flowchart showing a method for manufacturing an anode electrode in one embodiment. FIGS. 10 to 12 are cross-sectional views showing step S100 of FIG. 9. FIGS. 13 and FIGS. 15 are cross-sectional views showing the plasma treatment process during step S200 of FIG. 9. Figure 14 is a cross-sectional view illustrating the mechanism of silver fluoride formation. FIGS. 16 to 18 are cross-sectional views showing the cleaning process of S200 of FIG. 9. FIGS. 19 and FIGS. 20 are cross-sectional views showing step S300 of FIG. 9. FIG. 21 is a block diagram of an electronic device according to one embodiment. FIG. 22 is a schematic diagram of an electronic device according to various embodiments. The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. When elements or layers are referred to as being "on" another element or layer, this includes cases where another layer or element is interposed directly on or in the middle of another element. Throughout the specification, the same reference numerals refer to the same components. Shapes, sizes, ratios, angles, numbers, etc., disclosed in the drawings for describing embodiments are exemplary and therefore the invention is not limited to the depicted details. Although terms such as "first," "second," etc., are used to describe various components, it goes without saying that these components are not limited by these terms. These terms are used merely to distinguish one component from another. Therefore, it goes without saying that the first component mentioned below may also be the second component within the technical scope of the present invention. The features of each of the various embodiments of the present invention may be combined or combined with one another, either partially or wholly, and may technically enable various interlocking and operation. Each embodiment may be implemented independently of one another or may be implemented together in an associated relationship. Specific embodiments will be described below with reference to the attached drawings. FIG. 1 is an exploded perspective view showing a display device according to one embodiment. FIG. 2 is a block diagram showing a display device according to one embodiment. Referring to FIGS. 1 and 2, a display device (10) according to one embodiment is a device for displaying video or still images. The display device (10) according to one embodiment can be applied to portable electronic devices such as mobile phones, smartphones, tablet personal computers, mobile communication terminals, electronic notebooks, electronic books, portable multimedia players (PMPs), navigation systems, and ultra mobile PCs (