RU-2861518-C1 - METHOD FOR ELECTRON BEAM SURFACE MODIFICATION OF MOLYBDENUM PRODUCTS

RU2861518C1RU 2861518 C1RU2861518 C1RU 2861518C1RU-2861518-C1

Abstract

FIELD: materials science. SUBSTANCE: invention relates to electron beam cutting and can be used for electron beam surface modification of molybdenum products. The method includes melting the product material by relative movement of the electron beam and the product in a predetermined manner. Using an electron gun beam deflection system, creating a continuous movement of the electron beam along each of n linear trajectories located parallel to each other at a distance x = (0.6-0.8) mm, and its cyclic movement perpendicular to the linear trajectory, forming a surface texture in the form of a set of linear depressions with a depth h = (100-250) mcm, a width b = (0.67-0.95) mm, and protrusions formed at their boundaries due to displacement of the melted volume of material, wherein the power density of the exposure q, the diameter d and the linear movement speed V of the electron beam are selected in the following ranges: q = (0.64-1.53)·10 6 , W/cm 2 ; d = (0.4-0.6) mm; V = (30-40) mm/s. EFFECT: increasing the stability of obtaining a homogeneous surface texture of molybdenum products by melting with the formation of a set of depressions and protrusions. 1 cl, 3 dwg, 1 tbl, 1 ex

Inventors

Babaev Artem Sergeevich
Sliva Andrei Petrovich
Zhukov Ilia Aleksandrovich
Shugaepov Shamil Nailevich
Akhmetgaliev Ravil Shamilevich

Dates

Publication Date: 20260505
Application Date: 20251204

Claims (4)

A method for electron beam modification of the surface of articles made of molybdenum, including melting the material of the article with relative movement in a given manner of the electron beam and the article, characterized in that the beam deflection system of the electron gun creates continuous movement of the electron beam along each of n linear trajectories located parallel to each other at a distance x = (0.6-0.8) mm and its cyclic movement, perpendicular to the linear trajectory, with the formation of a surface texture in the form of a set of linear depressions with a depth of h = (100-250) μm, a width of b = (0.67-0.95) mm, and protrusions formed at their boundaries due to the displacement of the melted volume of material, wherein the impact power density q , the diameter d and the linear movement speed V of the electron beam are selected in the following ranges:
q = (0.64-1.53)⋅10 6 , W/cm 2 ;
d = (0.4-0.6), mm;
V = (30-40), mm/s.

Description

The invention relates to a method for electron beam modification of the surface of molybdenum products and can be used in microelectronics and in various branches of mechanical engineering. A method is known for texturing the surface of a deforming tool [1], which has a structured embossing surface intended for plastic deformation of the substrate by bringing it into contact with it. However, this method can produce a textured surface by embossing (rolling sheets with rollers), i.e. plastic deformation, which is only suitable for materials that have the property of plastically deforming when an external mechanical load is applied. The closest to the proposed technical solution is a method of modifying a surface [2], which involves setting the product and a high-power beam into relative motion in intersecting directions so as to expose a number of positions on the product to the high-power beam, and in each position setting the high-power beam into motion in a multitude of directions with respect to the product in a predetermined manner, due to which, in each position, the material of the product is melted and moved under the action of the high-power beam in such a way as to form a recess or hole. The disadvantage of the method is that it is only applicable to 316L stainless steels with a melting point of (1375÷1400) °C and to AA3004 aluminum alloys with a melting point of (633÷650) °C, which limits the use of the method for modifying the surface of metals with a high melting point. The technical result of the invention consists in increasing the stability of obtaining a uniform surface texture of molybdenum products by melting with the formation of a set of depressions and protrusions. The technical result is achieved by developing a method for electron-beam modification of the surface of molybdenum products, which includes melting the product material with relative movement of the electron beam and the product in a predetermined manner. The beam deflection system of the electron gun creates continuous movement of the electron beam along each of n linear trajectories located parallel to each other at a distance of x = (0.6 ÷ 0.8) mm and its cyclic movement perpendicular to the linear trajectory, with the formation of a surface texture in the form of a set of linear depressions with a depth h = (100÷250) µm, width b = (0.67÷0.95) mm and protrusions formed at their boundaries due to the displacement of the melted volume of material, while the power density of the electron beam q , diameter d and the linear movement speed of the electron beam V are selected in the following ranges: q = (0.64÷1.53)⋅10 6 , W/cm 2 ; d = (0.4÷0.6) mm; V = (30÷40) mm/s. The essence of the invention is explained by drawings. Fig. 1 – General diagram of an electron beam installation (electron gun) implementing the claimed method, where the following are indicated: electron gun body 1, electron beam 2, workpiece surface 3, deflection system along the X axis 4, deflection system along the Y axis 5, focusing magnetic lens 6, cathode 7, control electrode 8, anode 9. Fig. 2 – Photograph of the original surface of a molybdenum product. Fig. 3 – Photograph of the surface texture of a molybdenum product formed using the claimed method, where a is a photograph of the surface taken with an electron microscope; b is a photograph of the surface taken with a confocal microscope. The device for implementing the claimed method, the diagram of which is shown in Fig. 1, operates as follows. An electron beam 2 is generated inside the electron gun 1 and directed onto the workpiece surface (plate) made of molybdenum 3. During the time interval t = (0.001 ÷ 0.1) s, the electron beam 2 acts on a point on the surface. This causes local heating, melting of the material, and formation of a depression and a protrusion due to the displacement of a certain volume of material by dynamic pressure during partial evaporation of the material surface. After which the electron beam is directed to the next workpiece point. The movement of the electron beam in the direction of the X- axis and the Y- axis on the workpiece surface between workpiece points with a specified distance x within the workpiece impact area is carried out virtually inertialessly due to electromagnetic deflection systems 4 and 5. Focusing magnetic lens 6, cathode 7, control electrode 8, and anode 9 ensure the direction of the electron beam 2 onto the workpiece surface and the specified impact parameters (power density, current strength). The set of processed points forms a modified surface of the product. The required power density q is achieved by varying the current of the electron beam 2 and the current of the focusing magnetic lens 6. Depending on the distance x, the diameter of the electron beam d, and the power density of the electron beam q, the dimensions of the resulting depressions of depth h and width b and the protrusions on the processed surface of the product can be adjusted (Fig. 3).