TW-I924631-B - ATOMIC LAYER DEPOSITION OF OXIDES AND NITRIDESInventorsJUSSILA, HENRIZHU, CHIYUXIE, QIKIM, JIYEONBLOMBERG, TOM E.Assignees荷蘭商ＡＳＭ ＩＰ控股公司DatesPublication Date20260511Application Date20200207Priority Date20190214