TW-I924638-B - COMPOSITIONS FOR TUNGSTEN ETCHING INHIBITION, PROCESS FOR THE MANUFACTURE OF A SEMICONDUCTOR DEVICE, AND USE OF THE COMPOSITION

Inventors

• LAUTER, MICHAEL
• GUEVENC, Haci Osman
• CHIU, WEI LAN
• WEI, TE YU

Assignees

• 德商巴斯夫歐洲公司

Dates

Publication Date

20260511

Application Date

20200806

Priority Date

20190808