TW-I924687-B - Semiconductor wafer processing solution containing hypobromide ions and pH buffer, and etching method.

Inventors

• SHIMODA, TAKAFUMI
• KIKKAWA, YUKI
• SATO, TOMOAKI
• NEGISHI, TAKAYUKI

Assignees

• 日商德山股份有限公司

Dates

Publication Date

20260511

Application Date

20210806

Priority Date

20200807