TW-I924722-B - AN APPARATUS FOR ADJUSTING FILM PROPERTIES DURING DEPOSITION
Inventors
- SUN, LIZHONG
- YANG, YI
- CHEN, JIAN JANSON
- MA, CHONG
- YANG, XIAODONG
Assignees
- 美商應用材料股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20211110
- Priority Date
- 20201116