TW-I924781-B - PLASMA PROCESSING SYSTEM AND METHOD USING RADIO FREQUENCY (RF) AND MICROWAVE POWER
Inventors
- Kim, Yunho
- SHI, Yanxiang
- WANG, MINGMEI
Assignees
- 日商東京威力科創股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220207
- Priority Date
- 20210203