TW-I924782-B - WIDE-COVERAGE EDGE RING FOR ENHANCED SHIELDING IN SUBSTRATE PROCESSING SYSTEMS
Inventors
- CHOU, SHANG-I
- WANG, DANDAN
- GAJUDO, GIOVANNI PAOLO
- GRAGG, GARY
- O'NEILL, ROBERT
Assignees
- 美商蘭姆研究公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220207
- Priority Date
- 20211203