TW-I924799-B - METHOD, SYSTEM, AND COMPUTER READABLE STORAGE MEDIUM FOR CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHINE LEARNING

Inventors

• BARYSHNIKOV, ANTON V.
• AYDIN, Aykut
• HUANG, ZUBIN
• CHENG, Rui
• YANG, YI
• KEDLAYA, Diwakar
• SHANKARAMURTHY, Venkatanarayana
• NITTALA, KRISHNA
• JANAKIRAMAN, KARTHIK

Assignees

• 美商應用材料股份有限公司

Dates

Publication Date

20260511

Application Date

20220303

Priority Date

20210303