TW-I924811-B - SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER POSITION ADJUSTMENT METHOD
Inventors
- TAKAYOSHI, JOJI
- SATO, HIDEHIKO
- NAGAHATA, HIROSHI
- KIMURA, Yuri
Assignees
- 日商東京威力科創股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220315
- Priority Date
- 20210329