TW-I924814-B - METHOD OF ASSEMBLING REACTOR SYSTEM AND REACTOR SYSTEM ADAPTED FOR MONITORING EDGE WAFER TEMPERATURES AND ALIGNMENT JIG ADAPTED FOR ALIGNING EDGE PYROMETER WITH WAFER EDGE IN REACTOR SYSTEM
Inventors
- NAIK, RUTVIJ
- HUANG, SHUJIN
- SU, JUNWEI
- LIN, Xing
Assignees
- 荷蘭商ＡＳＭ ＩＰ私人控股有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220317
- Priority Date
- 20210318