TW-I924815-B - REACTOR SYSTEM AND METHOD FOR OPERATING THE SAME
Inventors
- YE, HAN
- KAJBAFVALA, AMIR
- LU, YANFU
- ZHOU, Kai
- Gao, Peipei
- WANG, WENTAO
- PATIL, Kishor
- GAO, Fan
- MAHADEVAN, KRISHNASWAMY
- LIN, Xing
- DEMOS, ALEXANDROS
Assignees
- 荷蘭商ASM IP私人控股有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220317
- Priority Date
- 20210318