TW-I924830-B - Composition for forming silicon-containing underlayer films for directional self-assembly
Inventors
- SHIGAKI, Shuhei
- MIZUOCHI, Ryuta
- TOKUNAGA, Hikaru
Assignees
- 日商日產化學股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220330
- Priority Date
- 20210331