TW-I924844-B - SUBSRTATE PROCESSING APPARATUS, TEMPERATURE MEASUREMENT METHOD AND TEMPERATURE CONTROL METHOD
Inventors
- KWON, OH HYEON
- BACK, IN WOO
Assignees
- 南韓商周星工程股份有限公司
Dates
- Publication Date
- 20260511
- Application Date
- 20220420
- Priority Date
- 20210420